2/21/2012	12:20:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	12:20:36 AM	Recipe started at 12:20 AM
2/21/2012	12:20:36 AM	Helium valve closed
2/21/2012	12:20:37 AM	H2 valve closed
2/21/2012	12:20:37 AM	BCl3 valve closed
2/21/2012	12:20:37 AM	PH3 valve closed
2/21/2012	12:20:37 AM	SiCl4 pre valve closed
2/21/2012	12:20:37 AM	SiCl4 post valve closed
2/21/2012	12:20:37 AM	Main Vac valve closed
2/21/2012	12:20:37 AM	Bubbler valve closed
2/21/2012	12:20:37 AM	Bypass valve opened
2/21/2012	12:20:37 AM	Helium MFC set to  0.000000
2/21/2012	12:20:37 AM	H2 MFC set to  0.000000
2/21/2012	12:20:37 AM	BCl3 MFC set to  0.000000
2/21/2012	12:20:37 AM	PH3 MFC set to  0.000000
2/21/2012	12:20:37 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:20:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:20:37 AM	Tube furnace set to 0
2/21/2012	12:21:47 AM	Helium valve closed
2/21/2012	12:21:47 AM	H2 valve closed
2/21/2012	12:21:47 AM	BCl3 valve closed
2/21/2012	12:21:47 AM	PH3 valve closed
2/21/2012	12:21:47 AM	SiCl4 pre valve closed
2/21/2012	12:21:47 AM	SiCl4 post valve closed
2/21/2012	12:21:47 AM	Main Vac valve closed
2/21/2012	12:21:47 AM	Bubbler valve closed
2/21/2012	12:21:47 AM	Bypass valve opened
2/21/2012	12:21:47 AM	Helium MFC set to  0.000000
2/21/2012	12:21:47 AM	H2 MFC set to  0.000000
2/21/2012	12:21:47 AM	BCl3 MFC set to  0.000000
2/21/2012	12:21:47 AM	PH3 MFC set to  0.000000
2/21/2012	12:21:47 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:21:47 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:21:47 AM	Tube furnace set to 0
2/21/2012	12:22:47 AM	Helium valve closed
2/21/2012	12:22:47 AM	H2 valve closed
2/21/2012	12:22:47 AM	BCl3 valve closed
2/21/2012	12:22:47 AM	PH3 valve closed
2/21/2012	12:22:47 AM	SiCl4 pre valve closed
2/21/2012	12:22:47 AM	SiCl4 post valve closed
2/21/2012	12:22:47 AM	Bypass valve closed
2/21/2012	12:22:47 AM	Bubbler valve closed
2/21/2012	12:22:47 AM	Main Vac valve opened
2/21/2012	12:22:47 AM	Helium MFC set to  0.000000
2/21/2012	12:22:47 AM	H2 MFC set to  0.000000
2/21/2012	12:22:47 AM	BCl3 MFC set to  0.000000
2/21/2012	12:22:47 AM	PH3 MFC set to  0.000000
2/21/2012	12:22:47 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:22:47 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:22:47 AM	Tube furnace set to 0
2/21/2012	12:22:48 AM	Run finished at 12:22 AM
2/21/2012	12:22:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	12:26:30 AM	Recipe started at 12:26 AM
2/21/2012	12:26:30 AM	Helium valve closed
2/21/2012	12:26:30 AM	H2 valve closed
2/21/2012	12:26:30 AM	BCl3 valve closed
2/21/2012	12:26:30 AM	PH3 valve closed
2/21/2012	12:26:30 AM	SiCl4 pre valve closed
2/21/2012	12:26:30 AM	SiCl4 post valve closed
2/21/2012	12:26:30 AM	Bypass valve closed
2/21/2012	12:26:30 AM	Bubbler valve closed
2/21/2012	12:26:30 AM	Main Vac valve opened
2/21/2012	12:26:30 AM	Helium MFC set to  0.000000
2/21/2012	12:26:30 AM	H2 MFC set to  0.000000
2/21/2012	12:26:30 AM	BCl3 MFC set to  0.000000
2/21/2012	12:26:30 AM	PH3 MFC set to  0.000000
2/21/2012	12:26:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:26:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:26:30 AM	Tube furnace set to 0
2/21/2012	12:27:00 AM	H2 valve closed
2/21/2012	12:27:00 AM	BCl3 valve closed
2/21/2012	12:27:00 AM	PH3 valve closed
2/21/2012	12:27:00 AM	SiCl4 pre valve closed
2/21/2012	12:27:00 AM	SiCl4 post valve closed
2/21/2012	12:27:00 AM	Bypass valve closed
2/21/2012	12:27:00 AM	Bubbler valve closed
2/21/2012	12:27:00 AM	Helium valve opened
2/21/2012	12:27:00 AM	Main Vac valve opened
2/21/2012	12:27:00 AM	Helium MFC set to  20.000000
2/21/2012	12:27:00 AM	H2 MFC set to  0.000000
2/21/2012	12:27:00 AM	BCl3 MFC set to  0.000000
2/21/2012	12:27:00 AM	PH3 MFC set to  0.000000
2/21/2012	12:27:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:27:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:27:00 AM	Tube furnace set to 0
2/21/2012	12:27:30 AM	Helium valve closed
2/21/2012	12:27:30 AM	H2 valve closed
2/21/2012	12:27:30 AM	BCl3 valve closed
2/21/2012	12:27:30 AM	PH3 valve closed
2/21/2012	12:27:30 AM	SiCl4 pre valve closed
2/21/2012	12:27:30 AM	SiCl4 post valve closed
2/21/2012	12:27:30 AM	Bypass valve closed
2/21/2012	12:27:30 AM	Bubbler valve closed
2/21/2012	12:27:30 AM	Main Vac valve opened
2/21/2012	12:27:30 AM	Helium MFC set to  0.000000
2/21/2012	12:27:30 AM	H2 MFC set to  0.000000
2/21/2012	12:27:30 AM	BCl3 MFC set to  0.000000
2/21/2012	12:27:30 AM	PH3 MFC set to  0.000000
2/21/2012	12:27:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:27:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:27:30 AM	Tube furnace set to 0
2/21/2012	12:28:00 AM	H2 valve closed
2/21/2012	12:28:00 AM	BCl3 valve closed
2/21/2012	12:28:00 AM	PH3 valve closed
2/21/2012	12:28:00 AM	SiCl4 pre valve closed
2/21/2012	12:28:00 AM	SiCl4 post valve closed
2/21/2012	12:28:00 AM	Bypass valve closed
2/21/2012	12:28:00 AM	Bubbler valve closed
2/21/2012	12:28:00 AM	Helium valve opened
2/21/2012	12:28:00 AM	Main Vac valve opened
2/21/2012	12:28:00 AM	Helium MFC set to  20.000000
2/21/2012	12:28:00 AM	H2 MFC set to  0.000000
2/21/2012	12:28:00 AM	BCl3 MFC set to  0.000000
2/21/2012	12:28:01 AM	PH3 MFC set to  0.000000
2/21/2012	12:28:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:28:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:28:01 AM	Tube furnace set to 0
2/21/2012	12:28:31 AM	Helium valve closed
2/21/2012	12:28:31 AM	H2 valve closed
2/21/2012	12:28:31 AM	BCl3 valve closed
2/21/2012	12:28:31 AM	PH3 valve closed
2/21/2012	12:28:31 AM	SiCl4 pre valve closed
2/21/2012	12:28:31 AM	SiCl4 post valve closed
2/21/2012	12:28:31 AM	Bypass valve closed
2/21/2012	12:28:31 AM	Bubbler valve closed
2/21/2012	12:28:31 AM	Main Vac valve opened
2/21/2012	12:28:31 AM	Helium MFC set to  0.000000
2/21/2012	12:28:31 AM	H2 MFC set to  0.000000
2/21/2012	12:28:31 AM	BCl3 MFC set to  0.000000
2/21/2012	12:28:31 AM	PH3 MFC set to  0.000000
2/21/2012	12:28:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:28:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:28:31 AM	Tube furnace set to 0
2/21/2012	12:29:01 AM	H2 valve closed
2/21/2012	12:29:01 AM	BCl3 valve closed
2/21/2012	12:29:01 AM	PH3 valve closed
2/21/2012	12:29:01 AM	SiCl4 pre valve closed
2/21/2012	12:29:01 AM	SiCl4 post valve closed
2/21/2012	12:29:01 AM	Bypass valve closed
2/21/2012	12:29:01 AM	Bubbler valve closed
2/21/2012	12:29:01 AM	Helium valve opened
2/21/2012	12:29:01 AM	Main Vac valve opened
2/21/2012	12:29:01 AM	Helium MFC set to  20.000000
2/21/2012	12:29:01 AM	H2 MFC set to  0.000000
2/21/2012	12:29:01 AM	BCl3 MFC set to  0.000000
2/21/2012	12:29:01 AM	PH3 MFC set to  0.000000
2/21/2012	12:29:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:29:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:29:01 AM	Tube furnace set to 0
2/21/2012	12:29:31 AM	Helium valve closed
2/21/2012	12:29:31 AM	H2 valve closed
2/21/2012	12:29:31 AM	BCl3 valve closed
2/21/2012	12:29:31 AM	PH3 valve closed
2/21/2012	12:29:31 AM	SiCl4 pre valve closed
2/21/2012	12:29:31 AM	SiCl4 post valve closed
2/21/2012	12:29:31 AM	Bypass valve closed
2/21/2012	12:29:31 AM	Bubbler valve closed
2/21/2012	12:29:31 AM	Main Vac valve opened
2/21/2012	12:29:31 AM	Helium MFC set to  0.000000
2/21/2012	12:29:31 AM	H2 MFC set to  0.000000
2/21/2012	12:29:31 AM	BCl3 MFC set to  0.000000
2/21/2012	12:29:31 AM	PH3 MFC set to  0.000000
2/21/2012	12:29:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:29:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:29:31 AM	Tube furnace set to 0
2/21/2012	12:30:01 AM	H2 valve closed
2/21/2012	12:30:01 AM	BCl3 valve closed
2/21/2012	12:30:01 AM	PH3 valve closed
2/21/2012	12:30:01 AM	SiCl4 pre valve closed
2/21/2012	12:30:01 AM	SiCl4 post valve closed
2/21/2012	12:30:01 AM	Bypass valve closed
2/21/2012	12:30:01 AM	Bubbler valve closed
2/21/2012	12:30:01 AM	Helium valve opened
2/21/2012	12:30:01 AM	Main Vac valve opened
2/21/2012	12:30:01 AM	Helium MFC set to  20.000000
2/21/2012	12:30:01 AM	H2 MFC set to  0.000000
2/21/2012	12:30:01 AM	BCl3 MFC set to  0.000000
2/21/2012	12:30:01 AM	PH3 MFC set to  0.000000
2/21/2012	12:30:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:30:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:30:01 AM	Tube furnace set to 0
2/21/2012	12:30:32 AM	Helium valve closed
2/21/2012	12:30:32 AM	H2 valve closed
2/21/2012	12:30:32 AM	BCl3 valve closed
2/21/2012	12:30:32 AM	PH3 valve closed
2/21/2012	12:30:32 AM	SiCl4 pre valve closed
2/21/2012	12:30:32 AM	SiCl4 post valve closed
2/21/2012	12:30:32 AM	Bypass valve closed
2/21/2012	12:30:32 AM	Bubbler valve closed
2/21/2012	12:30:32 AM	Main Vac valve opened
2/21/2012	12:30:32 AM	Helium MFC set to  0.000000
2/21/2012	12:30:32 AM	H2 MFC set to  0.000000
2/21/2012	12:30:32 AM	BCl3 MFC set to  0.000000
2/21/2012	12:30:32 AM	PH3 MFC set to  0.000000
2/21/2012	12:30:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:30:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:30:32 AM	Tube furnace set to 0
2/21/2012	12:31:02 AM	H2 valve closed
2/21/2012	12:31:02 AM	BCl3 valve closed
2/21/2012	12:31:02 AM	PH3 valve closed
2/21/2012	12:31:02 AM	SiCl4 pre valve closed
2/21/2012	12:31:02 AM	SiCl4 post valve closed
2/21/2012	12:31:02 AM	Bypass valve closed
2/21/2012	12:31:02 AM	Bubbler valve closed
2/21/2012	12:31:02 AM	Helium valve opened
2/21/2012	12:31:02 AM	Main Vac valve opened
2/21/2012	12:31:02 AM	Helium MFC set to  20.000000
2/21/2012	12:31:02 AM	H2 MFC set to  0.000000
2/21/2012	12:31:02 AM	BCl3 MFC set to  0.000000
2/21/2012	12:31:02 AM	PH3 MFC set to  0.000000
2/21/2012	12:31:02 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:31:02 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:31:02 AM	Tube furnace set to 0
2/21/2012	12:31:32 AM	Helium valve closed
2/21/2012	12:31:32 AM	H2 valve closed
2/21/2012	12:31:32 AM	BCl3 valve closed
2/21/2012	12:31:32 AM	PH3 valve closed
2/21/2012	12:31:32 AM	SiCl4 pre valve closed
2/21/2012	12:31:32 AM	SiCl4 post valve closed
2/21/2012	12:31:32 AM	Bypass valve closed
2/21/2012	12:31:32 AM	Bubbler valve closed
2/21/2012	12:31:32 AM	Main Vac valve opened
2/21/2012	12:31:32 AM	Helium MFC set to  0.000000
2/21/2012	12:31:32 AM	H2 MFC set to  0.000000
2/21/2012	12:31:32 AM	BCl3 MFC set to  0.000000
2/21/2012	12:31:32 AM	PH3 MFC set to  0.000000
2/21/2012	12:31:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:31:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:31:32 AM	Tube furnace set to 0
2/21/2012	12:32:02 AM	H2 valve closed
2/21/2012	12:32:02 AM	BCl3 valve closed
2/21/2012	12:32:02 AM	PH3 valve closed
2/21/2012	12:32:02 AM	SiCl4 pre valve closed
2/21/2012	12:32:02 AM	SiCl4 post valve closed
2/21/2012	12:32:02 AM	Bypass valve closed
2/21/2012	12:32:02 AM	Bubbler valve closed
2/21/2012	12:32:02 AM	Helium valve opened
2/21/2012	12:32:02 AM	Main Vac valve opened
2/21/2012	12:32:02 AM	Helium MFC set to  20.000000
2/21/2012	12:32:02 AM	H2 MFC set to  0.000000
2/21/2012	12:32:02 AM	BCl3 MFC set to  0.000000
2/21/2012	12:32:02 AM	PH3 MFC set to  0.000000
2/21/2012	12:32:02 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:32:02 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:32:02 AM	Tube furnace set to 0
2/21/2012	12:32:32 AM	Helium valve closed
2/21/2012	12:32:32 AM	H2 valve closed
2/21/2012	12:32:32 AM	BCl3 valve closed
2/21/2012	12:32:32 AM	PH3 valve closed
2/21/2012	12:32:32 AM	SiCl4 pre valve closed
2/21/2012	12:32:32 AM	SiCl4 post valve closed
2/21/2012	12:32:32 AM	Bypass valve closed
2/21/2012	12:32:32 AM	Bubbler valve closed
2/21/2012	12:32:32 AM	Main Vac valve opened
2/21/2012	12:32:32 AM	Helium MFC set to  0.000000
2/21/2012	12:32:32 AM	H2 MFC set to  0.000000
2/21/2012	12:32:32 AM	BCl3 MFC set to  0.000000
2/21/2012	12:32:32 AM	PH3 MFC set to  0.000000
2/21/2012	12:32:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:32:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:32:33 AM	Tube furnace set to 0
2/21/2012	12:33:03 AM	H2 valve closed
2/21/2012	12:33:03 AM	BCl3 valve closed
2/21/2012	12:33:03 AM	PH3 valve closed
2/21/2012	12:33:03 AM	SiCl4 pre valve closed
2/21/2012	12:33:03 AM	SiCl4 post valve closed
2/21/2012	12:33:03 AM	Bypass valve closed
2/21/2012	12:33:03 AM	Bubbler valve closed
2/21/2012	12:33:03 AM	Helium valve opened
2/21/2012	12:33:03 AM	Main Vac valve opened
2/21/2012	12:33:03 AM	Helium MFC set to  20.000000
2/21/2012	12:33:03 AM	H2 MFC set to  0.000000
2/21/2012	12:33:03 AM	BCl3 MFC set to  0.000000
2/21/2012	12:33:03 AM	PH3 MFC set to  0.000000
2/21/2012	12:33:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:33:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:33:03 AM	Tube furnace set to 0
2/21/2012	12:33:33 AM	Helium valve closed
2/21/2012	12:33:33 AM	H2 valve closed
2/21/2012	12:33:33 AM	BCl3 valve closed
2/21/2012	12:33:33 AM	PH3 valve closed
2/21/2012	12:33:33 AM	SiCl4 pre valve closed
2/21/2012	12:33:33 AM	SiCl4 post valve closed
2/21/2012	12:33:33 AM	Bypass valve closed
2/21/2012	12:33:33 AM	Bubbler valve closed
2/21/2012	12:33:33 AM	Main Vac valve opened
2/21/2012	12:33:33 AM	Helium MFC set to  0.000000
2/21/2012	12:33:33 AM	H2 MFC set to  0.000000
2/21/2012	12:33:33 AM	BCl3 MFC set to  0.000000
2/21/2012	12:33:33 AM	PH3 MFC set to  0.000000
2/21/2012	12:33:33 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:33:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:33:33 AM	Tube furnace set to 0
2/21/2012	12:34:03 AM	H2 valve closed
2/21/2012	12:34:03 AM	BCl3 valve closed
2/21/2012	12:34:03 AM	PH3 valve closed
2/21/2012	12:34:03 AM	SiCl4 pre valve closed
2/21/2012	12:34:03 AM	SiCl4 post valve closed
2/21/2012	12:34:03 AM	Bypass valve closed
2/21/2012	12:34:03 AM	Bubbler valve closed
2/21/2012	12:34:03 AM	Helium valve opened
2/21/2012	12:34:03 AM	Main Vac valve opened
2/21/2012	12:34:03 AM	Helium MFC set to  20.000000
2/21/2012	12:34:03 AM	H2 MFC set to  0.000000
2/21/2012	12:34:03 AM	BCl3 MFC set to  0.000000
2/21/2012	12:34:03 AM	PH3 MFC set to  0.000000
2/21/2012	12:34:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:34:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:34:03 AM	Tube furnace set to 0
2/21/2012	12:34:33 AM	Helium valve closed
2/21/2012	12:34:33 AM	H2 valve closed
2/21/2012	12:34:33 AM	BCl3 valve closed
2/21/2012	12:34:33 AM	PH3 valve closed
2/21/2012	12:34:33 AM	SiCl4 pre valve closed
2/21/2012	12:34:33 AM	SiCl4 post valve closed
2/21/2012	12:34:33 AM	Bypass valve closed
2/21/2012	12:34:33 AM	Bubbler valve closed
2/21/2012	12:34:33 AM	Main Vac valve opened
2/21/2012	12:34:33 AM	Helium MFC set to  0.000000
2/21/2012	12:34:33 AM	H2 MFC set to  0.000000
2/21/2012	12:34:33 AM	BCl3 MFC set to  0.000000
2/21/2012	12:34:33 AM	PH3 MFC set to  0.000000
2/21/2012	12:34:33 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:34:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:34:33 AM	Tube furnace set to 0
2/21/2012	12:35:03 AM	H2 valve closed
2/21/2012	12:35:03 AM	BCl3 valve closed
2/21/2012	12:35:03 AM	PH3 valve closed
2/21/2012	12:35:03 AM	SiCl4 pre valve closed
2/21/2012	12:35:03 AM	SiCl4 post valve closed
2/21/2012	12:35:03 AM	Bypass valve closed
2/21/2012	12:35:03 AM	Bubbler valve closed
2/21/2012	12:35:03 AM	Helium valve opened
2/21/2012	12:35:03 AM	Main Vac valve opened
2/21/2012	12:35:03 AM	Helium MFC set to  20.000000
2/21/2012	12:35:03 AM	H2 MFC set to  0.000000
2/21/2012	12:35:03 AM	BCl3 MFC set to  0.000000
2/21/2012	12:35:03 AM	PH3 MFC set to  0.000000
2/21/2012	12:35:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:35:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:35:04 AM	Tube furnace set to 0
2/21/2012	12:35:34 AM	Helium valve closed
2/21/2012	12:35:34 AM	H2 valve closed
2/21/2012	12:35:34 AM	BCl3 valve closed
2/21/2012	12:35:34 AM	PH3 valve closed
2/21/2012	12:35:34 AM	SiCl4 pre valve closed
2/21/2012	12:35:34 AM	SiCl4 post valve closed
2/21/2012	12:35:34 AM	Bypass valve closed
2/21/2012	12:35:34 AM	Bubbler valve closed
2/21/2012	12:35:34 AM	Main Vac valve opened
2/21/2012	12:35:34 AM	Helium MFC set to  0.000000
2/21/2012	12:35:34 AM	H2 MFC set to  0.000000
2/21/2012	12:35:34 AM	BCl3 MFC set to  0.000000
2/21/2012	12:35:34 AM	PH3 MFC set to  0.000000
2/21/2012	12:35:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:35:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:35:34 AM	Tube furnace set to 200
2/21/2012	12:36:04 AM	H2 valve closed
2/21/2012	12:36:04 AM	BCl3 valve closed
2/21/2012	12:36:04 AM	PH3 valve closed
2/21/2012	12:36:04 AM	SiCl4 pre valve closed
2/21/2012	12:36:04 AM	SiCl4 post valve closed
2/21/2012	12:36:04 AM	Bypass valve closed
2/21/2012	12:36:04 AM	Bubbler valve closed
2/21/2012	12:36:04 AM	Helium valve opened
2/21/2012	12:36:04 AM	Main Vac valve opened
2/21/2012	12:36:04 AM	Helium MFC set to  20.000000
2/21/2012	12:36:04 AM	H2 MFC set to  0.000000
2/21/2012	12:36:04 AM	BCl3 MFC set to  0.000000
2/21/2012	12:36:04 AM	PH3 MFC set to  0.000000
2/21/2012	12:36:04 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:36:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:36:04 AM	Tube furnace set to 200
2/21/2012	12:36:34 AM	Helium valve closed
2/21/2012	12:36:34 AM	H2 valve closed
2/21/2012	12:36:34 AM	BCl3 valve closed
2/21/2012	12:36:34 AM	PH3 valve closed
2/21/2012	12:36:34 AM	SiCl4 pre valve closed
2/21/2012	12:36:34 AM	SiCl4 post valve closed
2/21/2012	12:36:34 AM	Bypass valve closed
2/21/2012	12:36:34 AM	Bubbler valve closed
2/21/2012	12:36:34 AM	Main Vac valve opened
2/21/2012	12:36:34 AM	Helium MFC set to  0.000000
2/21/2012	12:36:34 AM	H2 MFC set to  0.000000
2/21/2012	12:36:34 AM	BCl3 MFC set to  0.000000
2/21/2012	12:36:34 AM	PH3 MFC set to  0.000000
2/21/2012	12:36:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:36:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:36:34 AM	Tube furnace set to 200
2/21/2012	12:37:04 AM	H2 valve closed
2/21/2012	12:37:04 AM	BCl3 valve closed
2/21/2012	12:37:04 AM	PH3 valve closed
2/21/2012	12:37:04 AM	SiCl4 pre valve closed
2/21/2012	12:37:04 AM	SiCl4 post valve closed
2/21/2012	12:37:04 AM	Bypass valve closed
2/21/2012	12:37:04 AM	Bubbler valve closed
2/21/2012	12:37:04 AM	Helium valve opened
2/21/2012	12:37:04 AM	Main Vac valve opened
2/21/2012	12:37:04 AM	Helium MFC set to  20.000000
2/21/2012	12:37:04 AM	H2 MFC set to  0.000000
2/21/2012	12:37:04 AM	BCl3 MFC set to  0.000000
2/21/2012	12:37:04 AM	PH3 MFC set to  0.000000
2/21/2012	12:37:04 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:37:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:37:04 AM	Tube furnace set to 200
2/21/2012	12:37:34 AM	Helium valve closed
2/21/2012	12:37:34 AM	H2 valve closed
2/21/2012	12:37:34 AM	BCl3 valve closed
2/21/2012	12:37:34 AM	PH3 valve closed
2/21/2012	12:37:34 AM	SiCl4 pre valve closed
2/21/2012	12:37:34 AM	SiCl4 post valve closed
2/21/2012	12:37:34 AM	Bypass valve closed
2/21/2012	12:37:34 AM	Bubbler valve closed
2/21/2012	12:37:34 AM	Main Vac valve opened
2/21/2012	12:37:34 AM	Helium MFC set to  0.000000
2/21/2012	12:37:34 AM	H2 MFC set to  0.000000
2/21/2012	12:37:34 AM	BCl3 MFC set to  0.000000
2/21/2012	12:37:34 AM	PH3 MFC set to  0.000000
2/21/2012	12:37:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:37:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:37:35 AM	Tube furnace set to 200
2/21/2012	12:38:05 AM	H2 valve closed
2/21/2012	12:38:05 AM	BCl3 valve closed
2/21/2012	12:38:05 AM	PH3 valve closed
2/21/2012	12:38:05 AM	SiCl4 pre valve closed
2/21/2012	12:38:05 AM	SiCl4 post valve closed
2/21/2012	12:38:05 AM	Bypass valve closed
2/21/2012	12:38:05 AM	Bubbler valve closed
2/21/2012	12:38:05 AM	Helium valve opened
2/21/2012	12:38:05 AM	Main Vac valve opened
2/21/2012	12:38:05 AM	Helium MFC set to  20.000000
2/21/2012	12:38:05 AM	H2 MFC set to  0.000000
2/21/2012	12:38:05 AM	BCl3 MFC set to  0.000000
2/21/2012	12:38:05 AM	PH3 MFC set to  0.000000
2/21/2012	12:38:05 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:38:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:38:05 AM	Tube furnace set to 200
2/21/2012	12:38:35 AM	Helium valve closed
2/21/2012	12:38:35 AM	H2 valve closed
2/21/2012	12:38:35 AM	BCl3 valve closed
2/21/2012	12:38:35 AM	PH3 valve closed
2/21/2012	12:38:35 AM	SiCl4 pre valve closed
2/21/2012	12:38:35 AM	SiCl4 post valve closed
2/21/2012	12:38:35 AM	Bypass valve closed
2/21/2012	12:38:35 AM	Bubbler valve closed
2/21/2012	12:38:35 AM	Main Vac valve opened
2/21/2012	12:38:35 AM	Helium MFC set to  0.000000
2/21/2012	12:38:35 AM	H2 MFC set to  0.000000
2/21/2012	12:38:35 AM	BCl3 MFC set to  0.000000
2/21/2012	12:38:35 AM	PH3 MFC set to  0.000000
2/21/2012	12:38:35 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:38:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:38:35 AM	Tube furnace set to 200
2/21/2012	12:39:05 AM	H2 valve closed
2/21/2012	12:39:05 AM	BCl3 valve closed
2/21/2012	12:39:05 AM	PH3 valve closed
2/21/2012	12:39:05 AM	SiCl4 pre valve closed
2/21/2012	12:39:05 AM	SiCl4 post valve closed
2/21/2012	12:39:05 AM	Bypass valve closed
2/21/2012	12:39:05 AM	Bubbler valve closed
2/21/2012	12:39:05 AM	Helium valve opened
2/21/2012	12:39:05 AM	Main Vac valve opened
2/21/2012	12:39:05 AM	Helium MFC set to  20.000000
2/21/2012	12:39:05 AM	H2 MFC set to  0.000000
2/21/2012	12:39:05 AM	BCl3 MFC set to  0.000000
2/21/2012	12:39:05 AM	PH3 MFC set to  0.000000
2/21/2012	12:39:05 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:39:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:39:05 AM	Tube furnace set to 200
2/21/2012	12:39:35 AM	Helium valve closed
2/21/2012	12:39:35 AM	H2 valve closed
2/21/2012	12:39:35 AM	BCl3 valve closed
2/21/2012	12:39:35 AM	PH3 valve closed
2/21/2012	12:39:35 AM	SiCl4 pre valve closed
2/21/2012	12:39:35 AM	SiCl4 post valve closed
2/21/2012	12:39:35 AM	Bypass valve closed
2/21/2012	12:39:35 AM	Bubbler valve closed
2/21/2012	12:39:35 AM	Main Vac valve opened
2/21/2012	12:39:35 AM	Helium MFC set to  0.000000
2/21/2012	12:39:35 AM	H2 MFC set to  0.000000
2/21/2012	12:39:35 AM	BCl3 MFC set to  0.000000
2/21/2012	12:39:35 AM	PH3 MFC set to  0.000000
2/21/2012	12:39:35 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:39:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:39:35 AM	Tube furnace set to 200
2/21/2012	12:40:05 AM	H2 valve closed
2/21/2012	12:40:05 AM	BCl3 valve closed
2/21/2012	12:40:05 AM	PH3 valve closed
2/21/2012	12:40:05 AM	SiCl4 pre valve closed
2/21/2012	12:40:05 AM	SiCl4 post valve closed
2/21/2012	12:40:05 AM	Bypass valve closed
2/21/2012	12:40:05 AM	Bubbler valve closed
2/21/2012	12:40:05 AM	Helium valve opened
2/21/2012	12:40:05 AM	Main Vac valve opened
2/21/2012	12:40:05 AM	Helium MFC set to  20.000000
2/21/2012	12:40:05 AM	H2 MFC set to  0.000000
2/21/2012	12:40:05 AM	BCl3 MFC set to  0.000000
2/21/2012	12:40:05 AM	PH3 MFC set to  0.000000
2/21/2012	12:40:05 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:40:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:40:06 AM	Tube furnace set to 200
2/21/2012	12:40:06 AM	Helium valve closed
2/21/2012	12:40:06 AM	H2 valve closed
2/21/2012	12:40:06 AM	BCl3 valve closed
2/21/2012	12:40:06 AM	PH3 valve closed
2/21/2012	12:40:06 AM	SiCl4 pre valve closed
2/21/2012	12:40:06 AM	SiCl4 post valve closed
2/21/2012	12:40:06 AM	Bypass valve closed
2/21/2012	12:40:06 AM	Bubbler valve closed
2/21/2012	12:40:06 AM	Main Vac valve opened
2/21/2012	12:40:06 AM	Helium MFC set to  0.000000
2/21/2012	12:40:06 AM	H2 MFC set to  0.000000
2/21/2012	12:40:06 AM	BCl3 MFC set to  0.000000
2/21/2012	12:40:06 AM	PH3 MFC set to  0.000000
2/21/2012	12:40:06 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:40:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:40:06 AM	Tube furnace set to 200
2/21/2012	12:40:36 AM	H2 valve closed
2/21/2012	12:40:36 AM	BCl3 valve closed
2/21/2012	12:40:36 AM	PH3 valve closed
2/21/2012	12:40:36 AM	SiCl4 pre valve closed
2/21/2012	12:40:36 AM	SiCl4 post valve closed
2/21/2012	12:40:36 AM	Bypass valve closed
2/21/2012	12:40:36 AM	Bubbler valve closed
2/21/2012	12:40:36 AM	Helium valve opened
2/21/2012	12:40:36 AM	Main Vac valve opened
2/21/2012	12:40:36 AM	Helium MFC set to  20.000000
2/21/2012	12:40:36 AM	H2 MFC set to  0.000000
2/21/2012	12:40:36 AM	BCl3 MFC set to  0.000000
2/21/2012	12:40:36 AM	PH3 MFC set to  0.000000
2/21/2012	12:40:36 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:40:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:40:36 AM	Tube furnace set to 200
2/21/2012	12:41:06 AM	Helium valve closed
2/21/2012	12:41:06 AM	H2 valve closed
2/21/2012	12:41:06 AM	BCl3 valve closed
2/21/2012	12:41:06 AM	PH3 valve closed
2/21/2012	12:41:06 AM	SiCl4 pre valve closed
2/21/2012	12:41:06 AM	SiCl4 post valve closed
2/21/2012	12:41:06 AM	Bypass valve closed
2/21/2012	12:41:06 AM	Bubbler valve closed
2/21/2012	12:41:06 AM	Main Vac valve opened
2/21/2012	12:41:06 AM	Helium MFC set to  0.000000
2/21/2012	12:41:06 AM	H2 MFC set to  0.000000
2/21/2012	12:41:06 AM	BCl3 MFC set to  0.000000
2/21/2012	12:41:06 AM	PH3 MFC set to  0.000000
2/21/2012	12:41:06 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:41:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:41:06 AM	Tube furnace set to 0
2/21/2012	12:41:07 AM	Run finished at 12:41 AM
2/21/2012	12:43:19 AM	Recipe started at 12:43 AM
2/21/2012	12:43:19 AM	Helium valve closed
2/21/2012	12:43:19 AM	H2 valve closed
2/21/2012	12:43:19 AM	BCl3 valve closed
2/21/2012	12:43:19 AM	PH3 valve closed
2/21/2012	12:43:19 AM	SiCl4 pre valve closed
2/21/2012	12:43:19 AM	SiCl4 post valve closed
2/21/2012	12:43:19 AM	Bypass valve closed
2/21/2012	12:43:19 AM	Bubbler valve closed
2/21/2012	12:43:19 AM	Main Vac valve opened
2/21/2012	12:43:19 AM	Helium MFC set to  0.000000
2/21/2012	12:43:19 AM	H2 MFC set to  0.000000
2/21/2012	12:43:19 AM	BCl3 MFC set to  0.000000
2/21/2012	12:43:19 AM	PH3 MFC set to  0.000000
2/21/2012	12:43:19 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:43:19 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:43:19 AM	Tube furnace set to 0
2/21/2012	12:43:49 AM	H2 valve closed
2/21/2012	12:43:49 AM	BCl3 valve closed
2/21/2012	12:43:49 AM	PH3 valve closed
2/21/2012	12:43:49 AM	SiCl4 pre valve closed
2/21/2012	12:43:49 AM	SiCl4 post valve closed
2/21/2012	12:43:49 AM	Bypass valve closed
2/21/2012	12:43:49 AM	Bubbler valve closed
2/21/2012	12:43:49 AM	Helium valve opened
2/21/2012	12:43:49 AM	Main Vac valve opened
2/21/2012	12:43:49 AM	Helium MFC set to  20.000000
2/21/2012	12:43:49 AM	H2 MFC set to  0.000000
2/21/2012	12:43:49 AM	BCl3 MFC set to  0.000000
2/21/2012	12:43:49 AM	PH3 MFC set to  0.000000
2/21/2012	12:43:49 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:43:49 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:43:50 AM	Tube furnace set to 0
2/21/2012	12:44:20 AM	Helium valve closed
2/21/2012	12:44:20 AM	H2 valve closed
2/21/2012	12:44:20 AM	BCl3 valve closed
2/21/2012	12:44:20 AM	PH3 valve closed
2/21/2012	12:44:20 AM	SiCl4 pre valve closed
2/21/2012	12:44:20 AM	SiCl4 post valve closed
2/21/2012	12:44:20 AM	Bypass valve closed
2/21/2012	12:44:20 AM	Bubbler valve closed
2/21/2012	12:44:20 AM	Main Vac valve opened
2/21/2012	12:44:20 AM	Helium MFC set to  0.000000
2/21/2012	12:44:20 AM	H2 MFC set to  0.000000
2/21/2012	12:44:20 AM	BCl3 MFC set to  0.000000
2/21/2012	12:44:20 AM	PH3 MFC set to  0.000000
2/21/2012	12:44:20 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:44:20 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:44:20 AM	Tube furnace set to 0
2/21/2012	12:44:50 AM	H2 valve closed
2/21/2012	12:44:50 AM	BCl3 valve closed
2/21/2012	12:44:50 AM	PH3 valve closed
2/21/2012	12:44:50 AM	SiCl4 pre valve closed
2/21/2012	12:44:50 AM	SiCl4 post valve closed
2/21/2012	12:44:50 AM	Bypass valve closed
2/21/2012	12:44:50 AM	Bubbler valve closed
2/21/2012	12:44:50 AM	Helium valve opened
2/21/2012	12:44:50 AM	Main Vac valve opened
2/21/2012	12:44:50 AM	Helium MFC set to  20.000000
2/21/2012	12:44:50 AM	H2 MFC set to  0.000000
2/21/2012	12:44:50 AM	BCl3 MFC set to  0.000000
2/21/2012	12:44:50 AM	PH3 MFC set to  0.000000
2/21/2012	12:44:50 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:44:50 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:44:50 AM	Tube furnace set to 0
2/21/2012	12:45:20 AM	Helium valve closed
2/21/2012	12:45:20 AM	H2 valve closed
2/21/2012	12:45:20 AM	BCl3 valve closed
2/21/2012	12:45:20 AM	PH3 valve closed
2/21/2012	12:45:20 AM	SiCl4 pre valve closed
2/21/2012	12:45:20 AM	SiCl4 post valve closed
2/21/2012	12:45:20 AM	Bypass valve closed
2/21/2012	12:45:20 AM	Bubbler valve closed
2/21/2012	12:45:20 AM	Main Vac valve opened
2/21/2012	12:45:20 AM	Helium MFC set to  0.000000
2/21/2012	12:45:20 AM	H2 MFC set to  0.000000
2/21/2012	12:45:20 AM	BCl3 MFC set to  0.000000
2/21/2012	12:45:20 AM	PH3 MFC set to  0.000000
2/21/2012	12:45:20 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:45:20 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:45:20 AM	Tube furnace set to 200
2/21/2012	12:45:50 AM	H2 valve closed
2/21/2012	12:45:50 AM	BCl3 valve closed
2/21/2012	12:45:50 AM	PH3 valve closed
2/21/2012	12:45:50 AM	SiCl4 pre valve closed
2/21/2012	12:45:50 AM	SiCl4 post valve closed
2/21/2012	12:45:50 AM	Bypass valve closed
2/21/2012	12:45:50 AM	Bubbler valve closed
2/21/2012	12:45:50 AM	Helium valve opened
2/21/2012	12:45:50 AM	Main Vac valve opened
2/21/2012	12:45:50 AM	Helium MFC set to  20.000000
2/21/2012	12:45:50 AM	H2 MFC set to  0.000000
2/21/2012	12:45:50 AM	BCl3 MFC set to  0.000000
2/21/2012	12:45:50 AM	PH3 MFC set to  0.000000
2/21/2012	12:45:50 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:45:50 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:45:50 AM	Tube furnace set to 200
2/21/2012	12:46:20 AM	Helium valve closed
2/21/2012	12:46:20 AM	H2 valve closed
2/21/2012	12:46:20 AM	BCl3 valve closed
2/21/2012	12:46:20 AM	PH3 valve closed
2/21/2012	12:46:20 AM	SiCl4 pre valve closed
2/21/2012	12:46:20 AM	SiCl4 post valve closed
2/21/2012	12:46:20 AM	Bypass valve closed
2/21/2012	12:46:20 AM	Bubbler valve closed
2/21/2012	12:46:20 AM	Main Vac valve opened
2/21/2012	12:46:20 AM	Helium MFC set to  0.000000
2/21/2012	12:46:20 AM	H2 MFC set to  0.000000
2/21/2012	12:46:20 AM	BCl3 MFC set to  0.000000
2/21/2012	12:46:20 AM	PH3 MFC set to  0.000000
2/21/2012	12:46:20 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:46:20 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:46:21 AM	Tube furnace set to 200
2/21/2012	12:46:51 AM	H2 valve closed
2/21/2012	12:46:51 AM	BCl3 valve closed
2/21/2012	12:46:51 AM	PH3 valve closed
2/21/2012	12:46:51 AM	SiCl4 pre valve closed
2/21/2012	12:46:51 AM	SiCl4 post valve closed
2/21/2012	12:46:51 AM	Bypass valve closed
2/21/2012	12:46:51 AM	Bubbler valve closed
2/21/2012	12:46:51 AM	Helium valve opened
2/21/2012	12:46:51 AM	Main Vac valve opened
2/21/2012	12:46:51 AM	Helium MFC set to  20.000000
2/21/2012	12:46:51 AM	H2 MFC set to  0.000000
2/21/2012	12:46:51 AM	BCl3 MFC set to  0.000000
2/21/2012	12:46:51 AM	PH3 MFC set to  0.000000
2/21/2012	12:46:51 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:46:51 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:46:51 AM	Tube furnace set to 200
2/21/2012	12:47:21 AM	Helium valve closed
2/21/2012	12:47:21 AM	H2 valve closed
2/21/2012	12:47:21 AM	BCl3 valve closed
2/21/2012	12:47:21 AM	PH3 valve closed
2/21/2012	12:47:21 AM	SiCl4 pre valve closed
2/21/2012	12:47:21 AM	SiCl4 post valve closed
2/21/2012	12:47:21 AM	Bypass valve closed
2/21/2012	12:47:21 AM	Bubbler valve closed
2/21/2012	12:47:21 AM	Main Vac valve opened
2/21/2012	12:47:21 AM	Helium MFC set to  0.000000
2/21/2012	12:47:21 AM	H2 MFC set to  0.000000
2/21/2012	12:47:21 AM	BCl3 MFC set to  0.000000
2/21/2012	12:47:21 AM	PH3 MFC set to  0.000000
2/21/2012	12:47:21 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:47:21 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:47:21 AM	Tube furnace set to 200
2/21/2012	12:47:51 AM	H2 valve closed
2/21/2012	12:47:51 AM	BCl3 valve closed
2/21/2012	12:47:51 AM	PH3 valve closed
2/21/2012	12:47:51 AM	SiCl4 pre valve closed
2/21/2012	12:47:51 AM	SiCl4 post valve closed
2/21/2012	12:47:51 AM	Bypass valve closed
2/21/2012	12:47:51 AM	Bubbler valve closed
2/21/2012	12:47:51 AM	Helium valve opened
2/21/2012	12:47:51 AM	Main Vac valve opened
2/21/2012	12:47:51 AM	Helium MFC set to  20.000000
2/21/2012	12:47:51 AM	H2 MFC set to  0.000000
2/21/2012	12:47:51 AM	BCl3 MFC set to  0.000000
2/21/2012	12:47:51 AM	PH3 MFC set to  0.000000
2/21/2012	12:47:51 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:47:51 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:47:51 AM	Tube furnace set to 200
2/21/2012	12:48:21 AM	Helium valve closed
2/21/2012	12:48:21 AM	H2 valve closed
2/21/2012	12:48:21 AM	BCl3 valve closed
2/21/2012	12:48:21 AM	PH3 valve closed
2/21/2012	12:48:21 AM	SiCl4 pre valve closed
2/21/2012	12:48:21 AM	SiCl4 post valve closed
2/21/2012	12:48:21 AM	Bypass valve closed
2/21/2012	12:48:21 AM	Bubbler valve closed
2/21/2012	12:48:21 AM	Main Vac valve opened
2/21/2012	12:48:21 AM	Helium MFC set to  0.000000
2/21/2012	12:48:21 AM	H2 MFC set to  0.000000
2/21/2012	12:48:21 AM	BCl3 MFC set to  0.000000
2/21/2012	12:48:21 AM	PH3 MFC set to  0.000000
2/21/2012	12:48:21 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:48:21 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:48:21 AM	Tube furnace set to 200
2/21/2012	12:48:51 AM	H2 valve closed
2/21/2012	12:48:51 AM	BCl3 valve closed
2/21/2012	12:48:51 AM	PH3 valve closed
2/21/2012	12:48:51 AM	SiCl4 pre valve closed
2/21/2012	12:48:51 AM	SiCl4 post valve closed
2/21/2012	12:48:51 AM	Bypass valve closed
2/21/2012	12:48:51 AM	Bubbler valve closed
2/21/2012	12:48:51 AM	Helium valve opened
2/21/2012	12:48:51 AM	Main Vac valve opened
2/21/2012	12:48:51 AM	Helium MFC set to  20.000000
2/21/2012	12:48:51 AM	H2 MFC set to  0.000000
2/21/2012	12:48:51 AM	BCl3 MFC set to  0.000000
2/21/2012	12:48:51 AM	PH3 MFC set to  0.000000
2/21/2012	12:48:51 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:48:51 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:48:52 AM	Tube furnace set to 200
2/21/2012	12:49:22 AM	Helium valve closed
2/21/2012	12:49:22 AM	H2 valve closed
2/21/2012	12:49:22 AM	BCl3 valve closed
2/21/2012	12:49:22 AM	PH3 valve closed
2/21/2012	12:49:22 AM	SiCl4 pre valve closed
2/21/2012	12:49:22 AM	SiCl4 post valve closed
2/21/2012	12:49:22 AM	Bypass valve closed
2/21/2012	12:49:22 AM	Bubbler valve closed
2/21/2012	12:49:22 AM	Main Vac valve opened
2/21/2012	12:49:22 AM	Helium MFC set to  0.000000
2/21/2012	12:49:22 AM	H2 MFC set to  0.000000
2/21/2012	12:49:22 AM	BCl3 MFC set to  0.000000
2/21/2012	12:49:22 AM	PH3 MFC set to  0.000000
2/21/2012	12:49:22 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:49:22 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:49:22 AM	Tube furnace set to 200
2/21/2012	12:49:52 AM	H2 valve closed
2/21/2012	12:49:52 AM	BCl3 valve closed
2/21/2012	12:49:52 AM	PH3 valve closed
2/21/2012	12:49:52 AM	SiCl4 pre valve closed
2/21/2012	12:49:52 AM	SiCl4 post valve closed
2/21/2012	12:49:52 AM	Bypass valve closed
2/21/2012	12:49:52 AM	Bubbler valve closed
2/21/2012	12:49:52 AM	Helium valve opened
2/21/2012	12:49:52 AM	Main Vac valve opened
2/21/2012	12:49:52 AM	Helium MFC set to  20.000000
2/21/2012	12:49:52 AM	H2 MFC set to  0.000000
2/21/2012	12:49:52 AM	BCl3 MFC set to  0.000000
2/21/2012	12:49:52 AM	PH3 MFC set to  0.000000
2/21/2012	12:49:52 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:49:52 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:49:52 AM	Tube furnace set to 200
2/21/2012	12:50:22 AM	Helium valve closed
2/21/2012	12:50:22 AM	H2 valve closed
2/21/2012	12:50:22 AM	BCl3 valve closed
2/21/2012	12:50:22 AM	PH3 valve closed
2/21/2012	12:50:22 AM	SiCl4 pre valve closed
2/21/2012	12:50:22 AM	SiCl4 post valve closed
2/21/2012	12:50:22 AM	Bypass valve closed
2/21/2012	12:50:22 AM	Bubbler valve closed
2/21/2012	12:50:22 AM	Main Vac valve opened
2/21/2012	12:50:22 AM	Helium MFC set to  0.000000
2/21/2012	12:50:22 AM	H2 MFC set to  0.000000
2/21/2012	12:50:22 AM	BCl3 MFC set to  0.000000
2/21/2012	12:50:22 AM	PH3 MFC set to  0.000000
2/21/2012	12:50:22 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:50:22 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:50:22 AM	Tube furnace set to 200
2/21/2012	12:50:52 AM	H2 valve closed
2/21/2012	12:50:52 AM	BCl3 valve closed
2/21/2012	12:50:52 AM	PH3 valve closed
2/21/2012	12:50:52 AM	SiCl4 pre valve closed
2/21/2012	12:50:52 AM	SiCl4 post valve closed
2/21/2012	12:50:52 AM	Bypass valve closed
2/21/2012	12:50:52 AM	Bubbler valve closed
2/21/2012	12:50:52 AM	Helium valve opened
2/21/2012	12:50:52 AM	Main Vac valve opened
2/21/2012	12:50:52 AM	Helium MFC set to  20.000000
2/21/2012	12:50:52 AM	H2 MFC set to  0.000000
2/21/2012	12:50:52 AM	BCl3 MFC set to  0.000000
2/21/2012	12:50:52 AM	PH3 MFC set to  0.000000
2/21/2012	12:50:52 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:50:52 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:50:53 AM	Tube furnace set to 200
2/21/2012	12:51:23 AM	Helium valve closed
2/21/2012	12:51:23 AM	H2 valve closed
2/21/2012	12:51:23 AM	BCl3 valve closed
2/21/2012	12:51:23 AM	PH3 valve closed
2/21/2012	12:51:23 AM	SiCl4 pre valve closed
2/21/2012	12:51:23 AM	SiCl4 post valve closed
2/21/2012	12:51:23 AM	Bypass valve closed
2/21/2012	12:51:23 AM	Bubbler valve closed
2/21/2012	12:51:23 AM	Main Vac valve opened
2/21/2012	12:51:23 AM	Helium MFC set to  0.000000
2/21/2012	12:51:23 AM	H2 MFC set to  0.000000
2/21/2012	12:51:23 AM	BCl3 MFC set to  0.000000
2/21/2012	12:51:23 AM	PH3 MFC set to  0.000000
2/21/2012	12:51:23 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:51:23 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:51:23 AM	Tube furnace set to 0
2/21/2012	12:51:24 AM	Run finished at 12:51 AM
2/21/2012	12:53:51 AM	Main Vac valve closed
2/21/2012	12:54:06 AM	Main Vac valve opened
2/21/2012	12:58:29 AM	Recipe started at 12:58 AM
2/21/2012	12:58:29 AM	Helium valve closed
2/21/2012	12:58:29 AM	H2 valve closed
2/21/2012	12:58:29 AM	BCl3 valve closed
2/21/2012	12:58:29 AM	PH3 valve closed
2/21/2012	12:58:29 AM	SiCl4 pre valve closed
2/21/2012	12:58:29 AM	SiCl4 post valve closed
2/21/2012	12:58:29 AM	Main Vac valve closed
2/21/2012	12:58:29 AM	Bypass valve closed
2/21/2012	12:58:29 AM	Bubbler valve closed
2/21/2012	12:58:29 AM	Helium MFC set to  0.000000
2/21/2012	12:58:29 AM	H2 MFC set to  0.000000
2/21/2012	12:58:29 AM	BCl3 MFC set to  0.000000
2/21/2012	12:58:29 AM	PH3 MFC set to  0.000000
2/21/2012	12:58:29 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:58:29 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:58:29 AM	Tube furnace set to 0
2/21/2012	12:58:32 AM	Helium valve closed
2/21/2012	12:58:32 AM	BCl3 valve closed
2/21/2012	12:58:32 AM	PH3 valve closed
2/21/2012	12:58:32 AM	SiCl4 pre valve closed
2/21/2012	12:58:32 AM	SiCl4 post valve closed
2/21/2012	12:58:32 AM	Main Vac valve closed
2/21/2012	12:58:32 AM	Bypass valve closed
2/21/2012	12:58:32 AM	Bubbler valve closed
2/21/2012	12:58:32 AM	H2 valve opened
2/21/2012	12:58:32 AM	Helium MFC set to  0.000000
2/21/2012	12:58:32 AM	H2 MFC set to  500.000000
2/21/2012	12:58:32 AM	BCl3 MFC set to  0.000000
2/21/2012	12:58:32 AM	PH3 MFC set to  0.000000
2/21/2012	12:58:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:58:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:58:33 AM	Tube furnace set to 0
2/21/2012	12:59:36 AM	Helium valve closed
2/21/2012	12:59:36 AM	BCl3 valve closed
2/21/2012	12:59:36 AM	PH3 valve closed
2/21/2012	12:59:36 AM	SiCl4 pre valve closed
2/21/2012	12:59:36 AM	SiCl4 post valve closed
2/21/2012	12:59:36 AM	Main Vac valve closed
2/21/2012	12:59:36 AM	Bypass valve closed
2/21/2012	12:59:36 AM	H2 valve opened
2/21/2012	12:59:36 AM	Bubbler valve opened
2/21/2012	12:59:36 AM	Helium MFC set to  0.000000
2/21/2012	12:59:36 AM	H2 MFC set to  500.000000
2/21/2012	12:59:36 AM	BCl3 MFC set to  0.000000
2/21/2012	12:59:36 AM	PH3 MFC set to  0.000000
2/21/2012	12:59:36 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:59:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:59:36 AM	Tube furnace set to 0
2/21/2012	12:59:37 AM	Helium valve closed
2/21/2012	12:59:37 AM	BCl3 valve closed
2/21/2012	12:59:37 AM	PH3 valve closed
2/21/2012	12:59:37 AM	SiCl4 pre valve closed
2/21/2012	12:59:37 AM	SiCl4 post valve closed
2/21/2012	12:59:37 AM	Main Vac valve closed
2/21/2012	12:59:37 AM	Bypass valve closed
2/21/2012	12:59:37 AM	H2 valve opened
2/21/2012	12:59:37 AM	Bubbler valve opened
2/21/2012	12:59:37 AM	Helium MFC set to  0.000000
2/21/2012	12:59:37 AM	H2 MFC set to  500.000000
2/21/2012	12:59:37 AM	BCl3 MFC set to  0.000000
2/21/2012	12:59:37 AM	PH3 MFC set to  0.000000
2/21/2012	12:59:37 AM	SiCl4 MFC set to  0.000000
2/21/2012	12:59:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:59:38 AM	Tube furnace set to 1100
2/21/2012	1:24:38 AM	H2 valve closed
2/21/2012	1:24:38 AM	BCl3 valve closed
2/21/2012	1:24:38 AM	PH3 valve closed
2/21/2012	1:24:38 AM	SiCl4 pre valve closed
2/21/2012	1:24:38 AM	SiCl4 post valve closed
2/21/2012	1:24:38 AM	Main Vac valve closed
2/21/2012	1:24:38 AM	Bypass valve closed
2/21/2012	1:24:38 AM	Helium valve opened
2/21/2012	1:24:38 AM	Bubbler valve opened
2/21/2012	1:24:38 AM	Helium MFC set to  500.000000
2/21/2012	1:24:38 AM	H2 MFC set to  0.000000
2/21/2012	1:24:38 AM	BCl3 MFC set to  0.000000
2/21/2012	1:24:38 AM	PH3 MFC set to  0.000000
2/21/2012	1:24:38 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:24:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:24:38 AM	Tube furnace set to 1100
2/21/2012	1:25:08 AM	H2 valve closed
2/21/2012	1:25:08 AM	BCl3 valve closed
2/21/2012	1:25:08 AM	PH3 valve closed
2/21/2012	1:25:08 AM	SiCl4 pre valve closed
2/21/2012	1:25:08 AM	SiCl4 post valve closed
2/21/2012	1:25:08 AM	Main Vac valve closed
2/21/2012	1:25:08 AM	Bypass valve closed
2/21/2012	1:25:08 AM	Helium valve opened
2/21/2012	1:25:08 AM	Bubbler valve opened
2/21/2012	1:25:08 AM	Helium MFC set to  400.000000
2/21/2012	1:25:08 AM	H2 MFC set to  0.000000
2/21/2012	1:25:08 AM	BCl3 MFC set to  0.000000
2/21/2012	1:25:08 AM	PH3 MFC set to  0.000000
2/21/2012	1:25:08 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:25:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:25:08 AM	Tube furnace set to 1100
2/21/2012	1:25:38 AM	H2 valve closed
2/21/2012	1:25:38 AM	BCl3 valve closed
2/21/2012	1:25:38 AM	PH3 valve closed
2/21/2012	1:25:38 AM	SiCl4 pre valve closed
2/21/2012	1:25:38 AM	SiCl4 post valve closed
2/21/2012	1:25:38 AM	Main Vac valve closed
2/21/2012	1:25:38 AM	Bypass valve closed
2/21/2012	1:25:38 AM	Helium valve opened
2/21/2012	1:25:38 AM	Bubbler valve opened
2/21/2012	1:25:38 AM	Helium MFC set to  300.000000
2/21/2012	1:25:38 AM	H2 MFC set to  0.000000
2/21/2012	1:25:38 AM	BCl3 MFC set to  0.000000
2/21/2012	1:25:38 AM	PH3 MFC set to  0.000000
2/21/2012	1:25:38 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:25:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:25:38 AM	Tube furnace set to 1100
2/21/2012	1:26:08 AM	H2 valve closed
2/21/2012	1:26:08 AM	BCl3 valve closed
2/21/2012	1:26:08 AM	PH3 valve closed
2/21/2012	1:26:08 AM	SiCl4 pre valve closed
2/21/2012	1:26:08 AM	SiCl4 post valve closed
2/21/2012	1:26:08 AM	Main Vac valve closed
2/21/2012	1:26:08 AM	Bypass valve closed
2/21/2012	1:26:08 AM	Helium valve opened
2/21/2012	1:26:08 AM	Bubbler valve opened
2/21/2012	1:26:08 AM	Helium MFC set to  200.000000
2/21/2012	1:26:08 AM	H2 MFC set to  0.000000
2/21/2012	1:26:08 AM	BCl3 MFC set to  0.000000
2/21/2012	1:26:08 AM	PH3 MFC set to  0.000000
2/21/2012	1:26:08 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:26:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:26:09 AM	Tube furnace set to 1100
2/21/2012	1:26:39 AM	H2 valve closed
2/21/2012	1:26:39 AM	BCl3 valve closed
2/21/2012	1:26:39 AM	PH3 valve closed
2/21/2012	1:26:39 AM	SiCl4 pre valve closed
2/21/2012	1:26:39 AM	SiCl4 post valve closed
2/21/2012	1:26:39 AM	Main Vac valve closed
2/21/2012	1:26:39 AM	Bypass valve closed
2/21/2012	1:26:39 AM	Helium valve opened
2/21/2012	1:26:39 AM	Bubbler valve opened
2/21/2012	1:26:39 AM	Helium MFC set to  100.000000
2/21/2012	1:26:39 AM	H2 MFC set to  0.000000
2/21/2012	1:26:39 AM	BCl3 MFC set to  0.000000
2/21/2012	1:26:39 AM	PH3 MFC set to  0.000000
2/21/2012	1:26:39 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:26:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:26:39 AM	Tube furnace set to 1100
2/21/2012	1:27:09 AM	H2 valve closed
2/21/2012	1:27:09 AM	BCl3 valve closed
2/21/2012	1:27:09 AM	PH3 valve closed
2/21/2012	1:27:09 AM	SiCl4 pre valve closed
2/21/2012	1:27:09 AM	SiCl4 post valve closed
2/21/2012	1:27:09 AM	Main Vac valve closed
2/21/2012	1:27:09 AM	Bypass valve closed
2/21/2012	1:27:09 AM	Helium valve opened
2/21/2012	1:27:09 AM	Bubbler valve opened
2/21/2012	1:27:09 AM	Helium MFC set to  50.000000
2/21/2012	1:27:09 AM	H2 MFC set to  0.000000
2/21/2012	1:27:09 AM	BCl3 MFC set to  0.000000
2/21/2012	1:27:09 AM	PH3 MFC set to  0.000000
2/21/2012	1:27:09 AM	SiCl4 MFC set to  0.000000
2/21/2012	1:27:09 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:27:09 AM	Tube furnace set to 1100
2/21/2012	9:27:09 AM	H2 valve closed
2/21/2012	9:27:09 AM	BCl3 valve closed
2/21/2012	9:27:09 AM	PH3 valve closed
2/21/2012	9:27:09 AM	SiCl4 pre valve closed
2/21/2012	9:27:09 AM	SiCl4 post valve closed
2/21/2012	9:27:09 AM	Main Vac valve closed
2/21/2012	9:27:09 AM	Bypass valve closed
2/21/2012	9:27:09 AM	Helium valve opened
2/21/2012	9:27:09 AM	Bubbler valve opened
2/21/2012	9:27:09 AM	Helium MFC set to  50.000000
2/21/2012	9:27:09 AM	H2 MFC set to  0.000000
2/21/2012	9:27:09 AM	BCl3 MFC set to  0.000000
2/21/2012	9:27:09 AM	PH3 MFC set to  0.000000
2/21/2012	9:27:09 AM	SiCl4 MFC set to  0.000000
2/21/2012	9:27:09 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	9:27:09 AM	Tube furnace set to 0
2/21/2012	9:47:09 AM	Run finished at 9:47 AM
2/21/2012	10:08:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/21/2012	10:08:58 AM	Recipe started at 10:08 AM
2/21/2012	10:08:58 AM	Helium valve closed
2/21/2012	10:08:58 AM	H2 valve closed
2/21/2012	10:08:58 AM	BCl3 valve closed
2/21/2012	10:08:58 AM	PH3 valve closed
2/21/2012	10:08:58 AM	SiCl4 pre valve closed
2/21/2012	10:08:58 AM	SiCl4 post valve closed
2/21/2012	10:08:58 AM	Main Vac valve closed
2/21/2012	10:08:58 AM	Bypass valve closed
2/21/2012	10:08:58 AM	Bubbler valve closed
2/21/2012	10:08:58 AM	Helium MFC set to  0.000000
2/21/2012	10:08:58 AM	H2 MFC set to  0.000000
2/21/2012	10:08:58 AM	BCl3 MFC set to  0.000000
2/21/2012	10:08:58 AM	PH3 MFC set to  0.000000
2/21/2012	10:08:58 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:08:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:08:58 AM	Tube furnace set to 0
2/21/2012	10:08:58 AM	Run finished at 10:08 AM
2/21/2012	10:08:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/21/2012	10:23:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	10:23:52 AM	Recipe started at 10:23 AM
2/21/2012	10:23:52 AM	Helium valve closed
2/21/2012	10:23:52 AM	H2 valve closed
2/21/2012	10:23:52 AM	BCl3 valve closed
2/21/2012	10:23:52 AM	PH3 valve closed
2/21/2012	10:23:52 AM	SiCl4 pre valve closed
2/21/2012	10:23:52 AM	SiCl4 post valve closed
2/21/2012	10:23:52 AM	Main Vac valve closed
2/21/2012	10:23:52 AM	Bypass valve closed
2/21/2012	10:23:52 AM	Bubbler valve closed
2/21/2012	10:23:52 AM	Helium MFC set to  0.000000
2/21/2012	10:23:52 AM	H2 MFC set to  0.000000
2/21/2012	10:23:52 AM	BCl3 MFC set to  0.000000
2/21/2012	10:23:52 AM	PH3 MFC set to  0.000000
2/21/2012	10:23:52 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:23:52 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:23:52 AM	Tube furnace set to 0
2/21/2012	10:23:55 AM	H2 valve closed
2/21/2012	10:23:55 AM	BCl3 valve closed
2/21/2012	10:23:55 AM	PH3 valve closed
2/21/2012	10:23:55 AM	SiCl4 pre valve closed
2/21/2012	10:23:55 AM	SiCl4 post valve closed
2/21/2012	10:23:55 AM	Main Vac valve closed
2/21/2012	10:23:55 AM	Bypass valve closed
2/21/2012	10:23:55 AM	Bubbler valve closed
2/21/2012	10:23:55 AM	Helium valve opened
2/21/2012	10:23:55 AM	Helium MFC set to  500.000000
2/21/2012	10:23:55 AM	H2 MFC set to  0.000000
2/21/2012	10:23:55 AM	BCl3 MFC set to  0.000000
2/21/2012	10:23:55 AM	PH3 MFC set to  0.000000
2/21/2012	10:23:55 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:23:55 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:23:56 AM	Tube furnace set to 0
2/21/2012	10:24:00 AM	Helium valve closed
2/21/2012	10:24:00 AM	H2 valve closed
2/21/2012	10:24:00 AM	BCl3 valve closed
2/21/2012	10:24:00 AM	PH3 valve closed
2/21/2012	10:24:00 AM	SiCl4 pre valve closed
2/21/2012	10:24:00 AM	SiCl4 post valve closed
2/21/2012	10:24:00 AM	Main Vac valve closed
2/21/2012	10:24:00 AM	Bypass valve closed
2/21/2012	10:24:00 AM	Bubbler valve closed
2/21/2012	10:24:00 AM	Helium MFC set to  0.000000
2/21/2012	10:24:00 AM	H2 MFC set to  0.000000
2/21/2012	10:24:00 AM	BCl3 MFC set to  0.000000
2/21/2012	10:24:00 AM	PH3 MFC set to  0.000000
2/21/2012	10:24:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:24:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:24:00 AM	Tube furnace set to 0
2/21/2012	10:24:01 AM	Run finished at 10:24 AM
2/21/2012	10:24:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	10:33:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	10:33:39 AM	Recipe started at 10:33 AM
2/21/2012	10:33:39 AM	Helium valve closed
2/21/2012	10:33:39 AM	H2 valve closed
2/21/2012	10:33:39 AM	BCl3 valve closed
2/21/2012	10:33:39 AM	PH3 valve closed
2/21/2012	10:33:39 AM	SiCl4 pre valve closed
2/21/2012	10:33:39 AM	SiCl4 post valve closed
2/21/2012	10:33:39 AM	Main Vac valve closed
2/21/2012	10:33:39 AM	Bubbler valve closed
2/21/2012	10:33:39 AM	Bypass valve opened
2/21/2012	10:33:39 AM	Helium MFC set to  0.000000
2/21/2012	10:33:39 AM	H2 MFC set to  0.000000
2/21/2012	10:33:39 AM	BCl3 MFC set to  0.000000
2/21/2012	10:33:39 AM	PH3 MFC set to  0.000000
2/21/2012	10:33:39 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:33:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:33:39 AM	Tube furnace set to 0
2/21/2012	10:34:47 AM	Helium valve closed
2/21/2012	10:34:47 AM	H2 valve closed
2/21/2012	10:34:47 AM	BCl3 valve closed
2/21/2012	10:34:47 AM	PH3 valve closed
2/21/2012	10:34:47 AM	SiCl4 pre valve closed
2/21/2012	10:34:47 AM	SiCl4 post valve closed
2/21/2012	10:34:47 AM	Main Vac valve closed
2/21/2012	10:34:47 AM	Bubbler valve closed
2/21/2012	10:34:47 AM	Bypass valve opened
2/21/2012	10:34:47 AM	Helium MFC set to  0.000000
2/21/2012	10:34:47 AM	H2 MFC set to  0.000000
2/21/2012	10:34:47 AM	BCl3 MFC set to  0.000000
2/21/2012	10:34:47 AM	PH3 MFC set to  0.000000
2/21/2012	10:34:47 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:34:47 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:34:47 AM	Tube furnace set to 0
2/21/2012	10:35:47 AM	Helium valve closed
2/21/2012	10:35:47 AM	H2 valve closed
2/21/2012	10:35:47 AM	BCl3 valve closed
2/21/2012	10:35:47 AM	PH3 valve closed
2/21/2012	10:35:47 AM	SiCl4 pre valve closed
2/21/2012	10:35:47 AM	SiCl4 post valve closed
2/21/2012	10:35:47 AM	Bypass valve closed
2/21/2012	10:35:47 AM	Bubbler valve closed
2/21/2012	10:35:47 AM	Main Vac valve opened
2/21/2012	10:35:47 AM	Helium MFC set to  0.000000
2/21/2012	10:35:47 AM	H2 MFC set to  0.000000
2/21/2012	10:35:47 AM	BCl3 MFC set to  0.000000
2/21/2012	10:35:47 AM	PH3 MFC set to  0.000000
2/21/2012	10:35:47 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:35:47 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:35:47 AM	Tube furnace set to 0
2/21/2012	10:35:48 AM	Run finished at 10:35 AM
2/21/2012	10:35:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	10:41:29 AM	Recipe started at 10:41 AM
2/21/2012	10:41:29 AM	Helium valve closed
2/21/2012	10:41:29 AM	H2 valve closed
2/21/2012	10:41:29 AM	BCl3 valve closed
2/21/2012	10:41:29 AM	PH3 valve closed
2/21/2012	10:41:29 AM	SiCl4 pre valve closed
2/21/2012	10:41:29 AM	SiCl4 post valve closed
2/21/2012	10:41:29 AM	Bypass valve closed
2/21/2012	10:41:29 AM	Bubbler valve closed
2/21/2012	10:41:29 AM	Main Vac valve opened
2/21/2012	10:41:29 AM	Helium MFC set to  0.000000
2/21/2012	10:41:29 AM	H2 MFC set to  0.000000
2/21/2012	10:41:29 AM	BCl3 MFC set to  0.000000
2/21/2012	10:41:29 AM	PH3 MFC set to  0.000000
2/21/2012	10:41:29 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:41:29 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:41:29 AM	Tube furnace set to 0
2/21/2012	10:41:59 AM	H2 valve closed
2/21/2012	10:41:59 AM	BCl3 valve closed
2/21/2012	10:41:59 AM	PH3 valve closed
2/21/2012	10:41:59 AM	SiCl4 pre valve closed
2/21/2012	10:41:59 AM	SiCl4 post valve closed
2/21/2012	10:41:59 AM	Bypass valve closed
2/21/2012	10:41:59 AM	Bubbler valve closed
2/21/2012	10:41:59 AM	Helium valve opened
2/21/2012	10:41:59 AM	Main Vac valve opened
2/21/2012	10:41:59 AM	Helium MFC set to  20.000000
2/21/2012	10:41:59 AM	H2 MFC set to  0.000000
2/21/2012	10:41:59 AM	BCl3 MFC set to  0.000000
2/21/2012	10:41:59 AM	PH3 MFC set to  0.000000
2/21/2012	10:41:59 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:41:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:42:00 AM	Tube furnace set to 0
2/21/2012	10:42:30 AM	Helium valve closed
2/21/2012	10:42:30 AM	H2 valve closed
2/21/2012	10:42:30 AM	BCl3 valve closed
2/21/2012	10:42:30 AM	PH3 valve closed
2/21/2012	10:42:30 AM	SiCl4 pre valve closed
2/21/2012	10:42:30 AM	SiCl4 post valve closed
2/21/2012	10:42:30 AM	Bypass valve closed
2/21/2012	10:42:30 AM	Bubbler valve closed
2/21/2012	10:42:30 AM	Main Vac valve opened
2/21/2012	10:42:30 AM	Helium MFC set to  0.000000
2/21/2012	10:42:30 AM	H2 MFC set to  0.000000
2/21/2012	10:42:30 AM	BCl3 MFC set to  0.000000
2/21/2012	10:42:30 AM	PH3 MFC set to  0.000000
2/21/2012	10:42:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:42:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:42:30 AM	Tube furnace set to 0
2/21/2012	10:43:00 AM	H2 valve closed
2/21/2012	10:43:00 AM	BCl3 valve closed
2/21/2012	10:43:00 AM	PH3 valve closed
2/21/2012	10:43:00 AM	SiCl4 pre valve closed
2/21/2012	10:43:00 AM	SiCl4 post valve closed
2/21/2012	10:43:00 AM	Bypass valve closed
2/21/2012	10:43:00 AM	Bubbler valve closed
2/21/2012	10:43:00 AM	Helium valve opened
2/21/2012	10:43:00 AM	Main Vac valve opened
2/21/2012	10:43:00 AM	Helium MFC set to  20.000000
2/21/2012	10:43:00 AM	H2 MFC set to  0.000000
2/21/2012	10:43:00 AM	BCl3 MFC set to  0.000000
2/21/2012	10:43:00 AM	PH3 MFC set to  0.000000
2/21/2012	10:43:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:43:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:43:00 AM	Tube furnace set to 0
2/21/2012	10:43:30 AM	Helium valve closed
2/21/2012	10:43:30 AM	H2 valve closed
2/21/2012	10:43:30 AM	BCl3 valve closed
2/21/2012	10:43:30 AM	PH3 valve closed
2/21/2012	10:43:30 AM	SiCl4 pre valve closed
2/21/2012	10:43:30 AM	SiCl4 post valve closed
2/21/2012	10:43:30 AM	Bypass valve closed
2/21/2012	10:43:30 AM	Bubbler valve closed
2/21/2012	10:43:30 AM	Main Vac valve opened
2/21/2012	10:43:30 AM	Helium MFC set to  0.000000
2/21/2012	10:43:30 AM	H2 MFC set to  0.000000
2/21/2012	10:43:30 AM	BCl3 MFC set to  0.000000
2/21/2012	10:43:30 AM	PH3 MFC set to  0.000000
2/21/2012	10:43:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:43:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:43:30 AM	Tube furnace set to 0
2/21/2012	10:44:00 AM	H2 valve closed
2/21/2012	10:44:00 AM	BCl3 valve closed
2/21/2012	10:44:00 AM	PH3 valve closed
2/21/2012	10:44:00 AM	SiCl4 pre valve closed
2/21/2012	10:44:00 AM	SiCl4 post valve closed
2/21/2012	10:44:00 AM	Bypass valve closed
2/21/2012	10:44:00 AM	Bubbler valve closed
2/21/2012	10:44:00 AM	Helium valve opened
2/21/2012	10:44:00 AM	Main Vac valve opened
2/21/2012	10:44:00 AM	Helium MFC set to  20.000000
2/21/2012	10:44:00 AM	H2 MFC set to  0.000000
2/21/2012	10:44:00 AM	BCl3 MFC set to  0.000000
2/21/2012	10:44:00 AM	PH3 MFC set to  0.000000
2/21/2012	10:44:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:44:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:44:00 AM	Tube furnace set to 0
2/21/2012	10:44:30 AM	Helium valve closed
2/21/2012	10:44:30 AM	H2 valve closed
2/21/2012	10:44:30 AM	BCl3 valve closed
2/21/2012	10:44:30 AM	PH3 valve closed
2/21/2012	10:44:30 AM	SiCl4 pre valve closed
2/21/2012	10:44:30 AM	SiCl4 post valve closed
2/21/2012	10:44:30 AM	Bypass valve closed
2/21/2012	10:44:30 AM	Bubbler valve closed
2/21/2012	10:44:30 AM	Main Vac valve opened
2/21/2012	10:44:30 AM	Helium MFC set to  0.000000
2/21/2012	10:44:30 AM	H2 MFC set to  0.000000
2/21/2012	10:44:30 AM	BCl3 MFC set to  0.000000
2/21/2012	10:44:30 AM	PH3 MFC set to  0.000000
2/21/2012	10:44:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:44:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:44:31 AM	Tube furnace set to 0
2/21/2012	10:45:01 AM	H2 valve closed
2/21/2012	10:45:01 AM	BCl3 valve closed
2/21/2012	10:45:01 AM	PH3 valve closed
2/21/2012	10:45:01 AM	SiCl4 pre valve closed
2/21/2012	10:45:01 AM	SiCl4 post valve closed
2/21/2012	10:45:01 AM	Bypass valve closed
2/21/2012	10:45:01 AM	Bubbler valve closed
2/21/2012	10:45:01 AM	Helium valve opened
2/21/2012	10:45:01 AM	Main Vac valve opened
2/21/2012	10:45:01 AM	Helium MFC set to  20.000000
2/21/2012	10:45:01 AM	H2 MFC set to  0.000000
2/21/2012	10:45:01 AM	BCl3 MFC set to  0.000000
2/21/2012	10:45:01 AM	PH3 MFC set to  0.000000
2/21/2012	10:45:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:45:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:45:01 AM	Tube furnace set to 0
2/21/2012	10:45:31 AM	Helium valve closed
2/21/2012	10:45:31 AM	H2 valve closed
2/21/2012	10:45:31 AM	BCl3 valve closed
2/21/2012	10:45:31 AM	PH3 valve closed
2/21/2012	10:45:31 AM	SiCl4 pre valve closed
2/21/2012	10:45:31 AM	SiCl4 post valve closed
2/21/2012	10:45:31 AM	Bypass valve closed
2/21/2012	10:45:31 AM	Bubbler valve closed
2/21/2012	10:45:31 AM	Main Vac valve opened
2/21/2012	10:45:31 AM	Helium MFC set to  0.000000
2/21/2012	10:45:31 AM	H2 MFC set to  0.000000
2/21/2012	10:45:31 AM	BCl3 MFC set to  0.000000
2/21/2012	10:45:31 AM	PH3 MFC set to  0.000000
2/21/2012	10:45:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:45:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:45:31 AM	Tube furnace set to 0
2/21/2012	10:46:01 AM	H2 valve closed
2/21/2012	10:46:01 AM	BCl3 valve closed
2/21/2012	10:46:01 AM	PH3 valve closed
2/21/2012	10:46:01 AM	SiCl4 pre valve closed
2/21/2012	10:46:01 AM	SiCl4 post valve closed
2/21/2012	10:46:01 AM	Bypass valve closed
2/21/2012	10:46:01 AM	Bubbler valve closed
2/21/2012	10:46:01 AM	Helium valve opened
2/21/2012	10:46:01 AM	Main Vac valve opened
2/21/2012	10:46:01 AM	Helium MFC set to  20.000000
2/21/2012	10:46:01 AM	H2 MFC set to  0.000000
2/21/2012	10:46:01 AM	BCl3 MFC set to  0.000000
2/21/2012	10:46:01 AM	PH3 MFC set to  0.000000
2/21/2012	10:46:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:46:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:46:01 AM	Tube furnace set to 0
2/21/2012	10:46:31 AM	Helium valve closed
2/21/2012	10:46:31 AM	H2 valve closed
2/21/2012	10:46:31 AM	BCl3 valve closed
2/21/2012	10:46:31 AM	PH3 valve closed
2/21/2012	10:46:31 AM	SiCl4 pre valve closed
2/21/2012	10:46:31 AM	SiCl4 post valve closed
2/21/2012	10:46:31 AM	Bypass valve closed
2/21/2012	10:46:31 AM	Bubbler valve closed
2/21/2012	10:46:31 AM	Main Vac valve opened
2/21/2012	10:46:31 AM	Helium MFC set to  0.000000
2/21/2012	10:46:31 AM	H2 MFC set to  0.000000
2/21/2012	10:46:31 AM	BCl3 MFC set to  0.000000
2/21/2012	10:46:31 AM	PH3 MFC set to  0.000000
2/21/2012	10:46:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:46:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:46:31 AM	Tube furnace set to 0
2/21/2012	10:47:01 AM	H2 valve closed
2/21/2012	10:47:01 AM	BCl3 valve closed
2/21/2012	10:47:01 AM	PH3 valve closed
2/21/2012	10:47:01 AM	SiCl4 pre valve closed
2/21/2012	10:47:01 AM	SiCl4 post valve closed
2/21/2012	10:47:01 AM	Bypass valve closed
2/21/2012	10:47:01 AM	Bubbler valve closed
2/21/2012	10:47:01 AM	Helium valve opened
2/21/2012	10:47:01 AM	Main Vac valve opened
2/21/2012	10:47:01 AM	Helium MFC set to  20.000000
2/21/2012	10:47:01 AM	H2 MFC set to  0.000000
2/21/2012	10:47:01 AM	BCl3 MFC set to  0.000000
2/21/2012	10:47:01 AM	PH3 MFC set to  0.000000
2/21/2012	10:47:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:47:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:47:02 AM	Tube furnace set to 0
2/21/2012	10:47:32 AM	Helium valve closed
2/21/2012	10:47:32 AM	H2 valve closed
2/21/2012	10:47:32 AM	BCl3 valve closed
2/21/2012	10:47:32 AM	PH3 valve closed
2/21/2012	10:47:32 AM	SiCl4 pre valve closed
2/21/2012	10:47:32 AM	SiCl4 post valve closed
2/21/2012	10:47:32 AM	Bypass valve closed
2/21/2012	10:47:32 AM	Bubbler valve closed
2/21/2012	10:47:32 AM	Main Vac valve opened
2/21/2012	10:47:32 AM	Helium MFC set to  0.000000
2/21/2012	10:47:32 AM	H2 MFC set to  0.000000
2/21/2012	10:47:32 AM	BCl3 MFC set to  0.000000
2/21/2012	10:47:32 AM	PH3 MFC set to  0.000000
2/21/2012	10:47:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:47:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:47:32 AM	Tube furnace set to 0
2/21/2012	10:48:02 AM	H2 valve closed
2/21/2012	10:48:02 AM	BCl3 valve closed
2/21/2012	10:48:02 AM	PH3 valve closed
2/21/2012	10:48:02 AM	SiCl4 pre valve closed
2/21/2012	10:48:02 AM	SiCl4 post valve closed
2/21/2012	10:48:02 AM	Bypass valve closed
2/21/2012	10:48:02 AM	Bubbler valve closed
2/21/2012	10:48:02 AM	Helium valve opened
2/21/2012	10:48:02 AM	Main Vac valve opened
2/21/2012	10:48:02 AM	Helium MFC set to  20.000000
2/21/2012	10:48:02 AM	H2 MFC set to  0.000000
2/21/2012	10:48:02 AM	BCl3 MFC set to  0.000000
2/21/2012	10:48:02 AM	PH3 MFC set to  0.000000
2/21/2012	10:48:02 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:48:02 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:48:02 AM	Tube furnace set to 0
2/21/2012	10:48:32 AM	Helium valve closed
2/21/2012	10:48:32 AM	H2 valve closed
2/21/2012	10:48:32 AM	BCl3 valve closed
2/21/2012	10:48:32 AM	PH3 valve closed
2/21/2012	10:48:32 AM	SiCl4 pre valve closed
2/21/2012	10:48:32 AM	SiCl4 post valve closed
2/21/2012	10:48:32 AM	Bypass valve closed
2/21/2012	10:48:32 AM	Bubbler valve closed
2/21/2012	10:48:32 AM	Main Vac valve opened
2/21/2012	10:48:32 AM	Helium MFC set to  0.000000
2/21/2012	10:48:32 AM	H2 MFC set to  0.000000
2/21/2012	10:48:32 AM	BCl3 MFC set to  0.000000
2/21/2012	10:48:32 AM	PH3 MFC set to  0.000000
2/21/2012	10:48:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:48:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:48:32 AM	Tube furnace set to 0
2/21/2012	10:49:02 AM	H2 valve closed
2/21/2012	10:49:02 AM	BCl3 valve closed
2/21/2012	10:49:02 AM	PH3 valve closed
2/21/2012	10:49:02 AM	SiCl4 pre valve closed
2/21/2012	10:49:02 AM	SiCl4 post valve closed
2/21/2012	10:49:02 AM	Bypass valve closed
2/21/2012	10:49:02 AM	Bubbler valve closed
2/21/2012	10:49:02 AM	Helium valve opened
2/21/2012	10:49:02 AM	Main Vac valve opened
2/21/2012	10:49:02 AM	Helium MFC set to  20.000000
2/21/2012	10:49:02 AM	H2 MFC set to  0.000000
2/21/2012	10:49:02 AM	BCl3 MFC set to  0.000000
2/21/2012	10:49:02 AM	PH3 MFC set to  0.000000
2/21/2012	10:49:02 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:49:02 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:49:02 AM	Tube furnace set to 0
2/21/2012	10:49:32 AM	Helium valve closed
2/21/2012	10:49:32 AM	H2 valve closed
2/21/2012	10:49:32 AM	BCl3 valve closed
2/21/2012	10:49:32 AM	PH3 valve closed
2/21/2012	10:49:32 AM	SiCl4 pre valve closed
2/21/2012	10:49:32 AM	SiCl4 post valve closed
2/21/2012	10:49:32 AM	Bypass valve closed
2/21/2012	10:49:32 AM	Bubbler valve closed
2/21/2012	10:49:32 AM	Main Vac valve opened
2/21/2012	10:49:32 AM	Helium MFC set to  0.000000
2/21/2012	10:49:32 AM	H2 MFC set to  0.000000
2/21/2012	10:49:32 AM	BCl3 MFC set to  0.000000
2/21/2012	10:49:32 AM	PH3 MFC set to  0.000000
2/21/2012	10:49:32 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:49:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:49:33 AM	Tube furnace set to 0
2/21/2012	10:50:03 AM	H2 valve closed
2/21/2012	10:50:03 AM	BCl3 valve closed
2/21/2012	10:50:03 AM	PH3 valve closed
2/21/2012	10:50:03 AM	SiCl4 pre valve closed
2/21/2012	10:50:03 AM	SiCl4 post valve closed
2/21/2012	10:50:03 AM	Bypass valve closed
2/21/2012	10:50:03 AM	Bubbler valve closed
2/21/2012	10:50:03 AM	Helium valve opened
2/21/2012	10:50:03 AM	Main Vac valve opened
2/21/2012	10:50:03 AM	Helium MFC set to  20.000000
2/21/2012	10:50:03 AM	H2 MFC set to  0.000000
2/21/2012	10:50:03 AM	BCl3 MFC set to  0.000000
2/21/2012	10:50:03 AM	PH3 MFC set to  0.000000
2/21/2012	10:50:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:50:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:50:03 AM	Tube furnace set to 0
2/21/2012	10:50:33 AM	Helium valve closed
2/21/2012	10:50:33 AM	H2 valve closed
2/21/2012	10:50:33 AM	BCl3 valve closed
2/21/2012	10:50:33 AM	PH3 valve closed
2/21/2012	10:50:33 AM	SiCl4 pre valve closed
2/21/2012	10:50:33 AM	SiCl4 post valve closed
2/21/2012	10:50:33 AM	Bypass valve closed
2/21/2012	10:50:33 AM	Bubbler valve closed
2/21/2012	10:50:33 AM	Main Vac valve opened
2/21/2012	10:50:33 AM	Helium MFC set to  0.000000
2/21/2012	10:50:33 AM	H2 MFC set to  0.000000
2/21/2012	10:50:33 AM	BCl3 MFC set to  0.000000
2/21/2012	10:50:33 AM	PH3 MFC set to  0.000000
2/21/2012	10:50:33 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:50:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:50:33 AM	Tube furnace set to 200
2/21/2012	10:51:03 AM	H2 valve closed
2/21/2012	10:51:03 AM	BCl3 valve closed
2/21/2012	10:51:03 AM	PH3 valve closed
2/21/2012	10:51:03 AM	SiCl4 pre valve closed
2/21/2012	10:51:03 AM	SiCl4 post valve closed
2/21/2012	10:51:03 AM	Bypass valve closed
2/21/2012	10:51:03 AM	Bubbler valve closed
2/21/2012	10:51:03 AM	Helium valve opened
2/21/2012	10:51:03 AM	Main Vac valve opened
2/21/2012	10:51:03 AM	Helium MFC set to  20.000000
2/21/2012	10:51:03 AM	H2 MFC set to  0.000000
2/21/2012	10:51:03 AM	BCl3 MFC set to  0.000000
2/21/2012	10:51:03 AM	PH3 MFC set to  0.000000
2/21/2012	10:51:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:51:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:51:03 AM	Tube furnace set to 200
2/21/2012	10:51:33 AM	Helium valve closed
2/21/2012	10:51:33 AM	H2 valve closed
2/21/2012	10:51:33 AM	BCl3 valve closed
2/21/2012	10:51:33 AM	PH3 valve closed
2/21/2012	10:51:33 AM	SiCl4 pre valve closed
2/21/2012	10:51:33 AM	SiCl4 post valve closed
2/21/2012	10:51:33 AM	Bypass valve closed
2/21/2012	10:51:33 AM	Bubbler valve closed
2/21/2012	10:51:33 AM	Main Vac valve opened
2/21/2012	10:51:33 AM	Helium MFC set to  0.000000
2/21/2012	10:51:33 AM	H2 MFC set to  0.000000
2/21/2012	10:51:33 AM	BCl3 MFC set to  0.000000
2/21/2012	10:51:33 AM	PH3 MFC set to  0.000000
2/21/2012	10:51:33 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:51:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:51:33 AM	Tube furnace set to 200
2/21/2012	10:52:03 AM	H2 valve closed
2/21/2012	10:52:03 AM	BCl3 valve closed
2/21/2012	10:52:03 AM	PH3 valve closed
2/21/2012	10:52:03 AM	SiCl4 pre valve closed
2/21/2012	10:52:03 AM	SiCl4 post valve closed
2/21/2012	10:52:03 AM	Bypass valve closed
2/21/2012	10:52:03 AM	Bubbler valve closed
2/21/2012	10:52:03 AM	Helium valve opened
2/21/2012	10:52:03 AM	Main Vac valve opened
2/21/2012	10:52:03 AM	Helium MFC set to  20.000000
2/21/2012	10:52:03 AM	H2 MFC set to  0.000000
2/21/2012	10:52:03 AM	BCl3 MFC set to  0.000000
2/21/2012	10:52:03 AM	PH3 MFC set to  0.000000
2/21/2012	10:52:03 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:52:03 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:52:04 AM	Tube furnace set to 200
2/21/2012	10:52:34 AM	Helium valve closed
2/21/2012	10:52:34 AM	H2 valve closed
2/21/2012	10:52:34 AM	BCl3 valve closed
2/21/2012	10:52:34 AM	PH3 valve closed
2/21/2012	10:52:34 AM	SiCl4 pre valve closed
2/21/2012	10:52:34 AM	SiCl4 post valve closed
2/21/2012	10:52:34 AM	Bypass valve closed
2/21/2012	10:52:34 AM	Bubbler valve closed
2/21/2012	10:52:34 AM	Main Vac valve opened
2/21/2012	10:52:34 AM	Helium MFC set to  0.000000
2/21/2012	10:52:34 AM	H2 MFC set to  0.000000
2/21/2012	10:52:34 AM	BCl3 MFC set to  0.000000
2/21/2012	10:52:34 AM	PH3 MFC set to  0.000000
2/21/2012	10:52:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:52:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:52:34 AM	Tube furnace set to 200
2/21/2012	10:53:04 AM	H2 valve closed
2/21/2012	10:53:04 AM	BCl3 valve closed
2/21/2012	10:53:04 AM	PH3 valve closed
2/21/2012	10:53:04 AM	SiCl4 pre valve closed
2/21/2012	10:53:04 AM	SiCl4 post valve closed
2/21/2012	10:53:04 AM	Bypass valve closed
2/21/2012	10:53:04 AM	Bubbler valve closed
2/21/2012	10:53:04 AM	Helium valve opened
2/21/2012	10:53:04 AM	Main Vac valve opened
2/21/2012	10:53:04 AM	Helium MFC set to  20.000000
2/21/2012	10:53:04 AM	H2 MFC set to  0.000000
2/21/2012	10:53:04 AM	BCl3 MFC set to  0.000000
2/21/2012	10:53:04 AM	PH3 MFC set to  0.000000
2/21/2012	10:53:04 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:53:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:53:04 AM	Tube furnace set to 200
2/21/2012	10:53:34 AM	Helium valve closed
2/21/2012	10:53:34 AM	H2 valve closed
2/21/2012	10:53:34 AM	BCl3 valve closed
2/21/2012	10:53:34 AM	PH3 valve closed
2/21/2012	10:53:34 AM	SiCl4 pre valve closed
2/21/2012	10:53:34 AM	SiCl4 post valve closed
2/21/2012	10:53:34 AM	Bypass valve closed
2/21/2012	10:53:34 AM	Bubbler valve closed
2/21/2012	10:53:34 AM	Main Vac valve opened
2/21/2012	10:53:34 AM	Helium MFC set to  0.000000
2/21/2012	10:53:34 AM	H2 MFC set to  0.000000
2/21/2012	10:53:34 AM	BCl3 MFC set to  0.000000
2/21/2012	10:53:34 AM	PH3 MFC set to  0.000000
2/21/2012	10:53:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:53:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:53:34 AM	Tube furnace set to 200
2/21/2012	10:54:04 AM	H2 valve closed
2/21/2012	10:54:04 AM	BCl3 valve closed
2/21/2012	10:54:04 AM	PH3 valve closed
2/21/2012	10:54:04 AM	SiCl4 pre valve closed
2/21/2012	10:54:04 AM	SiCl4 post valve closed
2/21/2012	10:54:04 AM	Bypass valve closed
2/21/2012	10:54:04 AM	Bubbler valve closed
2/21/2012	10:54:04 AM	Helium valve opened
2/21/2012	10:54:04 AM	Main Vac valve opened
2/21/2012	10:54:04 AM	Helium MFC set to  20.000000
2/21/2012	10:54:04 AM	H2 MFC set to  0.000000
2/21/2012	10:54:04 AM	BCl3 MFC set to  0.000000
2/21/2012	10:54:04 AM	PH3 MFC set to  0.000000
2/21/2012	10:54:04 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:54:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:54:04 AM	Tube furnace set to 200
2/21/2012	10:54:34 AM	Helium valve closed
2/21/2012	10:54:34 AM	H2 valve closed
2/21/2012	10:54:34 AM	BCl3 valve closed
2/21/2012	10:54:34 AM	PH3 valve closed
2/21/2012	10:54:34 AM	SiCl4 pre valve closed
2/21/2012	10:54:34 AM	SiCl4 post valve closed
2/21/2012	10:54:34 AM	Bypass valve closed
2/21/2012	10:54:34 AM	Bubbler valve closed
2/21/2012	10:54:34 AM	Main Vac valve opened
2/21/2012	10:54:34 AM	Helium MFC set to  0.000000
2/21/2012	10:54:34 AM	H2 MFC set to  0.000000
2/21/2012	10:54:34 AM	BCl3 MFC set to  0.000000
2/21/2012	10:54:34 AM	PH3 MFC set to  0.000000
2/21/2012	10:54:34 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:54:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:54:35 AM	Tube furnace set to 200
2/21/2012	10:55:05 AM	H2 valve closed
2/21/2012	10:55:05 AM	BCl3 valve closed
2/21/2012	10:55:05 AM	PH3 valve closed
2/21/2012	10:55:05 AM	SiCl4 pre valve closed
2/21/2012	10:55:05 AM	SiCl4 post valve closed
2/21/2012	10:55:05 AM	Bypass valve closed
2/21/2012	10:55:05 AM	Bubbler valve closed
2/21/2012	10:55:05 AM	Helium valve opened
2/21/2012	10:55:05 AM	Main Vac valve opened
2/21/2012	10:55:05 AM	Helium MFC set to  20.000000
2/21/2012	10:55:05 AM	H2 MFC set to  0.000000
2/21/2012	10:55:05 AM	BCl3 MFC set to  0.000000
2/21/2012	10:55:05 AM	PH3 MFC set to  0.000000
2/21/2012	10:55:05 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:55:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:55:05 AM	Tube furnace set to 200
2/21/2012	10:55:35 AM	Helium valve closed
2/21/2012	10:55:35 AM	H2 valve closed
2/21/2012	10:55:35 AM	BCl3 valve closed
2/21/2012	10:55:35 AM	PH3 valve closed
2/21/2012	10:55:35 AM	SiCl4 pre valve closed
2/21/2012	10:55:35 AM	SiCl4 post valve closed
2/21/2012	10:55:35 AM	Bypass valve closed
2/21/2012	10:55:35 AM	Bubbler valve closed
2/21/2012	10:55:35 AM	Main Vac valve opened
2/21/2012	10:55:35 AM	Helium MFC set to  0.000000
2/21/2012	10:55:35 AM	H2 MFC set to  0.000000
2/21/2012	10:55:35 AM	BCl3 MFC set to  0.000000
2/21/2012	10:55:35 AM	PH3 MFC set to  0.000000
2/21/2012	10:55:35 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:55:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:55:35 AM	Tube furnace set to 200
2/21/2012	10:56:05 AM	H2 valve closed
2/21/2012	10:56:05 AM	BCl3 valve closed
2/21/2012	10:56:05 AM	PH3 valve closed
2/21/2012	10:56:05 AM	SiCl4 pre valve closed
2/21/2012	10:56:05 AM	SiCl4 post valve closed
2/21/2012	10:56:05 AM	Bypass valve closed
2/21/2012	10:56:05 AM	Bubbler valve closed
2/21/2012	10:56:05 AM	Helium valve opened
2/21/2012	10:56:05 AM	Main Vac valve opened
2/21/2012	10:56:05 AM	Helium MFC set to  20.000000
2/21/2012	10:56:05 AM	H2 MFC set to  0.000000
2/21/2012	10:56:05 AM	BCl3 MFC set to  0.000000
2/21/2012	10:56:05 AM	PH3 MFC set to  0.000000
2/21/2012	10:56:05 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:56:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:56:05 AM	Tube furnace set to 200
2/21/2012	10:56:35 AM	Helium valve closed
2/21/2012	10:56:35 AM	H2 valve closed
2/21/2012	10:56:35 AM	BCl3 valve closed
2/21/2012	10:56:35 AM	PH3 valve closed
2/21/2012	10:56:35 AM	SiCl4 pre valve closed
2/21/2012	10:56:35 AM	SiCl4 post valve closed
2/21/2012	10:56:35 AM	Bypass valve closed
2/21/2012	10:56:35 AM	Bubbler valve closed
2/21/2012	10:56:35 AM	Main Vac valve opened
2/21/2012	10:56:35 AM	Helium MFC set to  0.000000
2/21/2012	10:56:35 AM	H2 MFC set to  0.000000
2/21/2012	10:56:35 AM	BCl3 MFC set to  0.000000
2/21/2012	10:56:35 AM	PH3 MFC set to  0.000000
2/21/2012	10:56:35 AM	SiCl4 MFC set to  0.000000
2/21/2012	10:56:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:56:35 AM	Tube furnace set to 0
2/21/2012	10:56:36 AM	Run finished at 10:56 AM
2/21/2012	11:03:26 AM	Main Vac valve closed
2/21/2012	11:03:35 AM	Main Vac valve opened
2/21/2012	11:03:48 AM	Recipe started at 11:03 AM
2/21/2012	11:03:48 AM	Helium valve closed
2/21/2012	11:03:48 AM	H2 valve closed
2/21/2012	11:03:48 AM	BCl3 valve closed
2/21/2012	11:03:48 AM	PH3 valve closed
2/21/2012	11:03:48 AM	SiCl4 pre valve closed
2/21/2012	11:03:48 AM	SiCl4 post valve closed
2/21/2012	11:03:48 AM	Bypass valve closed
2/21/2012	11:03:48 AM	Bubbler valve closed
2/21/2012	11:03:48 AM	Main Vac valve opened
2/21/2012	11:03:48 AM	Helium MFC set to  0.000000
2/21/2012	11:03:48 AM	H2 MFC set to  0.000000
2/21/2012	11:03:48 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:48 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:48 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:48 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:48 AM	Tube furnace set to 0
2/21/2012	11:03:52 AM	H2 valve closed
2/21/2012	11:03:52 AM	BCl3 valve closed
2/21/2012	11:03:52 AM	PH3 valve closed
2/21/2012	11:03:52 AM	SiCl4 pre valve closed
2/21/2012	11:03:52 AM	SiCl4 post valve closed
2/21/2012	11:03:52 AM	Bypass valve closed
2/21/2012	11:03:52 AM	Bubbler valve closed
2/21/2012	11:03:52 AM	Helium valve opened
2/21/2012	11:03:52 AM	Main Vac valve opened
2/21/2012	11:03:52 AM	Helium MFC set to  20.000000
2/21/2012	11:03:52 AM	H2 MFC set to  0.000000
2/21/2012	11:03:52 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:52 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:52 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:52 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:52 AM	Tube furnace set to 0
2/21/2012	11:03:53 AM	Helium valve closed
2/21/2012	11:03:53 AM	H2 valve closed
2/21/2012	11:03:53 AM	BCl3 valve closed
2/21/2012	11:03:53 AM	PH3 valve closed
2/21/2012	11:03:53 AM	SiCl4 pre valve closed
2/21/2012	11:03:53 AM	SiCl4 post valve closed
2/21/2012	11:03:53 AM	Bypass valve closed
2/21/2012	11:03:53 AM	Bubbler valve closed
2/21/2012	11:03:53 AM	Main Vac valve opened
2/21/2012	11:03:53 AM	Helium MFC set to  0.000000
2/21/2012	11:03:53 AM	H2 MFC set to  0.000000
2/21/2012	11:03:53 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:53 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:53 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:53 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:53 AM	Tube furnace set to 0
2/21/2012	11:03:54 AM	H2 valve closed
2/21/2012	11:03:54 AM	BCl3 valve closed
2/21/2012	11:03:54 AM	PH3 valve closed
2/21/2012	11:03:54 AM	SiCl4 pre valve closed
2/21/2012	11:03:54 AM	SiCl4 post valve closed
2/21/2012	11:03:54 AM	Bypass valve closed
2/21/2012	11:03:54 AM	Bubbler valve closed
2/21/2012	11:03:54 AM	Helium valve opened
2/21/2012	11:03:54 AM	Main Vac valve opened
2/21/2012	11:03:54 AM	Helium MFC set to  20.000000
2/21/2012	11:03:54 AM	H2 MFC set to  0.000000
2/21/2012	11:03:54 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:54 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:54 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:54 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:54 AM	Tube furnace set to 0
2/21/2012	11:03:54 AM	Helium valve closed
2/21/2012	11:03:54 AM	H2 valve closed
2/21/2012	11:03:54 AM	BCl3 valve closed
2/21/2012	11:03:54 AM	PH3 valve closed
2/21/2012	11:03:54 AM	SiCl4 pre valve closed
2/21/2012	11:03:54 AM	SiCl4 post valve closed
2/21/2012	11:03:54 AM	Bypass valve closed
2/21/2012	11:03:54 AM	Bubbler valve closed
2/21/2012	11:03:54 AM	Main Vac valve opened
2/21/2012	11:03:54 AM	Helium MFC set to  0.000000
2/21/2012	11:03:54 AM	H2 MFC set to  0.000000
2/21/2012	11:03:54 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:54 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:54 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:54 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:55 AM	Tube furnace set to 0
2/21/2012	11:03:55 AM	H2 valve closed
2/21/2012	11:03:55 AM	BCl3 valve closed
2/21/2012	11:03:55 AM	PH3 valve closed
2/21/2012	11:03:55 AM	SiCl4 pre valve closed
2/21/2012	11:03:55 AM	SiCl4 post valve closed
2/21/2012	11:03:55 AM	Bypass valve closed
2/21/2012	11:03:55 AM	Bubbler valve closed
2/21/2012	11:03:55 AM	Helium valve opened
2/21/2012	11:03:55 AM	Main Vac valve opened
2/21/2012	11:03:55 AM	Helium MFC set to  20.000000
2/21/2012	11:03:55 AM	H2 MFC set to  0.000000
2/21/2012	11:03:55 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:55 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:55 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:55 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:55 AM	Tube furnace set to 0
2/21/2012	11:03:56 AM	Helium valve closed
2/21/2012	11:03:56 AM	H2 valve closed
2/21/2012	11:03:56 AM	BCl3 valve closed
2/21/2012	11:03:56 AM	PH3 valve closed
2/21/2012	11:03:56 AM	SiCl4 pre valve closed
2/21/2012	11:03:56 AM	SiCl4 post valve closed
2/21/2012	11:03:56 AM	Bypass valve closed
2/21/2012	11:03:56 AM	Bubbler valve closed
2/21/2012	11:03:56 AM	Main Vac valve opened
2/21/2012	11:03:56 AM	Helium MFC set to  0.000000
2/21/2012	11:03:56 AM	H2 MFC set to  0.000000
2/21/2012	11:03:56 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:56 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:56 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:56 AM	Tube furnace set to 0
2/21/2012	11:03:56 AM	H2 valve closed
2/21/2012	11:03:56 AM	BCl3 valve closed
2/21/2012	11:03:56 AM	PH3 valve closed
2/21/2012	11:03:56 AM	SiCl4 pre valve closed
2/21/2012	11:03:56 AM	SiCl4 post valve closed
2/21/2012	11:03:56 AM	Bypass valve closed
2/21/2012	11:03:56 AM	Bubbler valve closed
2/21/2012	11:03:56 AM	Helium valve opened
2/21/2012	11:03:56 AM	Main Vac valve opened
2/21/2012	11:03:56 AM	Helium MFC set to  20.000000
2/21/2012	11:03:56 AM	H2 MFC set to  0.000000
2/21/2012	11:03:56 AM	BCl3 MFC set to  0.000000
2/21/2012	11:03:56 AM	PH3 MFC set to  0.000000
2/21/2012	11:03:56 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:03:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:03:57 AM	Tube furnace set to 0
2/21/2012	11:04:27 AM	Helium valve closed
2/21/2012	11:04:27 AM	H2 valve closed
2/21/2012	11:04:27 AM	BCl3 valve closed
2/21/2012	11:04:27 AM	PH3 valve closed
2/21/2012	11:04:27 AM	SiCl4 pre valve closed
2/21/2012	11:04:27 AM	SiCl4 post valve closed
2/21/2012	11:04:27 AM	Bypass valve closed
2/21/2012	11:04:27 AM	Bubbler valve closed
2/21/2012	11:04:27 AM	Main Vac valve opened
2/21/2012	11:04:27 AM	Helium MFC set to  0.000000
2/21/2012	11:04:27 AM	H2 MFC set to  0.000000
2/21/2012	11:04:27 AM	BCl3 MFC set to  0.000000
2/21/2012	11:04:27 AM	PH3 MFC set to  0.000000
2/21/2012	11:04:27 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:04:27 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:04:27 AM	Tube furnace set to 0
2/21/2012	11:04:57 AM	H2 valve closed
2/21/2012	11:04:57 AM	BCl3 valve closed
2/21/2012	11:04:57 AM	PH3 valve closed
2/21/2012	11:04:57 AM	SiCl4 pre valve closed
2/21/2012	11:04:57 AM	SiCl4 post valve closed
2/21/2012	11:04:57 AM	Bypass valve closed
2/21/2012	11:04:57 AM	Bubbler valve closed
2/21/2012	11:04:57 AM	Helium valve opened
2/21/2012	11:04:57 AM	Main Vac valve opened
2/21/2012	11:04:57 AM	Helium MFC set to  20.000000
2/21/2012	11:04:57 AM	H2 MFC set to  0.000000
2/21/2012	11:04:57 AM	BCl3 MFC set to  0.000000
2/21/2012	11:04:57 AM	PH3 MFC set to  0.000000
2/21/2012	11:04:57 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:04:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:04:57 AM	Tube furnace set to 0
2/21/2012	11:05:27 AM	Helium valve closed
2/21/2012	11:05:27 AM	H2 valve closed
2/21/2012	11:05:27 AM	BCl3 valve closed
2/21/2012	11:05:27 AM	PH3 valve closed
2/21/2012	11:05:27 AM	SiCl4 pre valve closed
2/21/2012	11:05:27 AM	SiCl4 post valve closed
2/21/2012	11:05:27 AM	Bypass valve closed
2/21/2012	11:05:27 AM	Bubbler valve closed
2/21/2012	11:05:27 AM	Main Vac valve opened
2/21/2012	11:05:27 AM	Helium MFC set to  0.000000
2/21/2012	11:05:27 AM	H2 MFC set to  0.000000
2/21/2012	11:05:27 AM	BCl3 MFC set to  0.000000
2/21/2012	11:05:27 AM	PH3 MFC set to  0.000000
2/21/2012	11:05:27 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:05:27 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:05:27 AM	Tube furnace set to 0
2/21/2012	11:05:57 AM	H2 valve closed
2/21/2012	11:05:57 AM	BCl3 valve closed
2/21/2012	11:05:57 AM	PH3 valve closed
2/21/2012	11:05:57 AM	SiCl4 pre valve closed
2/21/2012	11:05:57 AM	SiCl4 post valve closed
2/21/2012	11:05:57 AM	Bypass valve closed
2/21/2012	11:05:57 AM	Bubbler valve closed
2/21/2012	11:05:57 AM	Helium valve opened
2/21/2012	11:05:57 AM	Main Vac valve opened
2/21/2012	11:05:57 AM	Helium MFC set to  20.000000
2/21/2012	11:05:57 AM	H2 MFC set to  0.000000
2/21/2012	11:05:57 AM	BCl3 MFC set to  0.000000
2/21/2012	11:05:57 AM	PH3 MFC set to  0.000000
2/21/2012	11:05:57 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:05:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:05:57 AM	Tube furnace set to 0
2/21/2012	11:06:27 AM	Helium valve closed
2/21/2012	11:06:28 AM	H2 valve closed
2/21/2012	11:06:28 AM	BCl3 valve closed
2/21/2012	11:06:28 AM	PH3 valve closed
2/21/2012	11:06:28 AM	SiCl4 pre valve closed
2/21/2012	11:06:28 AM	SiCl4 post valve closed
2/21/2012	11:06:28 AM	Bypass valve closed
2/21/2012	11:06:28 AM	Bubbler valve closed
2/21/2012	11:06:28 AM	Main Vac valve opened
2/21/2012	11:06:28 AM	Helium MFC set to  0.000000
2/21/2012	11:06:28 AM	H2 MFC set to  0.000000
2/21/2012	11:06:28 AM	BCl3 MFC set to  0.000000
2/21/2012	11:06:28 AM	PH3 MFC set to  0.000000
2/21/2012	11:06:28 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:06:28 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:06:28 AM	Tube furnace set to 0
2/21/2012	11:06:58 AM	H2 valve closed
2/21/2012	11:06:58 AM	BCl3 valve closed
2/21/2012	11:06:58 AM	PH3 valve closed
2/21/2012	11:06:58 AM	SiCl4 pre valve closed
2/21/2012	11:06:58 AM	SiCl4 post valve closed
2/21/2012	11:06:58 AM	Bypass valve closed
2/21/2012	11:06:58 AM	Bubbler valve closed
2/21/2012	11:06:58 AM	Helium valve opened
2/21/2012	11:06:58 AM	Main Vac valve opened
2/21/2012	11:06:58 AM	Helium MFC set to  20.000000
2/21/2012	11:06:58 AM	H2 MFC set to  0.000000
2/21/2012	11:06:58 AM	BCl3 MFC set to  0.000000
2/21/2012	11:06:58 AM	PH3 MFC set to  0.000000
2/21/2012	11:06:58 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:06:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:06:58 AM	Tube furnace set to 0
2/21/2012	11:07:28 AM	Helium valve closed
2/21/2012	11:07:28 AM	H2 valve closed
2/21/2012	11:07:28 AM	BCl3 valve closed
2/21/2012	11:07:28 AM	PH3 valve closed
2/21/2012	11:07:28 AM	SiCl4 pre valve closed
2/21/2012	11:07:28 AM	SiCl4 post valve closed
2/21/2012	11:07:28 AM	Bypass valve closed
2/21/2012	11:07:28 AM	Bubbler valve closed
2/21/2012	11:07:28 AM	Main Vac valve opened
2/21/2012	11:07:28 AM	Helium MFC set to  0.000000
2/21/2012	11:07:28 AM	H2 MFC set to  0.000000
2/21/2012	11:07:28 AM	BCl3 MFC set to  0.000000
2/21/2012	11:07:28 AM	PH3 MFC set to  0.000000
2/21/2012	11:07:28 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:07:28 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:07:28 AM	Tube furnace set to 0
2/21/2012	11:07:58 AM	H2 valve closed
2/21/2012	11:07:58 AM	BCl3 valve closed
2/21/2012	11:07:58 AM	PH3 valve closed
2/21/2012	11:07:58 AM	SiCl4 pre valve closed
2/21/2012	11:07:58 AM	SiCl4 post valve closed
2/21/2012	11:07:58 AM	Bypass valve closed
2/21/2012	11:07:58 AM	Bubbler valve closed
2/21/2012	11:07:58 AM	Helium valve opened
2/21/2012	11:07:58 AM	Main Vac valve opened
2/21/2012	11:07:58 AM	Helium MFC set to  20.000000
2/21/2012	11:07:58 AM	H2 MFC set to  0.000000
2/21/2012	11:07:58 AM	BCl3 MFC set to  0.000000
2/21/2012	11:07:58 AM	PH3 MFC set to  0.000000
2/21/2012	11:07:58 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:07:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:07:58 AM	Tube furnace set to 0
2/21/2012	11:08:28 AM	Helium valve closed
2/21/2012	11:08:28 AM	H2 valve closed
2/21/2012	11:08:28 AM	BCl3 valve closed
2/21/2012	11:08:28 AM	PH3 valve closed
2/21/2012	11:08:28 AM	SiCl4 pre valve closed
2/21/2012	11:08:28 AM	SiCl4 post valve closed
2/21/2012	11:08:28 AM	Bypass valve closed
2/21/2012	11:08:28 AM	Bubbler valve closed
2/21/2012	11:08:28 AM	Main Vac valve opened
2/21/2012	11:08:28 AM	Helium MFC set to  0.000000
2/21/2012	11:08:28 AM	H2 MFC set to  0.000000
2/21/2012	11:08:28 AM	BCl3 MFC set to  0.000000
2/21/2012	11:08:28 AM	PH3 MFC set to  0.000000
2/21/2012	11:08:28 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:08:28 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:08:29 AM	Tube furnace set to 0
2/21/2012	11:08:59 AM	H2 valve closed
2/21/2012	11:08:59 AM	BCl3 valve closed
2/21/2012	11:08:59 AM	PH3 valve closed
2/21/2012	11:08:59 AM	SiCl4 pre valve closed
2/21/2012	11:08:59 AM	SiCl4 post valve closed
2/21/2012	11:08:59 AM	Bypass valve closed
2/21/2012	11:08:59 AM	Bubbler valve closed
2/21/2012	11:08:59 AM	Helium valve opened
2/21/2012	11:08:59 AM	Main Vac valve opened
2/21/2012	11:08:59 AM	Helium MFC set to  20.000000
2/21/2012	11:08:59 AM	H2 MFC set to  0.000000
2/21/2012	11:08:59 AM	BCl3 MFC set to  0.000000
2/21/2012	11:08:59 AM	PH3 MFC set to  0.000000
2/21/2012	11:08:59 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:08:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:08:59 AM	Tube furnace set to 0
2/21/2012	11:09:29 AM	Helium valve closed
2/21/2012	11:09:29 AM	H2 valve closed
2/21/2012	11:09:29 AM	BCl3 valve closed
2/21/2012	11:09:29 AM	PH3 valve closed
2/21/2012	11:09:29 AM	SiCl4 pre valve closed
2/21/2012	11:09:29 AM	SiCl4 post valve closed
2/21/2012	11:09:29 AM	Bypass valve closed
2/21/2012	11:09:29 AM	Bubbler valve closed
2/21/2012	11:09:29 AM	Main Vac valve opened
2/21/2012	11:09:29 AM	Helium MFC set to  0.000000
2/21/2012	11:09:29 AM	H2 MFC set to  0.000000
2/21/2012	11:09:29 AM	BCl3 MFC set to  0.000000
2/21/2012	11:09:29 AM	PH3 MFC set to  0.000000
2/21/2012	11:09:29 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:09:29 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:09:29 AM	Tube furnace set to 200
2/21/2012	11:09:59 AM	H2 valve closed
2/21/2012	11:09:59 AM	BCl3 valve closed
2/21/2012	11:09:59 AM	PH3 valve closed
2/21/2012	11:09:59 AM	SiCl4 pre valve closed
2/21/2012	11:09:59 AM	SiCl4 post valve closed
2/21/2012	11:09:59 AM	Bypass valve closed
2/21/2012	11:09:59 AM	Bubbler valve closed
2/21/2012	11:09:59 AM	Helium valve opened
2/21/2012	11:09:59 AM	Main Vac valve opened
2/21/2012	11:09:59 AM	Helium MFC set to  20.000000
2/21/2012	11:09:59 AM	H2 MFC set to  0.000000
2/21/2012	11:09:59 AM	BCl3 MFC set to  0.000000
2/21/2012	11:09:59 AM	PH3 MFC set to  0.000000
2/21/2012	11:09:59 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:09:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:09:59 AM	Tube furnace set to 200
2/21/2012	11:10:29 AM	Helium valve closed
2/21/2012	11:10:29 AM	H2 valve closed
2/21/2012	11:10:29 AM	BCl3 valve closed
2/21/2012	11:10:29 AM	PH3 valve closed
2/21/2012	11:10:29 AM	SiCl4 pre valve closed
2/21/2012	11:10:29 AM	SiCl4 post valve closed
2/21/2012	11:10:29 AM	Bypass valve closed
2/21/2012	11:10:29 AM	Bubbler valve closed
2/21/2012	11:10:29 AM	Main Vac valve opened
2/21/2012	11:10:29 AM	Helium MFC set to  0.000000
2/21/2012	11:10:29 AM	H2 MFC set to  0.000000
2/21/2012	11:10:29 AM	BCl3 MFC set to  0.000000
2/21/2012	11:10:29 AM	PH3 MFC set to  0.000000
2/21/2012	11:10:29 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:10:29 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:10:29 AM	Tube furnace set to 200
2/21/2012	11:10:59 AM	H2 valve closed
2/21/2012	11:10:59 AM	BCl3 valve closed
2/21/2012	11:10:59 AM	PH3 valve closed
2/21/2012	11:10:59 AM	SiCl4 pre valve closed
2/21/2012	11:10:59 AM	SiCl4 post valve closed
2/21/2012	11:10:59 AM	Bypass valve closed
2/21/2012	11:10:59 AM	Bubbler valve closed
2/21/2012	11:10:59 AM	Helium valve opened
2/21/2012	11:10:59 AM	Main Vac valve opened
2/21/2012	11:10:59 AM	Helium MFC set to  20.000000
2/21/2012	11:10:59 AM	H2 MFC set to  0.000000
2/21/2012	11:10:59 AM	BCl3 MFC set to  0.000000
2/21/2012	11:10:59 AM	PH3 MFC set to  0.000000
2/21/2012	11:10:59 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:10:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:11:00 AM	Tube furnace set to 200
2/21/2012	11:11:30 AM	Helium valve closed
2/21/2012	11:11:30 AM	H2 valve closed
2/21/2012	11:11:30 AM	BCl3 valve closed
2/21/2012	11:11:30 AM	PH3 valve closed
2/21/2012	11:11:30 AM	SiCl4 pre valve closed
2/21/2012	11:11:30 AM	SiCl4 post valve closed
2/21/2012	11:11:30 AM	Bypass valve closed
2/21/2012	11:11:30 AM	Bubbler valve closed
2/21/2012	11:11:30 AM	Main Vac valve opened
2/21/2012	11:11:30 AM	Helium MFC set to  0.000000
2/21/2012	11:11:30 AM	H2 MFC set to  0.000000
2/21/2012	11:11:30 AM	BCl3 MFC set to  0.000000
2/21/2012	11:11:30 AM	PH3 MFC set to  0.000000
2/21/2012	11:11:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:11:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:11:30 AM	Tube furnace set to 200
2/21/2012	11:12:00 AM	H2 valve closed
2/21/2012	11:12:00 AM	BCl3 valve closed
2/21/2012	11:12:00 AM	PH3 valve closed
2/21/2012	11:12:00 AM	SiCl4 pre valve closed
2/21/2012	11:12:00 AM	SiCl4 post valve closed
2/21/2012	11:12:00 AM	Bypass valve closed
2/21/2012	11:12:00 AM	Bubbler valve closed
2/21/2012	11:12:00 AM	Helium valve opened
2/21/2012	11:12:00 AM	Main Vac valve opened
2/21/2012	11:12:00 AM	Helium MFC set to  20.000000
2/21/2012	11:12:00 AM	H2 MFC set to  0.000000
2/21/2012	11:12:00 AM	BCl3 MFC set to  0.000000
2/21/2012	11:12:00 AM	PH3 MFC set to  0.000000
2/21/2012	11:12:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:12:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:12:00 AM	Tube furnace set to 200
2/21/2012	11:12:30 AM	Helium valve closed
2/21/2012	11:12:30 AM	H2 valve closed
2/21/2012	11:12:30 AM	BCl3 valve closed
2/21/2012	11:12:30 AM	PH3 valve closed
2/21/2012	11:12:30 AM	SiCl4 pre valve closed
2/21/2012	11:12:30 AM	SiCl4 post valve closed
2/21/2012	11:12:30 AM	Bypass valve closed
2/21/2012	11:12:30 AM	Bubbler valve closed
2/21/2012	11:12:30 AM	Main Vac valve opened
2/21/2012	11:12:30 AM	Helium MFC set to  0.000000
2/21/2012	11:12:30 AM	H2 MFC set to  0.000000
2/21/2012	11:12:30 AM	BCl3 MFC set to  0.000000
2/21/2012	11:12:30 AM	PH3 MFC set to  0.000000
2/21/2012	11:12:30 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:12:30 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:12:30 AM	Tube furnace set to 200
2/21/2012	11:13:00 AM	H2 valve closed
2/21/2012	11:13:00 AM	BCl3 valve closed
2/21/2012	11:13:00 AM	PH3 valve closed
2/21/2012	11:13:00 AM	SiCl4 pre valve closed
2/21/2012	11:13:00 AM	SiCl4 post valve closed
2/21/2012	11:13:00 AM	Bypass valve closed
2/21/2012	11:13:00 AM	Bubbler valve closed
2/21/2012	11:13:00 AM	Helium valve opened
2/21/2012	11:13:00 AM	Main Vac valve opened
2/21/2012	11:13:00 AM	Helium MFC set to  20.000000
2/21/2012	11:13:00 AM	H2 MFC set to  0.000000
2/21/2012	11:13:00 AM	BCl3 MFC set to  0.000000
2/21/2012	11:13:00 AM	PH3 MFC set to  0.000000
2/21/2012	11:13:00 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:13:00 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:13:00 AM	Tube furnace set to 200
2/21/2012	11:13:30 AM	Helium valve closed
2/21/2012	11:13:30 AM	H2 valve closed
2/21/2012	11:13:31 AM	BCl3 valve closed
2/21/2012	11:13:31 AM	PH3 valve closed
2/21/2012	11:13:31 AM	SiCl4 pre valve closed
2/21/2012	11:13:31 AM	SiCl4 post valve closed
2/21/2012	11:13:31 AM	Bypass valve closed
2/21/2012	11:13:31 AM	Bubbler valve closed
2/21/2012	11:13:31 AM	Main Vac valve opened
2/21/2012	11:13:31 AM	Helium MFC set to  0.000000
2/21/2012	11:13:31 AM	H2 MFC set to  0.000000
2/21/2012	11:13:31 AM	BCl3 MFC set to  0.000000
2/21/2012	11:13:31 AM	PH3 MFC set to  0.000000
2/21/2012	11:13:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:13:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:13:31 AM	Tube furnace set to 200
2/21/2012	11:14:01 AM	H2 valve closed
2/21/2012	11:14:01 AM	BCl3 valve closed
2/21/2012	11:14:01 AM	PH3 valve closed
2/21/2012	11:14:01 AM	SiCl4 pre valve closed
2/21/2012	11:14:01 AM	SiCl4 post valve closed
2/21/2012	11:14:01 AM	Bypass valve closed
2/21/2012	11:14:01 AM	Bubbler valve closed
2/21/2012	11:14:01 AM	Helium valve opened
2/21/2012	11:14:01 AM	Main Vac valve opened
2/21/2012	11:14:01 AM	Helium MFC set to  20.000000
2/21/2012	11:14:01 AM	H2 MFC set to  0.000000
2/21/2012	11:14:01 AM	BCl3 MFC set to  0.000000
2/21/2012	11:14:01 AM	PH3 MFC set to  0.000000
2/21/2012	11:14:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:14:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:14:01 AM	Tube furnace set to 200
2/21/2012	11:14:31 AM	Helium valve closed
2/21/2012	11:14:31 AM	H2 valve closed
2/21/2012	11:14:31 AM	BCl3 valve closed
2/21/2012	11:14:31 AM	PH3 valve closed
2/21/2012	11:14:31 AM	SiCl4 pre valve closed
2/21/2012	11:14:31 AM	SiCl4 post valve closed
2/21/2012	11:14:31 AM	Bypass valve closed
2/21/2012	11:14:31 AM	Bubbler valve closed
2/21/2012	11:14:31 AM	Main Vac valve opened
2/21/2012	11:14:31 AM	Helium MFC set to  0.000000
2/21/2012	11:14:31 AM	H2 MFC set to  0.000000
2/21/2012	11:14:31 AM	BCl3 MFC set to  0.000000
2/21/2012	11:14:31 AM	PH3 MFC set to  0.000000
2/21/2012	11:14:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:14:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:14:31 AM	Tube furnace set to 200
2/21/2012	11:15:01 AM	H2 valve closed
2/21/2012	11:15:01 AM	BCl3 valve closed
2/21/2012	11:15:01 AM	PH3 valve closed
2/21/2012	11:15:01 AM	SiCl4 pre valve closed
2/21/2012	11:15:01 AM	SiCl4 post valve closed
2/21/2012	11:15:01 AM	Bypass valve closed
2/21/2012	11:15:01 AM	Bubbler valve closed
2/21/2012	11:15:01 AM	Helium valve opened
2/21/2012	11:15:01 AM	Main Vac valve opened
2/21/2012	11:15:01 AM	Helium MFC set to  20.000000
2/21/2012	11:15:01 AM	H2 MFC set to  0.000000
2/21/2012	11:15:01 AM	BCl3 MFC set to  0.000000
2/21/2012	11:15:01 AM	PH3 MFC set to  0.000000
2/21/2012	11:15:01 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:15:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:15:01 AM	Tube furnace set to 200
2/21/2012	11:15:31 AM	Helium valve closed
2/21/2012	11:15:31 AM	H2 valve closed
2/21/2012	11:15:31 AM	BCl3 valve closed
2/21/2012	11:15:31 AM	PH3 valve closed
2/21/2012	11:15:31 AM	SiCl4 pre valve closed
2/21/2012	11:15:31 AM	SiCl4 post valve closed
2/21/2012	11:15:31 AM	Bypass valve closed
2/21/2012	11:15:31 AM	Bubbler valve closed
2/21/2012	11:15:31 AM	Main Vac valve opened
2/21/2012	11:15:31 AM	Helium MFC set to  0.000000
2/21/2012	11:15:31 AM	H2 MFC set to  0.000000
2/21/2012	11:15:31 AM	BCl3 MFC set to  0.000000
2/21/2012	11:15:31 AM	PH3 MFC set to  0.000000
2/21/2012	11:15:31 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:15:31 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:15:32 AM	Tube furnace set to 0
2/21/2012	11:15:33 AM	Run finished at 11:15 AM
2/21/2012	11:48:25 AM	Main Vac valve closed
2/21/2012	11:48:35 AM	Main Vac valve opened
2/21/2012	11:48:45 AM	Recipe started at 11:48 AM
2/21/2012	11:48:45 AM	Helium valve closed
2/21/2012	11:48:45 AM	BCl3 valve closed
2/21/2012	11:48:45 AM	PH3 valve closed
2/21/2012	11:48:45 AM	SiCl4 pre valve closed
2/21/2012	11:48:45 AM	SiCl4 post valve closed
2/21/2012	11:48:45 AM	Main Vac valve closed
2/21/2012	11:48:45 AM	Bypass valve closed
2/21/2012	11:48:45 AM	Bubbler valve closed
2/21/2012	11:48:45 AM	H2 valve opened
2/21/2012	11:48:45 AM	Helium MFC set to  0.000000
2/21/2012	11:48:45 AM	H2 MFC set to  0.000000
2/21/2012	11:48:45 AM	BCl3 MFC set to  0.000000
2/21/2012	11:48:45 AM	PH3 MFC set to  0.000000
2/21/2012	11:48:45 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:48:45 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:48:45 AM	Tube furnace set to 0
2/21/2012	11:48:48 AM	Helium valve closed
2/21/2012	11:48:48 AM	BCl3 valve closed
2/21/2012	11:48:48 AM	PH3 valve closed
2/21/2012	11:48:48 AM	SiCl4 pre valve closed
2/21/2012	11:48:48 AM	SiCl4 post valve closed
2/21/2012	11:48:48 AM	Main Vac valve closed
2/21/2012	11:48:48 AM	Bypass valve closed
2/21/2012	11:48:48 AM	Bubbler valve closed
2/21/2012	11:48:48 AM	H2 valve opened
2/21/2012	11:48:48 AM	Helium MFC set to  0.000000
2/21/2012	11:48:48 AM	H2 MFC set to  500.000000
2/21/2012	11:48:48 AM	BCl3 MFC set to  0.000000
2/21/2012	11:48:48 AM	PH3 MFC set to  0.000000
2/21/2012	11:48:48 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:48:48 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:48:48 AM	Tube furnace set to 0
2/21/2012	11:49:53 AM	Helium valve closed
2/21/2012	11:49:53 AM	BCl3 valve closed
2/21/2012	11:49:53 AM	PH3 valve closed
2/21/2012	11:49:53 AM	SiCl4 pre valve closed
2/21/2012	11:49:53 AM	SiCl4 post valve closed
2/21/2012	11:49:53 AM	Main Vac valve closed
2/21/2012	11:49:53 AM	Bypass valve closed
2/21/2012	11:49:53 AM	H2 valve opened
2/21/2012	11:49:53 AM	Bubbler valve opened
2/21/2012	11:49:53 AM	Helium MFC set to  0.000000
2/21/2012	11:49:53 AM	H2 MFC set to  500.000000
2/21/2012	11:49:53 AM	BCl3 MFC set to  0.000000
2/21/2012	11:49:53 AM	PH3 MFC set to  0.000000
2/21/2012	11:49:53 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:49:53 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:49:53 AM	Tube furnace set to 0
2/21/2012	11:49:54 AM	Helium valve closed
2/21/2012	11:49:54 AM	BCl3 valve closed
2/21/2012	11:49:54 AM	PH3 valve closed
2/21/2012	11:49:54 AM	SiCl4 pre valve closed
2/21/2012	11:49:54 AM	SiCl4 post valve closed
2/21/2012	11:49:54 AM	Main Vac valve closed
2/21/2012	11:49:54 AM	Bypass valve closed
2/21/2012	11:49:54 AM	H2 valve opened
2/21/2012	11:49:54 AM	Bubbler valve opened
2/21/2012	11:49:54 AM	Helium MFC set to  0.000000
2/21/2012	11:49:54 AM	H2 MFC set to  500.000000
2/21/2012	11:49:54 AM	BCl3 MFC set to  0.000000
2/21/2012	11:49:54 AM	PH3 MFC set to  0.000000
2/21/2012	11:49:54 AM	SiCl4 MFC set to  0.000000
2/21/2012	11:49:54 AM	Bypass solenoid MFC set to  0.000000
2/21/2012	11:49:54 AM	Tube furnace set to 1000
2/21/2012	12:09:54 PM	Helium valve closed
2/21/2012	12:09:54 PM	PH3 valve closed
2/21/2012	12:09:54 PM	Main Vac valve closed
2/21/2012	12:09:54 PM	Bypass valve closed
2/21/2012	12:09:54 PM	H2 valve opened
2/21/2012	12:09:54 PM	BCl3 valve opened
2/21/2012	12:09:54 PM	SiCl4 pre valve opened
2/21/2012	12:09:54 PM	SiCl4 post valve opened
2/21/2012	12:09:54 PM	Bubbler valve opened
2/21/2012	12:09:54 PM	Helium MFC set to  0.000000
2/21/2012	12:09:54 PM	H2 MFC set to  450.000000
2/21/2012	12:09:54 PM	BCl3 MFC set to  1.500000
2/21/2012	12:09:54 PM	PH3 MFC set to  0.000000
2/21/2012	12:09:54 PM	SiCl4 MFC set to  50.000000
2/21/2012	12:09:54 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:09:55 PM	Tube furnace set to 1000
2/21/2012	12:29:55 PM	Helium valve closed
2/21/2012	12:29:55 PM	BCl3 valve closed
2/21/2012	12:29:55 PM	PH3 valve closed
2/21/2012	12:29:55 PM	SiCl4 pre valve closed
2/21/2012	12:29:55 PM	SiCl4 post valve closed
2/21/2012	12:29:55 PM	Main Vac valve closed
2/21/2012	12:29:55 PM	Bypass valve closed
2/21/2012	12:29:55 PM	H2 valve opened
2/21/2012	12:29:55 PM	Bubbler valve opened
2/21/2012	12:29:55 PM	Helium MFC set to  0.000000
2/21/2012	12:29:55 PM	H2 MFC set to  500.000000
2/21/2012	12:29:55 PM	BCl3 MFC set to  0.000000
2/21/2012	12:29:55 PM	PH3 MFC set to  0.000000
2/21/2012	12:29:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:29:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:29:55 PM	Tube furnace set to 950
2/21/2012	12:31:55 PM	Helium valve closed
2/21/2012	12:31:55 PM	BCl3 valve closed
2/21/2012	12:31:55 PM	PH3 valve closed
2/21/2012	12:31:55 PM	SiCl4 pre valve closed
2/21/2012	12:31:55 PM	SiCl4 post valve closed
2/21/2012	12:31:55 PM	Main Vac valve closed
2/21/2012	12:31:55 PM	Bypass valve closed
2/21/2012	12:31:55 PM	H2 valve opened
2/21/2012	12:31:55 PM	Bubbler valve opened
2/21/2012	12:31:55 PM	Helium MFC set to  0.000000
2/21/2012	12:31:55 PM	H2 MFC set to  500.000000
2/21/2012	12:31:55 PM	BCl3 MFC set to  0.000000
2/21/2012	12:31:55 PM	PH3 MFC set to  0.000000
2/21/2012	12:31:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:31:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:31:55 PM	Tube furnace set to 900
2/21/2012	12:33:55 PM	Helium valve closed
2/21/2012	12:33:55 PM	BCl3 valve closed
2/21/2012	12:33:55 PM	PH3 valve closed
2/21/2012	12:33:55 PM	SiCl4 pre valve closed
2/21/2012	12:33:55 PM	SiCl4 post valve closed
2/21/2012	12:33:55 PM	Main Vac valve closed
2/21/2012	12:33:55 PM	Bypass valve closed
2/21/2012	12:33:55 PM	H2 valve opened
2/21/2012	12:33:55 PM	Bubbler valve opened
2/21/2012	12:33:55 PM	Helium MFC set to  0.000000
2/21/2012	12:33:55 PM	H2 MFC set to  500.000000
2/21/2012	12:33:55 PM	BCl3 MFC set to  0.000000
2/21/2012	12:33:55 PM	PH3 MFC set to  0.000000
2/21/2012	12:33:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:33:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:33:55 PM	Tube furnace set to 850
2/21/2012	12:35:55 PM	H2 valve closed
2/21/2012	12:35:55 PM	BCl3 valve closed
2/21/2012	12:35:55 PM	PH3 valve closed
2/21/2012	12:35:55 PM	SiCl4 pre valve closed
2/21/2012	12:35:55 PM	SiCl4 post valve closed
2/21/2012	12:35:55 PM	Main Vac valve closed
2/21/2012	12:35:55 PM	Bypass valve closed
2/21/2012	12:35:55 PM	Helium valve opened
2/21/2012	12:35:55 PM	Bubbler valve opened
2/21/2012	12:35:55 PM	Helium MFC set to  500.000000
2/21/2012	12:35:55 PM	H2 MFC set to  0.000000
2/21/2012	12:35:55 PM	BCl3 MFC set to  0.000000
2/21/2012	12:35:55 PM	PH3 MFC set to  0.000000
2/21/2012	12:35:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:35:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:35:55 PM	Tube furnace set to 800
2/21/2012	12:37:55 PM	H2 valve closed
2/21/2012	12:37:55 PM	BCl3 valve closed
2/21/2012	12:37:55 PM	PH3 valve closed
2/21/2012	12:37:55 PM	SiCl4 pre valve closed
2/21/2012	12:37:55 PM	SiCl4 post valve closed
2/21/2012	12:37:55 PM	Main Vac valve closed
2/21/2012	12:37:55 PM	Bypass valve closed
2/21/2012	12:37:55 PM	Helium valve opened
2/21/2012	12:37:55 PM	Bubbler valve opened
2/21/2012	12:37:55 PM	Helium MFC set to  500.000000
2/21/2012	12:37:55 PM	H2 MFC set to  0.000000
2/21/2012	12:37:55 PM	BCl3 MFC set to  0.000000
2/21/2012	12:37:55 PM	PH3 MFC set to  0.000000
2/21/2012	12:37:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:37:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:37:56 PM	Tube furnace set to 750
2/21/2012	12:39:56 PM	H2 valve closed
2/21/2012	12:39:56 PM	BCl3 valve closed
2/21/2012	12:39:56 PM	PH3 valve closed
2/21/2012	12:39:56 PM	SiCl4 pre valve closed
2/21/2012	12:39:56 PM	SiCl4 post valve closed
2/21/2012	12:39:56 PM	Main Vac valve closed
2/21/2012	12:39:56 PM	Bypass valve closed
2/21/2012	12:39:56 PM	Helium valve opened
2/21/2012	12:39:56 PM	Bubbler valve opened
2/21/2012	12:39:56 PM	Helium MFC set to  500.000000
2/21/2012	12:39:56 PM	H2 MFC set to  0.000000
2/21/2012	12:39:56 PM	BCl3 MFC set to  0.000000
2/21/2012	12:39:56 PM	PH3 MFC set to  0.000000
2/21/2012	12:39:56 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:39:56 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:39:56 PM	Tube furnace set to 0
2/21/2012	12:59:56 PM	Helium valve closed
2/21/2012	12:59:56 PM	H2 valve closed
2/21/2012	12:59:56 PM	BCl3 valve closed
2/21/2012	12:59:56 PM	PH3 valve closed
2/21/2012	12:59:56 PM	SiCl4 pre valve closed
2/21/2012	12:59:56 PM	SiCl4 post valve closed
2/21/2012	12:59:56 PM	Main Vac valve closed
2/21/2012	12:59:56 PM	Bypass valve closed
2/21/2012	12:59:56 PM	Bubbler valve closed
2/21/2012	12:59:56 PM	Helium MFC set to  0.000000
2/21/2012	12:59:56 PM	H2 MFC set to  0.000000
2/21/2012	12:59:56 PM	BCl3 MFC set to  0.000000
2/21/2012	12:59:56 PM	PH3 MFC set to  0.000000
2/21/2012	12:59:56 PM	SiCl4 MFC set to  0.000000
2/21/2012	12:59:56 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	12:59:56 PM	Tube furnace set to 0
2/21/2012	12:59:57 PM	Run finished at 12:59 PM
2/21/2012	1:33:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	1:33:37 PM	Recipe started at 1:33 PM
2/21/2012	1:33:37 PM	Helium valve closed
2/21/2012	1:33:37 PM	H2 valve closed
2/21/2012	1:33:37 PM	BCl3 valve closed
2/21/2012	1:33:37 PM	PH3 valve closed
2/21/2012	1:33:37 PM	SiCl4 pre valve closed
2/21/2012	1:33:37 PM	SiCl4 post valve closed
2/21/2012	1:33:37 PM	Main Vac valve closed
2/21/2012	1:33:37 PM	Bypass valve closed
2/21/2012	1:33:37 PM	Bubbler valve closed
2/21/2012	1:33:37 PM	Helium MFC set to  0.000000
2/21/2012	1:33:37 PM	H2 MFC set to  0.000000
2/21/2012	1:33:37 PM	BCl3 MFC set to  0.000000
2/21/2012	1:33:37 PM	PH3 MFC set to  0.000000
2/21/2012	1:33:37 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:33:37 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:33:37 PM	Tube furnace set to 0
2/21/2012	1:33:40 PM	H2 valve closed
2/21/2012	1:33:40 PM	BCl3 valve closed
2/21/2012	1:33:40 PM	PH3 valve closed
2/21/2012	1:33:40 PM	SiCl4 pre valve closed
2/21/2012	1:33:40 PM	SiCl4 post valve closed
2/21/2012	1:33:40 PM	Main Vac valve closed
2/21/2012	1:33:40 PM	Bypass valve closed
2/21/2012	1:33:40 PM	Bubbler valve closed
2/21/2012	1:33:40 PM	Helium valve opened
2/21/2012	1:33:40 PM	Helium MFC set to  500.000000
2/21/2012	1:33:40 PM	H2 MFC set to  0.000000
2/21/2012	1:33:40 PM	BCl3 MFC set to  0.000000
2/21/2012	1:33:40 PM	PH3 MFC set to  0.000000
2/21/2012	1:33:40 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:33:40 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:33:41 PM	Tube furnace set to 0
2/21/2012	1:33:45 PM	Helium valve closed
2/21/2012	1:33:45 PM	H2 valve closed
2/21/2012	1:33:45 PM	BCl3 valve closed
2/21/2012	1:33:45 PM	PH3 valve closed
2/21/2012	1:33:45 PM	SiCl4 pre valve closed
2/21/2012	1:33:45 PM	SiCl4 post valve closed
2/21/2012	1:33:45 PM	Main Vac valve closed
2/21/2012	1:33:45 PM	Bypass valve closed
2/21/2012	1:33:45 PM	Bubbler valve closed
2/21/2012	1:33:45 PM	Helium MFC set to  0.000000
2/21/2012	1:33:45 PM	H2 MFC set to  0.000000
2/21/2012	1:33:45 PM	BCl3 MFC set to  0.000000
2/21/2012	1:33:45 PM	PH3 MFC set to  0.000000
2/21/2012	1:33:45 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:33:45 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:33:45 PM	Tube furnace set to 0
2/21/2012	1:33:46 PM	Run finished at 1:33 PM
2/21/2012	1:33:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	1:35:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	1:35:50 PM	Recipe started at 1:35 PM
2/21/2012	1:35:50 PM	Helium valve closed
2/21/2012	1:35:50 PM	H2 valve closed
2/21/2012	1:35:50 PM	BCl3 valve closed
2/21/2012	1:35:50 PM	PH3 valve closed
2/21/2012	1:35:50 PM	SiCl4 pre valve closed
2/21/2012	1:35:50 PM	SiCl4 post valve closed
2/21/2012	1:35:50 PM	Main Vac valve closed
2/21/2012	1:35:50 PM	Bubbler valve closed
2/21/2012	1:35:50 PM	Bypass valve opened
2/21/2012	1:35:50 PM	Helium MFC set to  0.000000
2/21/2012	1:35:50 PM	H2 MFC set to  0.000000
2/21/2012	1:35:50 PM	BCl3 MFC set to  0.000000
2/21/2012	1:35:50 PM	PH3 MFC set to  0.000000
2/21/2012	1:35:50 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:35:50 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:35:50 PM	Tube furnace set to 0
2/21/2012	1:36:49 PM	Helium valve closed
2/21/2012	1:36:49 PM	H2 valve closed
2/21/2012	1:36:49 PM	BCl3 valve closed
2/21/2012	1:36:49 PM	PH3 valve closed
2/21/2012	1:36:49 PM	SiCl4 pre valve closed
2/21/2012	1:36:49 PM	SiCl4 post valve closed
2/21/2012	1:36:49 PM	Main Vac valve closed
2/21/2012	1:36:49 PM	Bubbler valve closed
2/21/2012	1:36:49 PM	Bypass valve opened
2/21/2012	1:36:49 PM	Helium MFC set to  0.000000
2/21/2012	1:36:49 PM	H2 MFC set to  0.000000
2/21/2012	1:36:49 PM	BCl3 MFC set to  0.000000
2/21/2012	1:36:49 PM	PH3 MFC set to  0.000000
2/21/2012	1:36:49 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:36:49 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:36:49 PM	Tube furnace set to 0
2/21/2012	1:37:49 PM	Helium valve closed
2/21/2012	1:37:49 PM	H2 valve closed
2/21/2012	1:37:49 PM	BCl3 valve closed
2/21/2012	1:37:49 PM	PH3 valve closed
2/21/2012	1:37:49 PM	SiCl4 pre valve closed
2/21/2012	1:37:49 PM	SiCl4 post valve closed
2/21/2012	1:37:49 PM	Bypass valve closed
2/21/2012	1:37:49 PM	Bubbler valve closed
2/21/2012	1:37:49 PM	Main Vac valve opened
2/21/2012	1:37:49 PM	Helium MFC set to  0.000000
2/21/2012	1:37:49 PM	H2 MFC set to  0.000000
2/21/2012	1:37:49 PM	BCl3 MFC set to  0.000000
2/21/2012	1:37:49 PM	PH3 MFC set to  0.000000
2/21/2012	1:37:49 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:37:49 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:37:49 PM	Tube furnace set to 0
2/21/2012	1:37:50 PM	Run finished at 1:37 PM
2/21/2012	1:37:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	1:41:57 PM	Recipe started at 1:41 PM
2/21/2012	1:41:57 PM	Helium valve closed
2/21/2012	1:41:57 PM	H2 valve closed
2/21/2012	1:41:57 PM	BCl3 valve closed
2/21/2012	1:41:57 PM	PH3 valve closed
2/21/2012	1:41:57 PM	SiCl4 pre valve closed
2/21/2012	1:41:57 PM	SiCl4 post valve closed
2/21/2012	1:41:57 PM	Bypass valve closed
2/21/2012	1:41:57 PM	Bubbler valve closed
2/21/2012	1:41:57 PM	Main Vac valve opened
2/21/2012	1:41:57 PM	Helium MFC set to  0.000000
2/21/2012	1:41:57 PM	H2 MFC set to  0.000000
2/21/2012	1:41:57 PM	BCl3 MFC set to  0.000000
2/21/2012	1:41:57 PM	PH3 MFC set to  0.000000
2/21/2012	1:41:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:41:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:41:57 PM	Tube furnace set to 0
2/21/2012	1:42:27 PM	H2 valve closed
2/21/2012	1:42:27 PM	BCl3 valve closed
2/21/2012	1:42:27 PM	PH3 valve closed
2/21/2012	1:42:27 PM	SiCl4 pre valve closed
2/21/2012	1:42:27 PM	SiCl4 post valve closed
2/21/2012	1:42:27 PM	Bypass valve closed
2/21/2012	1:42:27 PM	Bubbler valve closed
2/21/2012	1:42:27 PM	Helium valve opened
2/21/2012	1:42:27 PM	Main Vac valve opened
2/21/2012	1:42:27 PM	Helium MFC set to  20.000000
2/21/2012	1:42:27 PM	H2 MFC set to  0.000000
2/21/2012	1:42:27 PM	BCl3 MFC set to  0.000000
2/21/2012	1:42:27 PM	PH3 MFC set to  0.000000
2/21/2012	1:42:27 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:42:27 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:42:27 PM	Tube furnace set to 0
2/21/2012	1:42:57 PM	Helium valve closed
2/21/2012	1:42:57 PM	H2 valve closed
2/21/2012	1:42:57 PM	BCl3 valve closed
2/21/2012	1:42:57 PM	PH3 valve closed
2/21/2012	1:42:57 PM	SiCl4 pre valve closed
2/21/2012	1:42:57 PM	SiCl4 post valve closed
2/21/2012	1:42:57 PM	Bypass valve closed
2/21/2012	1:42:57 PM	Bubbler valve closed
2/21/2012	1:42:57 PM	Main Vac valve opened
2/21/2012	1:42:57 PM	Helium MFC set to  0.000000
2/21/2012	1:42:57 PM	H2 MFC set to  0.000000
2/21/2012	1:42:57 PM	BCl3 MFC set to  0.000000
2/21/2012	1:42:57 PM	PH3 MFC set to  0.000000
2/21/2012	1:42:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:42:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:42:58 PM	Tube furnace set to 0
2/21/2012	1:43:28 PM	H2 valve closed
2/21/2012	1:43:28 PM	BCl3 valve closed
2/21/2012	1:43:28 PM	PH3 valve closed
2/21/2012	1:43:28 PM	SiCl4 pre valve closed
2/21/2012	1:43:28 PM	SiCl4 post valve closed
2/21/2012	1:43:28 PM	Bypass valve closed
2/21/2012	1:43:28 PM	Bubbler valve closed
2/21/2012	1:43:28 PM	Helium valve opened
2/21/2012	1:43:28 PM	Main Vac valve opened
2/21/2012	1:43:28 PM	Helium MFC set to  20.000000
2/21/2012	1:43:28 PM	H2 MFC set to  0.000000
2/21/2012	1:43:28 PM	BCl3 MFC set to  0.000000
2/21/2012	1:43:28 PM	PH3 MFC set to  0.000000
2/21/2012	1:43:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:43:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:43:28 PM	Tube furnace set to 0
2/21/2012	1:43:58 PM	Helium valve closed
2/21/2012	1:43:58 PM	H2 valve closed
2/21/2012	1:43:58 PM	BCl3 valve closed
2/21/2012	1:43:58 PM	PH3 valve closed
2/21/2012	1:43:58 PM	SiCl4 pre valve closed
2/21/2012	1:43:58 PM	SiCl4 post valve closed
2/21/2012	1:43:58 PM	Bypass valve closed
2/21/2012	1:43:58 PM	Bubbler valve closed
2/21/2012	1:43:58 PM	Main Vac valve opened
2/21/2012	1:43:58 PM	Helium MFC set to  0.000000
2/21/2012	1:43:58 PM	H2 MFC set to  0.000000
2/21/2012	1:43:58 PM	BCl3 MFC set to  0.000000
2/21/2012	1:43:58 PM	PH3 MFC set to  0.000000
2/21/2012	1:43:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:43:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:43:58 PM	Tube furnace set to 0
2/21/2012	1:44:28 PM	H2 valve closed
2/21/2012	1:44:28 PM	BCl3 valve closed
2/21/2012	1:44:28 PM	PH3 valve closed
2/21/2012	1:44:28 PM	SiCl4 pre valve closed
2/21/2012	1:44:28 PM	SiCl4 post valve closed
2/21/2012	1:44:28 PM	Bypass valve closed
2/21/2012	1:44:28 PM	Bubbler valve closed
2/21/2012	1:44:28 PM	Helium valve opened
2/21/2012	1:44:28 PM	Main Vac valve opened
2/21/2012	1:44:28 PM	Helium MFC set to  20.000000
2/21/2012	1:44:28 PM	H2 MFC set to  0.000000
2/21/2012	1:44:28 PM	BCl3 MFC set to  0.000000
2/21/2012	1:44:28 PM	PH3 MFC set to  0.000000
2/21/2012	1:44:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:44:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:44:28 PM	Tube furnace set to 0
2/21/2012	1:44:58 PM	Helium valve closed
2/21/2012	1:44:58 PM	H2 valve closed
2/21/2012	1:44:58 PM	BCl3 valve closed
2/21/2012	1:44:58 PM	PH3 valve closed
2/21/2012	1:44:58 PM	SiCl4 pre valve closed
2/21/2012	1:44:58 PM	SiCl4 post valve closed
2/21/2012	1:44:58 PM	Bypass valve closed
2/21/2012	1:44:58 PM	Bubbler valve closed
2/21/2012	1:44:58 PM	Main Vac valve opened
2/21/2012	1:44:58 PM	Helium MFC set to  0.000000
2/21/2012	1:44:58 PM	H2 MFC set to  0.000000
2/21/2012	1:44:58 PM	BCl3 MFC set to  0.000000
2/21/2012	1:44:58 PM	PH3 MFC set to  0.000000
2/21/2012	1:44:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:44:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:44:58 PM	Tube furnace set to 0
2/21/2012	1:45:28 PM	H2 valve closed
2/21/2012	1:45:28 PM	BCl3 valve closed
2/21/2012	1:45:28 PM	PH3 valve closed
2/21/2012	1:45:28 PM	SiCl4 pre valve closed
2/21/2012	1:45:28 PM	SiCl4 post valve closed
2/21/2012	1:45:28 PM	Bypass valve closed
2/21/2012	1:45:28 PM	Bubbler valve closed
2/21/2012	1:45:28 PM	Helium valve opened
2/21/2012	1:45:28 PM	Main Vac valve opened
2/21/2012	1:45:28 PM	Helium MFC set to  20.000000
2/21/2012	1:45:28 PM	H2 MFC set to  0.000000
2/21/2012	1:45:28 PM	BCl3 MFC set to  0.000000
2/21/2012	1:45:28 PM	PH3 MFC set to  0.000000
2/21/2012	1:45:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:45:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:45:29 PM	Tube furnace set to 0
2/21/2012	1:45:59 PM	Helium valve closed
2/21/2012	1:45:59 PM	H2 valve closed
2/21/2012	1:45:59 PM	BCl3 valve closed
2/21/2012	1:45:59 PM	PH3 valve closed
2/21/2012	1:45:59 PM	SiCl4 pre valve closed
2/21/2012	1:45:59 PM	SiCl4 post valve closed
2/21/2012	1:45:59 PM	Bypass valve closed
2/21/2012	1:45:59 PM	Bubbler valve closed
2/21/2012	1:45:59 PM	Main Vac valve opened
2/21/2012	1:45:59 PM	Helium MFC set to  0.000000
2/21/2012	1:45:59 PM	H2 MFC set to  0.000000
2/21/2012	1:45:59 PM	BCl3 MFC set to  0.000000
2/21/2012	1:45:59 PM	PH3 MFC set to  0.000000
2/21/2012	1:45:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:45:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:45:59 PM	Tube furnace set to 0
2/21/2012	1:46:29 PM	H2 valve closed
2/21/2012	1:46:29 PM	BCl3 valve closed
2/21/2012	1:46:29 PM	PH3 valve closed
2/21/2012	1:46:29 PM	SiCl4 pre valve closed
2/21/2012	1:46:29 PM	SiCl4 post valve closed
2/21/2012	1:46:29 PM	Bypass valve closed
2/21/2012	1:46:29 PM	Bubbler valve closed
2/21/2012	1:46:29 PM	Helium valve opened
2/21/2012	1:46:29 PM	Main Vac valve opened
2/21/2012	1:46:29 PM	Helium MFC set to  20.000000
2/21/2012	1:46:29 PM	H2 MFC set to  0.000000
2/21/2012	1:46:29 PM	BCl3 MFC set to  0.000000
2/21/2012	1:46:29 PM	PH3 MFC set to  0.000000
2/21/2012	1:46:29 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:46:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:46:29 PM	Tube furnace set to 0
2/21/2012	1:46:59 PM	Helium valve closed
2/21/2012	1:46:59 PM	H2 valve closed
2/21/2012	1:46:59 PM	BCl3 valve closed
2/21/2012	1:46:59 PM	PH3 valve closed
2/21/2012	1:46:59 PM	SiCl4 pre valve closed
2/21/2012	1:46:59 PM	SiCl4 post valve closed
2/21/2012	1:46:59 PM	Bypass valve closed
2/21/2012	1:46:59 PM	Bubbler valve closed
2/21/2012	1:46:59 PM	Main Vac valve opened
2/21/2012	1:46:59 PM	Helium MFC set to  0.000000
2/21/2012	1:46:59 PM	H2 MFC set to  0.000000
2/21/2012	1:46:59 PM	BCl3 MFC set to  0.000000
2/21/2012	1:46:59 PM	PH3 MFC set to  0.000000
2/21/2012	1:46:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:46:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:46:59 PM	Tube furnace set to 0
2/21/2012	1:47:29 PM	H2 valve closed
2/21/2012	1:47:29 PM	BCl3 valve closed
2/21/2012	1:47:29 PM	PH3 valve closed
2/21/2012	1:47:29 PM	SiCl4 pre valve closed
2/21/2012	1:47:29 PM	SiCl4 post valve closed
2/21/2012	1:47:29 PM	Bypass valve closed
2/21/2012	1:47:29 PM	Bubbler valve closed
2/21/2012	1:47:29 PM	Helium valve opened
2/21/2012	1:47:29 PM	Main Vac valve opened
2/21/2012	1:47:29 PM	Helium MFC set to  20.000000
2/21/2012	1:47:29 PM	H2 MFC set to  0.000000
2/21/2012	1:47:29 PM	BCl3 MFC set to  0.000000
2/21/2012	1:47:29 PM	PH3 MFC set to  0.000000
2/21/2012	1:47:29 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:47:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:47:29 PM	Tube furnace set to 0
2/21/2012	1:47:59 PM	Helium valve closed
2/21/2012	1:47:59 PM	H2 valve closed
2/21/2012	1:47:59 PM	BCl3 valve closed
2/21/2012	1:47:59 PM	PH3 valve closed
2/21/2012	1:47:59 PM	SiCl4 pre valve closed
2/21/2012	1:47:59 PM	SiCl4 post valve closed
2/21/2012	1:47:59 PM	Bypass valve closed
2/21/2012	1:47:59 PM	Bubbler valve closed
2/21/2012	1:47:59 PM	Main Vac valve opened
2/21/2012	1:47:59 PM	Helium MFC set to  0.000000
2/21/2012	1:48:00 PM	H2 MFC set to  0.000000
2/21/2012	1:48:00 PM	BCl3 MFC set to  0.000000
2/21/2012	1:48:00 PM	PH3 MFC set to  0.000000
2/21/2012	1:48:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:48:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:48:00 PM	Tube furnace set to 0
2/21/2012	1:48:30 PM	H2 valve closed
2/21/2012	1:48:30 PM	BCl3 valve closed
2/21/2012	1:48:30 PM	PH3 valve closed
2/21/2012	1:48:30 PM	SiCl4 pre valve closed
2/21/2012	1:48:30 PM	SiCl4 post valve closed
2/21/2012	1:48:30 PM	Bypass valve closed
2/21/2012	1:48:30 PM	Bubbler valve closed
2/21/2012	1:48:30 PM	Helium valve opened
2/21/2012	1:48:30 PM	Main Vac valve opened
2/21/2012	1:48:30 PM	Helium MFC set to  20.000000
2/21/2012	1:48:30 PM	H2 MFC set to  0.000000
2/21/2012	1:48:30 PM	BCl3 MFC set to  0.000000
2/21/2012	1:48:30 PM	PH3 MFC set to  0.000000
2/21/2012	1:48:30 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:48:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:48:30 PM	Tube furnace set to 0
2/21/2012	1:49:00 PM	Helium valve closed
2/21/2012	1:49:00 PM	H2 valve closed
2/21/2012	1:49:00 PM	BCl3 valve closed
2/21/2012	1:49:00 PM	PH3 valve closed
2/21/2012	1:49:00 PM	SiCl4 pre valve closed
2/21/2012	1:49:00 PM	SiCl4 post valve closed
2/21/2012	1:49:00 PM	Bypass valve closed
2/21/2012	1:49:00 PM	Bubbler valve closed
2/21/2012	1:49:00 PM	Main Vac valve opened
2/21/2012	1:49:00 PM	Helium MFC set to  0.000000
2/21/2012	1:49:00 PM	H2 MFC set to  0.000000
2/21/2012	1:49:00 PM	BCl3 MFC set to  0.000000
2/21/2012	1:49:00 PM	PH3 MFC set to  0.000000
2/21/2012	1:49:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:49:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:49:00 PM	Tube furnace set to 0
2/21/2012	1:49:30 PM	H2 valve closed
2/21/2012	1:49:30 PM	BCl3 valve closed
2/21/2012	1:49:30 PM	PH3 valve closed
2/21/2012	1:49:30 PM	SiCl4 pre valve closed
2/21/2012	1:49:30 PM	SiCl4 post valve closed
2/21/2012	1:49:30 PM	Bypass valve closed
2/21/2012	1:49:30 PM	Bubbler valve closed
2/21/2012	1:49:30 PM	Helium valve opened
2/21/2012	1:49:30 PM	Main Vac valve opened
2/21/2012	1:49:30 PM	Helium MFC set to  20.000000
2/21/2012	1:49:30 PM	H2 MFC set to  0.000000
2/21/2012	1:49:30 PM	BCl3 MFC set to  0.000000
2/21/2012	1:49:30 PM	PH3 MFC set to  0.000000
2/21/2012	1:49:30 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:49:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:49:30 PM	Tube furnace set to 0
2/21/2012	1:50:00 PM	Helium valve closed
2/21/2012	1:50:00 PM	H2 valve closed
2/21/2012	1:50:00 PM	BCl3 valve closed
2/21/2012	1:50:00 PM	PH3 valve closed
2/21/2012	1:50:00 PM	SiCl4 pre valve closed
2/21/2012	1:50:00 PM	SiCl4 post valve closed
2/21/2012	1:50:00 PM	Bypass valve closed
2/21/2012	1:50:00 PM	Bubbler valve closed
2/21/2012	1:50:00 PM	Main Vac valve opened
2/21/2012	1:50:00 PM	Helium MFC set to  0.000000
2/21/2012	1:50:00 PM	H2 MFC set to  0.000000
2/21/2012	1:50:00 PM	BCl3 MFC set to  0.000000
2/21/2012	1:50:00 PM	PH3 MFC set to  0.000000
2/21/2012	1:50:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:50:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:50:00 PM	Tube furnace set to 0
2/21/2012	1:50:31 PM	H2 valve closed
2/21/2012	1:50:31 PM	BCl3 valve closed
2/21/2012	1:50:31 PM	PH3 valve closed
2/21/2012	1:50:31 PM	SiCl4 pre valve closed
2/21/2012	1:50:31 PM	SiCl4 post valve closed
2/21/2012	1:50:31 PM	Bypass valve closed
2/21/2012	1:50:31 PM	Bubbler valve closed
2/21/2012	1:50:31 PM	Helium valve opened
2/21/2012	1:50:31 PM	Main Vac valve opened
2/21/2012	1:50:31 PM	Helium MFC set to  20.000000
2/21/2012	1:50:31 PM	H2 MFC set to  0.000000
2/21/2012	1:50:31 PM	BCl3 MFC set to  0.000000
2/21/2012	1:50:31 PM	PH3 MFC set to  0.000000
2/21/2012	1:50:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:50:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:50:31 PM	Tube furnace set to 0
2/21/2012	1:51:01 PM	Helium valve closed
2/21/2012	1:51:01 PM	H2 valve closed
2/21/2012	1:51:01 PM	BCl3 valve closed
2/21/2012	1:51:01 PM	PH3 valve closed
2/21/2012	1:51:01 PM	SiCl4 pre valve closed
2/21/2012	1:51:01 PM	SiCl4 post valve closed
2/21/2012	1:51:01 PM	Bypass valve closed
2/21/2012	1:51:01 PM	Bubbler valve closed
2/21/2012	1:51:01 PM	Main Vac valve opened
2/21/2012	1:51:01 PM	Helium MFC set to  0.000000
2/21/2012	1:51:01 PM	H2 MFC set to  0.000000
2/21/2012	1:51:01 PM	BCl3 MFC set to  0.000000
2/21/2012	1:51:01 PM	PH3 MFC set to  0.000000
2/21/2012	1:51:01 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:51:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:51:01 PM	Tube furnace set to 200
2/21/2012	1:51:31 PM	H2 valve closed
2/21/2012	1:51:31 PM	BCl3 valve closed
2/21/2012	1:51:31 PM	PH3 valve closed
2/21/2012	1:51:31 PM	SiCl4 pre valve closed
2/21/2012	1:51:31 PM	SiCl4 post valve closed
2/21/2012	1:51:31 PM	Bypass valve closed
2/21/2012	1:51:31 PM	Bubbler valve closed
2/21/2012	1:51:31 PM	Helium valve opened
2/21/2012	1:51:31 PM	Main Vac valve opened
2/21/2012	1:51:31 PM	Helium MFC set to  20.000000
2/21/2012	1:51:31 PM	H2 MFC set to  0.000000
2/21/2012	1:51:31 PM	BCl3 MFC set to  0.000000
2/21/2012	1:51:31 PM	PH3 MFC set to  0.000000
2/21/2012	1:51:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:51:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:51:31 PM	Tube furnace set to 200
2/21/2012	1:52:01 PM	Helium valve closed
2/21/2012	1:52:01 PM	H2 valve closed
2/21/2012	1:52:01 PM	BCl3 valve closed
2/21/2012	1:52:01 PM	PH3 valve closed
2/21/2012	1:52:01 PM	SiCl4 pre valve closed
2/21/2012	1:52:01 PM	SiCl4 post valve closed
2/21/2012	1:52:01 PM	Bypass valve closed
2/21/2012	1:52:01 PM	Bubbler valve closed
2/21/2012	1:52:01 PM	Main Vac valve opened
2/21/2012	1:52:01 PM	Helium MFC set to  0.000000
2/21/2012	1:52:01 PM	H2 MFC set to  0.000000
2/21/2012	1:52:01 PM	BCl3 MFC set to  0.000000
2/21/2012	1:52:01 PM	PH3 MFC set to  0.000000
2/21/2012	1:52:01 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:52:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:52:01 PM	Tube furnace set to 200
2/21/2012	1:52:31 PM	H2 valve closed
2/21/2012	1:52:31 PM	BCl3 valve closed
2/21/2012	1:52:31 PM	PH3 valve closed
2/21/2012	1:52:31 PM	SiCl4 pre valve closed
2/21/2012	1:52:31 PM	SiCl4 post valve closed
2/21/2012	1:52:31 PM	Bypass valve closed
2/21/2012	1:52:31 PM	Bubbler valve closed
2/21/2012	1:52:31 PM	Helium valve opened
2/21/2012	1:52:31 PM	Main Vac valve opened
2/21/2012	1:52:31 PM	Helium MFC set to  20.000000
2/21/2012	1:52:31 PM	H2 MFC set to  0.000000
2/21/2012	1:52:31 PM	BCl3 MFC set to  0.000000
2/21/2012	1:52:31 PM	PH3 MFC set to  0.000000
2/21/2012	1:52:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:52:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:52:32 PM	Tube furnace set to 200
2/21/2012	1:53:02 PM	Helium valve closed
2/21/2012	1:53:02 PM	H2 valve closed
2/21/2012	1:53:02 PM	BCl3 valve closed
2/21/2012	1:53:02 PM	PH3 valve closed
2/21/2012	1:53:02 PM	SiCl4 pre valve closed
2/21/2012	1:53:02 PM	SiCl4 post valve closed
2/21/2012	1:53:02 PM	Bypass valve closed
2/21/2012	1:53:02 PM	Bubbler valve closed
2/21/2012	1:53:02 PM	Main Vac valve opened
2/21/2012	1:53:02 PM	Helium MFC set to  0.000000
2/21/2012	1:53:02 PM	H2 MFC set to  0.000000
2/21/2012	1:53:02 PM	BCl3 MFC set to  0.000000
2/21/2012	1:53:02 PM	PH3 MFC set to  0.000000
2/21/2012	1:53:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:53:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:53:02 PM	Tube furnace set to 200
2/21/2012	1:53:32 PM	H2 valve closed
2/21/2012	1:53:32 PM	BCl3 valve closed
2/21/2012	1:53:32 PM	PH3 valve closed
2/21/2012	1:53:32 PM	SiCl4 pre valve closed
2/21/2012	1:53:32 PM	SiCl4 post valve closed
2/21/2012	1:53:32 PM	Bypass valve closed
2/21/2012	1:53:32 PM	Bubbler valve closed
2/21/2012	1:53:32 PM	Helium valve opened
2/21/2012	1:53:32 PM	Main Vac valve opened
2/21/2012	1:53:32 PM	Helium MFC set to  20.000000
2/21/2012	1:53:32 PM	H2 MFC set to  0.000000
2/21/2012	1:53:32 PM	BCl3 MFC set to  0.000000
2/21/2012	1:53:32 PM	PH3 MFC set to  0.000000
2/21/2012	1:53:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:53:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:53:32 PM	Tube furnace set to 200
2/21/2012	1:54:02 PM	Helium valve closed
2/21/2012	1:54:02 PM	H2 valve closed
2/21/2012	1:54:02 PM	BCl3 valve closed
2/21/2012	1:54:02 PM	PH3 valve closed
2/21/2012	1:54:02 PM	SiCl4 pre valve closed
2/21/2012	1:54:02 PM	SiCl4 post valve closed
2/21/2012	1:54:02 PM	Bypass valve closed
2/21/2012	1:54:02 PM	Bubbler valve closed
2/21/2012	1:54:02 PM	Main Vac valve opened
2/21/2012	1:54:02 PM	Helium MFC set to  0.000000
2/21/2012	1:54:02 PM	H2 MFC set to  0.000000
2/21/2012	1:54:02 PM	BCl3 MFC set to  0.000000
2/21/2012	1:54:02 PM	PH3 MFC set to  0.000000
2/21/2012	1:54:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:54:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:54:02 PM	Tube furnace set to 200
2/21/2012	1:54:32 PM	H2 valve closed
2/21/2012	1:54:32 PM	BCl3 valve closed
2/21/2012	1:54:32 PM	PH3 valve closed
2/21/2012	1:54:32 PM	SiCl4 pre valve closed
2/21/2012	1:54:32 PM	SiCl4 post valve closed
2/21/2012	1:54:32 PM	Bypass valve closed
2/21/2012	1:54:32 PM	Bubbler valve closed
2/21/2012	1:54:32 PM	Helium valve opened
2/21/2012	1:54:32 PM	Main Vac valve opened
2/21/2012	1:54:32 PM	Helium MFC set to  20.000000
2/21/2012	1:54:32 PM	H2 MFC set to  0.000000
2/21/2012	1:54:32 PM	BCl3 MFC set to  0.000000
2/21/2012	1:54:32 PM	PH3 MFC set to  0.000000
2/21/2012	1:54:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:54:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:54:32 PM	Tube furnace set to 200
2/21/2012	1:55:02 PM	Helium valve closed
2/21/2012	1:55:02 PM	H2 valve closed
2/21/2012	1:55:02 PM	BCl3 valve closed
2/21/2012	1:55:02 PM	PH3 valve closed
2/21/2012	1:55:02 PM	SiCl4 pre valve closed
2/21/2012	1:55:02 PM	SiCl4 post valve closed
2/21/2012	1:55:02 PM	Bypass valve closed
2/21/2012	1:55:02 PM	Bubbler valve closed
2/21/2012	1:55:02 PM	Main Vac valve opened
2/21/2012	1:55:02 PM	Helium MFC set to  0.000000
2/21/2012	1:55:02 PM	H2 MFC set to  0.000000
2/21/2012	1:55:02 PM	BCl3 MFC set to  0.000000
2/21/2012	1:55:02 PM	PH3 MFC set to  0.000000
2/21/2012	1:55:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:55:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:55:03 PM	Tube furnace set to 200
2/21/2012	1:55:33 PM	H2 valve closed
2/21/2012	1:55:33 PM	BCl3 valve closed
2/21/2012	1:55:33 PM	PH3 valve closed
2/21/2012	1:55:33 PM	SiCl4 pre valve closed
2/21/2012	1:55:33 PM	SiCl4 post valve closed
2/21/2012	1:55:33 PM	Bypass valve closed
2/21/2012	1:55:33 PM	Bubbler valve closed
2/21/2012	1:55:33 PM	Helium valve opened
2/21/2012	1:55:33 PM	Main Vac valve opened
2/21/2012	1:55:33 PM	Helium MFC set to  20.000000
2/21/2012	1:55:33 PM	H2 MFC set to  0.000000
2/21/2012	1:55:33 PM	BCl3 MFC set to  0.000000
2/21/2012	1:55:33 PM	PH3 MFC set to  0.000000
2/21/2012	1:55:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:55:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:55:33 PM	Tube furnace set to 200
2/21/2012	1:56:03 PM	Helium valve closed
2/21/2012	1:56:03 PM	H2 valve closed
2/21/2012	1:56:03 PM	BCl3 valve closed
2/21/2012	1:56:03 PM	PH3 valve closed
2/21/2012	1:56:03 PM	SiCl4 pre valve closed
2/21/2012	1:56:03 PM	SiCl4 post valve closed
2/21/2012	1:56:03 PM	Bypass valve closed
2/21/2012	1:56:03 PM	Bubbler valve closed
2/21/2012	1:56:03 PM	Main Vac valve opened
2/21/2012	1:56:03 PM	Helium MFC set to  0.000000
2/21/2012	1:56:03 PM	H2 MFC set to  0.000000
2/21/2012	1:56:03 PM	BCl3 MFC set to  0.000000
2/21/2012	1:56:03 PM	PH3 MFC set to  0.000000
2/21/2012	1:56:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:56:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:56:03 PM	Tube furnace set to 200
2/21/2012	1:56:33 PM	H2 valve closed
2/21/2012	1:56:33 PM	BCl3 valve closed
2/21/2012	1:56:33 PM	PH3 valve closed
2/21/2012	1:56:33 PM	SiCl4 pre valve closed
2/21/2012	1:56:33 PM	SiCl4 post valve closed
2/21/2012	1:56:33 PM	Bypass valve closed
2/21/2012	1:56:33 PM	Bubbler valve closed
2/21/2012	1:56:33 PM	Helium valve opened
2/21/2012	1:56:33 PM	Main Vac valve opened
2/21/2012	1:56:33 PM	Helium MFC set to  20.000000
2/21/2012	1:56:33 PM	H2 MFC set to  0.000000
2/21/2012	1:56:33 PM	BCl3 MFC set to  0.000000
2/21/2012	1:56:33 PM	PH3 MFC set to  0.000000
2/21/2012	1:56:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:56:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:56:33 PM	Tube furnace set to 200
2/21/2012	1:57:03 PM	Helium valve closed
2/21/2012	1:57:03 PM	H2 valve closed
2/21/2012	1:57:03 PM	BCl3 valve closed
2/21/2012	1:57:03 PM	PH3 valve closed
2/21/2012	1:57:03 PM	SiCl4 pre valve closed
2/21/2012	1:57:03 PM	SiCl4 post valve closed
2/21/2012	1:57:03 PM	Bypass valve closed
2/21/2012	1:57:03 PM	Bubbler valve closed
2/21/2012	1:57:03 PM	Main Vac valve opened
2/21/2012	1:57:03 PM	Helium MFC set to  0.000000
2/21/2012	1:57:03 PM	H2 MFC set to  0.000000
2/21/2012	1:57:03 PM	BCl3 MFC set to  0.000000
2/21/2012	1:57:03 PM	PH3 MFC set to  0.000000
2/21/2012	1:57:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	1:57:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	1:57:03 PM	Tube furnace set to 0
2/21/2012	1:57:04 PM	Run finished at 1:57 PM
2/21/2012	2:10:24 PM	Main Vac valve closed
2/21/2012	2:10:33 PM	Main Vac valve opened
2/21/2012	2:10:46 PM	Recipe started at 2:10 PM
2/21/2012	2:10:46 PM	Helium valve closed
2/21/2012	2:10:46 PM	H2 valve closed
2/21/2012	2:10:46 PM	BCl3 valve closed
2/21/2012	2:10:46 PM	PH3 valve closed
2/21/2012	2:10:46 PM	SiCl4 pre valve closed
2/21/2012	2:10:46 PM	SiCl4 post valve closed
2/21/2012	2:10:46 PM	Bypass valve closed
2/21/2012	2:10:46 PM	Bubbler valve closed
2/21/2012	2:10:46 PM	Main Vac valve opened
2/21/2012	2:10:46 PM	Helium MFC set to  0.000000
2/21/2012	2:10:46 PM	H2 MFC set to  0.000000
2/21/2012	2:10:46 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:46 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:46 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:46 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:46 PM	Tube furnace set to 0
2/21/2012	2:10:56 PM	H2 valve closed
2/21/2012	2:10:57 PM	BCl3 valve closed
2/21/2012	2:10:57 PM	PH3 valve closed
2/21/2012	2:10:57 PM	SiCl4 pre valve closed
2/21/2012	2:10:57 PM	SiCl4 post valve closed
2/21/2012	2:10:57 PM	Bypass valve closed
2/21/2012	2:10:57 PM	Bubbler valve closed
2/21/2012	2:10:57 PM	Helium valve opened
2/21/2012	2:10:57 PM	Main Vac valve opened
2/21/2012	2:10:57 PM	Helium MFC set to  20.000000
2/21/2012	2:10:57 PM	H2 MFC set to  0.000000
2/21/2012	2:10:57 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:57 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:57 PM	Tube furnace set to 0
2/21/2012	2:10:57 PM	Helium valve closed
2/21/2012	2:10:57 PM	H2 valve closed
2/21/2012	2:10:57 PM	BCl3 valve closed
2/21/2012	2:10:57 PM	PH3 valve closed
2/21/2012	2:10:57 PM	SiCl4 pre valve closed
2/21/2012	2:10:57 PM	SiCl4 post valve closed
2/21/2012	2:10:57 PM	Bypass valve closed
2/21/2012	2:10:57 PM	Bubbler valve closed
2/21/2012	2:10:57 PM	Main Vac valve opened
2/21/2012	2:10:57 PM	Helium MFC set to  0.000000
2/21/2012	2:10:57 PM	H2 MFC set to  0.000000
2/21/2012	2:10:57 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:57 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:57 PM	Tube furnace set to 0
2/21/2012	2:10:58 PM	H2 valve closed
2/21/2012	2:10:58 PM	BCl3 valve closed
2/21/2012	2:10:58 PM	PH3 valve closed
2/21/2012	2:10:58 PM	SiCl4 pre valve closed
2/21/2012	2:10:58 PM	SiCl4 post valve closed
2/21/2012	2:10:58 PM	Bypass valve closed
2/21/2012	2:10:58 PM	Bubbler valve closed
2/21/2012	2:10:58 PM	Helium valve opened
2/21/2012	2:10:58 PM	Main Vac valve opened
2/21/2012	2:10:58 PM	Helium MFC set to  20.000000
2/21/2012	2:10:58 PM	H2 MFC set to  0.000000
2/21/2012	2:10:58 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:58 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:58 PM	Tube furnace set to 0
2/21/2012	2:10:58 PM	Helium valve closed
2/21/2012	2:10:58 PM	H2 valve closed
2/21/2012	2:10:58 PM	BCl3 valve closed
2/21/2012	2:10:58 PM	PH3 valve closed
2/21/2012	2:10:58 PM	SiCl4 pre valve closed
2/21/2012	2:10:58 PM	SiCl4 post valve closed
2/21/2012	2:10:58 PM	Bypass valve closed
2/21/2012	2:10:58 PM	Bubbler valve closed
2/21/2012	2:10:58 PM	Main Vac valve opened
2/21/2012	2:10:58 PM	Helium MFC set to  0.000000
2/21/2012	2:10:58 PM	H2 MFC set to  0.000000
2/21/2012	2:10:58 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:58 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:58 PM	Tube furnace set to 0
2/21/2012	2:10:59 PM	H2 valve closed
2/21/2012	2:10:59 PM	BCl3 valve closed
2/21/2012	2:10:59 PM	PH3 valve closed
2/21/2012	2:10:59 PM	SiCl4 pre valve closed
2/21/2012	2:10:59 PM	SiCl4 post valve closed
2/21/2012	2:10:59 PM	Bypass valve closed
2/21/2012	2:10:59 PM	Bubbler valve closed
2/21/2012	2:10:59 PM	Helium valve opened
2/21/2012	2:10:59 PM	Main Vac valve opened
2/21/2012	2:10:59 PM	Helium MFC set to  20.000000
2/21/2012	2:10:59 PM	H2 MFC set to  0.000000
2/21/2012	2:10:59 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:59 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:59 PM	Tube furnace set to 0
2/21/2012	2:10:59 PM	Helium valve closed
2/21/2012	2:10:59 PM	H2 valve closed
2/21/2012	2:10:59 PM	BCl3 valve closed
2/21/2012	2:10:59 PM	PH3 valve closed
2/21/2012	2:10:59 PM	SiCl4 pre valve closed
2/21/2012	2:10:59 PM	SiCl4 post valve closed
2/21/2012	2:10:59 PM	Bypass valve closed
2/21/2012	2:10:59 PM	Bubbler valve closed
2/21/2012	2:10:59 PM	Main Vac valve opened
2/21/2012	2:10:59 PM	Helium MFC set to  0.000000
2/21/2012	2:10:59 PM	H2 MFC set to  0.000000
2/21/2012	2:10:59 PM	BCl3 MFC set to  0.000000
2/21/2012	2:10:59 PM	PH3 MFC set to  0.000000
2/21/2012	2:10:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:10:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:10:59 PM	Tube furnace set to 0
2/21/2012	2:10:59 PM	H2 valve closed
2/21/2012	2:10:59 PM	BCl3 valve closed
2/21/2012	2:10:59 PM	PH3 valve closed
2/21/2012	2:10:59 PM	SiCl4 pre valve closed
2/21/2012	2:10:59 PM	SiCl4 post valve closed
2/21/2012	2:10:59 PM	Bypass valve closed
2/21/2012	2:10:59 PM	Bubbler valve closed
2/21/2012	2:11:00 PM	Helium valve opened
2/21/2012	2:11:00 PM	Main Vac valve opened
2/21/2012	2:11:00 PM	Helium MFC set to  20.000000
2/21/2012	2:11:00 PM	H2 MFC set to  0.000000
2/21/2012	2:11:00 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:00 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:00 PM	Tube furnace set to 0
2/21/2012	2:11:00 PM	Helium valve closed
2/21/2012	2:11:00 PM	H2 valve closed
2/21/2012	2:11:00 PM	BCl3 valve closed
2/21/2012	2:11:00 PM	PH3 valve closed
2/21/2012	2:11:00 PM	SiCl4 pre valve closed
2/21/2012	2:11:00 PM	SiCl4 post valve closed
2/21/2012	2:11:00 PM	Bypass valve closed
2/21/2012	2:11:00 PM	Bubbler valve closed
2/21/2012	2:11:00 PM	Main Vac valve opened
2/21/2012	2:11:00 PM	Helium MFC set to  0.000000
2/21/2012	2:11:00 PM	H2 MFC set to  0.000000
2/21/2012	2:11:00 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:00 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:00 PM	Tube furnace set to 0
2/21/2012	2:11:00 PM	H2 valve closed
2/21/2012	2:11:00 PM	BCl3 valve closed
2/21/2012	2:11:00 PM	PH3 valve closed
2/21/2012	2:11:00 PM	SiCl4 pre valve closed
2/21/2012	2:11:00 PM	SiCl4 post valve closed
2/21/2012	2:11:00 PM	Bypass valve closed
2/21/2012	2:11:00 PM	Bubbler valve closed
2/21/2012	2:11:00 PM	Helium valve opened
2/21/2012	2:11:00 PM	Main Vac valve opened
2/21/2012	2:11:00 PM	Helium MFC set to  20.000000
2/21/2012	2:11:00 PM	H2 MFC set to  0.000000
2/21/2012	2:11:00 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:00 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:01 PM	Tube furnace set to 0
2/21/2012	2:11:01 PM	Helium valve closed
2/21/2012	2:11:01 PM	H2 valve closed
2/21/2012	2:11:01 PM	BCl3 valve closed
2/21/2012	2:11:01 PM	PH3 valve closed
2/21/2012	2:11:01 PM	SiCl4 pre valve closed
2/21/2012	2:11:01 PM	SiCl4 post valve closed
2/21/2012	2:11:01 PM	Bypass valve closed
2/21/2012	2:11:01 PM	Bubbler valve closed
2/21/2012	2:11:01 PM	Main Vac valve opened
2/21/2012	2:11:01 PM	Helium MFC set to  0.000000
2/21/2012	2:11:01 PM	H2 MFC set to  0.000000
2/21/2012	2:11:01 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:01 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:01 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:01 PM	Tube furnace set to 0
2/21/2012	2:11:02 PM	H2 valve closed
2/21/2012	2:11:02 PM	BCl3 valve closed
2/21/2012	2:11:02 PM	PH3 valve closed
2/21/2012	2:11:02 PM	SiCl4 pre valve closed
2/21/2012	2:11:02 PM	SiCl4 post valve closed
2/21/2012	2:11:02 PM	Bypass valve closed
2/21/2012	2:11:02 PM	Bubbler valve closed
2/21/2012	2:11:02 PM	Helium valve opened
2/21/2012	2:11:02 PM	Main Vac valve opened
2/21/2012	2:11:02 PM	Helium MFC set to  20.000000
2/21/2012	2:11:02 PM	H2 MFC set to  0.000000
2/21/2012	2:11:02 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:02 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:02 PM	Tube furnace set to 0
2/21/2012	2:11:32 PM	Helium valve closed
2/21/2012	2:11:32 PM	H2 valve closed
2/21/2012	2:11:32 PM	BCl3 valve closed
2/21/2012	2:11:32 PM	PH3 valve closed
2/21/2012	2:11:32 PM	SiCl4 pre valve closed
2/21/2012	2:11:32 PM	SiCl4 post valve closed
2/21/2012	2:11:32 PM	Bypass valve closed
2/21/2012	2:11:32 PM	Bubbler valve closed
2/21/2012	2:11:32 PM	Main Vac valve opened
2/21/2012	2:11:32 PM	Helium MFC set to  0.000000
2/21/2012	2:11:32 PM	H2 MFC set to  0.000000
2/21/2012	2:11:32 PM	BCl3 MFC set to  0.000000
2/21/2012	2:11:32 PM	PH3 MFC set to  0.000000
2/21/2012	2:11:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:11:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:11:32 PM	Tube furnace set to 0
2/21/2012	2:12:02 PM	H2 valve closed
2/21/2012	2:12:02 PM	BCl3 valve closed
2/21/2012	2:12:02 PM	PH3 valve closed
2/21/2012	2:12:02 PM	SiCl4 pre valve closed
2/21/2012	2:12:02 PM	SiCl4 post valve closed
2/21/2012	2:12:02 PM	Bypass valve closed
2/21/2012	2:12:02 PM	Bubbler valve closed
2/21/2012	2:12:03 PM	Helium valve opened
2/21/2012	2:12:03 PM	Main Vac valve opened
2/21/2012	2:12:03 PM	Helium MFC set to  20.000000
2/21/2012	2:12:03 PM	H2 MFC set to  0.000000
2/21/2012	2:12:03 PM	BCl3 MFC set to  0.000000
2/21/2012	2:12:03 PM	PH3 MFC set to  0.000000
2/21/2012	2:12:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:12:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:12:03 PM	Tube furnace set to 0
2/21/2012	2:12:33 PM	Helium valve closed
2/21/2012	2:12:33 PM	H2 valve closed
2/21/2012	2:12:33 PM	BCl3 valve closed
2/21/2012	2:12:33 PM	PH3 valve closed
2/21/2012	2:12:33 PM	SiCl4 pre valve closed
2/21/2012	2:12:33 PM	SiCl4 post valve closed
2/21/2012	2:12:33 PM	Bypass valve closed
2/21/2012	2:12:33 PM	Bubbler valve closed
2/21/2012	2:12:33 PM	Main Vac valve opened
2/21/2012	2:12:33 PM	Helium MFC set to  0.000000
2/21/2012	2:12:33 PM	H2 MFC set to  0.000000
2/21/2012	2:12:33 PM	BCl3 MFC set to  0.000000
2/21/2012	2:12:33 PM	PH3 MFC set to  0.000000
2/21/2012	2:12:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:12:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:12:33 PM	Tube furnace set to 0
2/21/2012	2:13:03 PM	H2 valve closed
2/21/2012	2:13:03 PM	BCl3 valve closed
2/21/2012	2:13:03 PM	PH3 valve closed
2/21/2012	2:13:03 PM	SiCl4 pre valve closed
2/21/2012	2:13:03 PM	SiCl4 post valve closed
2/21/2012	2:13:03 PM	Bypass valve closed
2/21/2012	2:13:03 PM	Bubbler valve closed
2/21/2012	2:13:03 PM	Helium valve opened
2/21/2012	2:13:03 PM	Main Vac valve opened
2/21/2012	2:13:03 PM	Helium MFC set to  20.000000
2/21/2012	2:13:03 PM	H2 MFC set to  0.000000
2/21/2012	2:13:03 PM	BCl3 MFC set to  0.000000
2/21/2012	2:13:03 PM	PH3 MFC set to  0.000000
2/21/2012	2:13:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:13:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:13:03 PM	Tube furnace set to 0
2/21/2012	2:13:33 PM	Helium valve closed
2/21/2012	2:13:33 PM	H2 valve closed
2/21/2012	2:13:33 PM	BCl3 valve closed
2/21/2012	2:13:33 PM	PH3 valve closed
2/21/2012	2:13:33 PM	SiCl4 pre valve closed
2/21/2012	2:13:33 PM	SiCl4 post valve closed
2/21/2012	2:13:33 PM	Bypass valve closed
2/21/2012	2:13:33 PM	Bubbler valve closed
2/21/2012	2:13:33 PM	Main Vac valve opened
2/21/2012	2:13:33 PM	Helium MFC set to  0.000000
2/21/2012	2:13:33 PM	H2 MFC set to  0.000000
2/21/2012	2:13:33 PM	BCl3 MFC set to  0.000000
2/21/2012	2:13:33 PM	PH3 MFC set to  0.000000
2/21/2012	2:13:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:13:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:13:33 PM	Tube furnace set to 0
2/21/2012	2:14:03 PM	H2 valve closed
2/21/2012	2:14:03 PM	BCl3 valve closed
2/21/2012	2:14:03 PM	PH3 valve closed
2/21/2012	2:14:03 PM	SiCl4 pre valve closed
2/21/2012	2:14:03 PM	SiCl4 post valve closed
2/21/2012	2:14:03 PM	Bypass valve closed
2/21/2012	2:14:03 PM	Bubbler valve closed
2/21/2012	2:14:03 PM	Helium valve opened
2/21/2012	2:14:03 PM	Main Vac valve opened
2/21/2012	2:14:03 PM	Helium MFC set to  20.000000
2/21/2012	2:14:03 PM	H2 MFC set to  0.000000
2/21/2012	2:14:03 PM	BCl3 MFC set to  0.000000
2/21/2012	2:14:03 PM	PH3 MFC set to  0.000000
2/21/2012	2:14:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:14:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:14:03 PM	Tube furnace set to 0
2/21/2012	2:14:34 PM	Helium valve closed
2/21/2012	2:14:34 PM	H2 valve closed
2/21/2012	2:14:34 PM	BCl3 valve closed
2/21/2012	2:14:34 PM	PH3 valve closed
2/21/2012	2:14:34 PM	SiCl4 pre valve closed
2/21/2012	2:14:34 PM	SiCl4 post valve closed
2/21/2012	2:14:34 PM	Bypass valve closed
2/21/2012	2:14:34 PM	Bubbler valve closed
2/21/2012	2:14:34 PM	Main Vac valve opened
2/21/2012	2:14:34 PM	Helium MFC set to  0.000000
2/21/2012	2:14:34 PM	H2 MFC set to  0.000000
2/21/2012	2:14:34 PM	BCl3 MFC set to  0.000000
2/21/2012	2:14:34 PM	PH3 MFC set to  0.000000
2/21/2012	2:14:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:14:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:14:34 PM	Tube furnace set to 200
2/21/2012	2:15:04 PM	H2 valve closed
2/21/2012	2:15:04 PM	BCl3 valve closed
2/21/2012	2:15:04 PM	PH3 valve closed
2/21/2012	2:15:04 PM	SiCl4 pre valve closed
2/21/2012	2:15:04 PM	SiCl4 post valve closed
2/21/2012	2:15:04 PM	Bypass valve closed
2/21/2012	2:15:04 PM	Bubbler valve closed
2/21/2012	2:15:04 PM	Helium valve opened
2/21/2012	2:15:04 PM	Main Vac valve opened
2/21/2012	2:15:04 PM	Helium MFC set to  20.000000
2/21/2012	2:15:04 PM	H2 MFC set to  0.000000
2/21/2012	2:15:04 PM	BCl3 MFC set to  0.000000
2/21/2012	2:15:04 PM	PH3 MFC set to  0.000000
2/21/2012	2:15:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:15:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:15:04 PM	Tube furnace set to 200
2/21/2012	2:15:34 PM	Helium valve closed
2/21/2012	2:15:34 PM	H2 valve closed
2/21/2012	2:15:34 PM	BCl3 valve closed
2/21/2012	2:15:34 PM	PH3 valve closed
2/21/2012	2:15:34 PM	SiCl4 pre valve closed
2/21/2012	2:15:34 PM	SiCl4 post valve closed
2/21/2012	2:15:34 PM	Bypass valve closed
2/21/2012	2:15:34 PM	Bubbler valve closed
2/21/2012	2:15:34 PM	Main Vac valve opened
2/21/2012	2:15:34 PM	Helium MFC set to  0.000000
2/21/2012	2:15:34 PM	H2 MFC set to  0.000000
2/21/2012	2:15:34 PM	BCl3 MFC set to  0.000000
2/21/2012	2:15:34 PM	PH3 MFC set to  0.000000
2/21/2012	2:15:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:15:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:15:34 PM	Tube furnace set to 200
2/21/2012	2:16:04 PM	H2 valve closed
2/21/2012	2:16:04 PM	BCl3 valve closed
2/21/2012	2:16:04 PM	PH3 valve closed
2/21/2012	2:16:04 PM	SiCl4 pre valve closed
2/21/2012	2:16:04 PM	SiCl4 post valve closed
2/21/2012	2:16:04 PM	Bypass valve closed
2/21/2012	2:16:04 PM	Bubbler valve closed
2/21/2012	2:16:04 PM	Helium valve opened
2/21/2012	2:16:04 PM	Main Vac valve opened
2/21/2012	2:16:04 PM	Helium MFC set to  20.000000
2/21/2012	2:16:04 PM	H2 MFC set to  0.000000
2/21/2012	2:16:04 PM	BCl3 MFC set to  0.000000
2/21/2012	2:16:04 PM	PH3 MFC set to  0.000000
2/21/2012	2:16:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:16:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:16:04 PM	Tube furnace set to 200
2/21/2012	2:16:34 PM	Helium valve closed
2/21/2012	2:16:34 PM	H2 valve closed
2/21/2012	2:16:34 PM	BCl3 valve closed
2/21/2012	2:16:34 PM	PH3 valve closed
2/21/2012	2:16:34 PM	SiCl4 pre valve closed
2/21/2012	2:16:34 PM	SiCl4 post valve closed
2/21/2012	2:16:34 PM	Bypass valve closed
2/21/2012	2:16:34 PM	Bubbler valve closed
2/21/2012	2:16:34 PM	Main Vac valve opened
2/21/2012	2:16:34 PM	Helium MFC set to  0.000000
2/21/2012	2:16:34 PM	H2 MFC set to  0.000000
2/21/2012	2:16:34 PM	BCl3 MFC set to  0.000000
2/21/2012	2:16:34 PM	PH3 MFC set to  0.000000
2/21/2012	2:16:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:16:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:16:35 PM	Tube furnace set to 200
2/21/2012	2:17:05 PM	H2 valve closed
2/21/2012	2:17:05 PM	BCl3 valve closed
2/21/2012	2:17:05 PM	PH3 valve closed
2/21/2012	2:17:05 PM	SiCl4 pre valve closed
2/21/2012	2:17:05 PM	SiCl4 post valve closed
2/21/2012	2:17:05 PM	Bypass valve closed
2/21/2012	2:17:05 PM	Bubbler valve closed
2/21/2012	2:17:05 PM	Helium valve opened
2/21/2012	2:17:05 PM	Main Vac valve opened
2/21/2012	2:17:05 PM	Helium MFC set to  20.000000
2/21/2012	2:17:05 PM	H2 MFC set to  0.000000
2/21/2012	2:17:05 PM	BCl3 MFC set to  0.000000
2/21/2012	2:17:05 PM	PH3 MFC set to  0.000000
2/21/2012	2:17:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:17:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:17:05 PM	Tube furnace set to 200
2/21/2012	2:17:35 PM	Helium valve closed
2/21/2012	2:17:35 PM	H2 valve closed
2/21/2012	2:17:35 PM	BCl3 valve closed
2/21/2012	2:17:35 PM	PH3 valve closed
2/21/2012	2:17:35 PM	SiCl4 pre valve closed
2/21/2012	2:17:35 PM	SiCl4 post valve closed
2/21/2012	2:17:35 PM	Bypass valve closed
2/21/2012	2:17:35 PM	Bubbler valve closed
2/21/2012	2:17:35 PM	Main Vac valve opened
2/21/2012	2:17:35 PM	Helium MFC set to  0.000000
2/21/2012	2:17:35 PM	H2 MFC set to  0.000000
2/21/2012	2:17:35 PM	BCl3 MFC set to  0.000000
2/21/2012	2:17:35 PM	PH3 MFC set to  0.000000
2/21/2012	2:17:35 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:17:35 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:17:35 PM	Tube furnace set to 200
2/21/2012	2:18:05 PM	H2 valve closed
2/21/2012	2:18:05 PM	BCl3 valve closed
2/21/2012	2:18:05 PM	PH3 valve closed
2/21/2012	2:18:05 PM	SiCl4 pre valve closed
2/21/2012	2:18:05 PM	SiCl4 post valve closed
2/21/2012	2:18:05 PM	Bypass valve closed
2/21/2012	2:18:05 PM	Bubbler valve closed
2/21/2012	2:18:05 PM	Helium valve opened
2/21/2012	2:18:05 PM	Main Vac valve opened
2/21/2012	2:18:05 PM	Helium MFC set to  20.000000
2/21/2012	2:18:05 PM	H2 MFC set to  0.000000
2/21/2012	2:18:05 PM	BCl3 MFC set to  0.000000
2/21/2012	2:18:05 PM	PH3 MFC set to  0.000000
2/21/2012	2:18:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:18:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:18:05 PM	Tube furnace set to 200
2/21/2012	2:18:35 PM	Helium valve closed
2/21/2012	2:18:35 PM	H2 valve closed
2/21/2012	2:18:35 PM	BCl3 valve closed
2/21/2012	2:18:35 PM	PH3 valve closed
2/21/2012	2:18:35 PM	SiCl4 pre valve closed
2/21/2012	2:18:35 PM	SiCl4 post valve closed
2/21/2012	2:18:35 PM	Bypass valve closed
2/21/2012	2:18:35 PM	Bubbler valve closed
2/21/2012	2:18:35 PM	Main Vac valve opened
2/21/2012	2:18:35 PM	Helium MFC set to  0.000000
2/21/2012	2:18:35 PM	H2 MFC set to  0.000000
2/21/2012	2:18:35 PM	BCl3 MFC set to  0.000000
2/21/2012	2:18:35 PM	PH3 MFC set to  0.000000
2/21/2012	2:18:35 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:18:35 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:18:35 PM	Tube furnace set to 200
2/21/2012	2:19:05 PM	H2 valve closed
2/21/2012	2:19:05 PM	BCl3 valve closed
2/21/2012	2:19:05 PM	PH3 valve closed
2/21/2012	2:19:05 PM	SiCl4 pre valve closed
2/21/2012	2:19:05 PM	SiCl4 post valve closed
2/21/2012	2:19:05 PM	Bypass valve closed
2/21/2012	2:19:05 PM	Bubbler valve closed
2/21/2012	2:19:05 PM	Helium valve opened
2/21/2012	2:19:05 PM	Main Vac valve opened
2/21/2012	2:19:05 PM	Helium MFC set to  20.000000
2/21/2012	2:19:05 PM	H2 MFC set to  0.000000
2/21/2012	2:19:05 PM	BCl3 MFC set to  0.000000
2/21/2012	2:19:05 PM	PH3 MFC set to  0.000000
2/21/2012	2:19:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:19:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:19:06 PM	Tube furnace set to 200
2/21/2012	2:19:36 PM	Helium valve closed
2/21/2012	2:19:36 PM	H2 valve closed
2/21/2012	2:19:36 PM	BCl3 valve closed
2/21/2012	2:19:36 PM	PH3 valve closed
2/21/2012	2:19:36 PM	SiCl4 pre valve closed
2/21/2012	2:19:36 PM	SiCl4 post valve closed
2/21/2012	2:19:36 PM	Bypass valve closed
2/21/2012	2:19:36 PM	Bubbler valve closed
2/21/2012	2:19:36 PM	Main Vac valve opened
2/21/2012	2:19:36 PM	Helium MFC set to  0.000000
2/21/2012	2:19:36 PM	H2 MFC set to  0.000000
2/21/2012	2:19:36 PM	BCl3 MFC set to  0.000000
2/21/2012	2:19:36 PM	PH3 MFC set to  0.000000
2/21/2012	2:19:36 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:19:36 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:19:36 PM	Tube furnace set to 200
2/21/2012	2:20:06 PM	H2 valve closed
2/21/2012	2:20:06 PM	BCl3 valve closed
2/21/2012	2:20:06 PM	PH3 valve closed
2/21/2012	2:20:06 PM	SiCl4 pre valve closed
2/21/2012	2:20:06 PM	SiCl4 post valve closed
2/21/2012	2:20:06 PM	Bypass valve closed
2/21/2012	2:20:06 PM	Bubbler valve closed
2/21/2012	2:20:06 PM	Helium valve opened
2/21/2012	2:20:06 PM	Main Vac valve opened
2/21/2012	2:20:06 PM	Helium MFC set to  20.000000
2/21/2012	2:20:06 PM	H2 MFC set to  0.000000
2/21/2012	2:20:06 PM	BCl3 MFC set to  0.000000
2/21/2012	2:20:06 PM	PH3 MFC set to  0.000000
2/21/2012	2:20:06 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:20:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:20:06 PM	Tube furnace set to 200
2/21/2012	2:20:36 PM	Helium valve closed
2/21/2012	2:20:36 PM	H2 valve closed
2/21/2012	2:20:36 PM	BCl3 valve closed
2/21/2012	2:20:36 PM	PH3 valve closed
2/21/2012	2:20:36 PM	SiCl4 pre valve closed
2/21/2012	2:20:36 PM	SiCl4 post valve closed
2/21/2012	2:20:36 PM	Bypass valve closed
2/21/2012	2:20:36 PM	Bubbler valve closed
2/21/2012	2:20:36 PM	Main Vac valve opened
2/21/2012	2:20:36 PM	Helium MFC set to  0.000000
2/21/2012	2:20:36 PM	H2 MFC set to  0.000000
2/21/2012	2:20:36 PM	BCl3 MFC set to  0.000000
2/21/2012	2:20:36 PM	PH3 MFC set to  0.000000
2/21/2012	2:20:36 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:20:36 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:20:36 PM	Tube furnace set to 0
2/21/2012	2:20:37 PM	Run finished at 2:20 PM
2/21/2012	2:25:32 PM	Main Vac valve closed
2/21/2012	2:25:42 PM	Main Vac valve opened
2/21/2012	2:25:55 PM	Recipe started at 2:25 PM
2/21/2012	2:25:55 PM	Helium valve closed
2/21/2012	2:25:55 PM	H2 valve closed
2/21/2012	2:25:55 PM	BCl3 valve closed
2/21/2012	2:25:55 PM	PH3 valve closed
2/21/2012	2:25:55 PM	SiCl4 pre valve closed
2/21/2012	2:25:55 PM	SiCl4 post valve closed
2/21/2012	2:25:55 PM	Main Vac valve closed
2/21/2012	2:25:55 PM	Bypass valve closed
2/21/2012	2:25:55 PM	Bubbler valve closed
2/21/2012	2:25:55 PM	Helium MFC set to  0.000000
2/21/2012	2:25:55 PM	H2 MFC set to  0.000000
2/21/2012	2:25:55 PM	BCl3 MFC set to  0.000000
2/21/2012	2:25:55 PM	PH3 MFC set to  0.000000
2/21/2012	2:25:55 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:25:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:25:55 PM	Tube furnace set to 0
2/21/2012	2:25:58 PM	Helium valve closed
2/21/2012	2:25:58 PM	BCl3 valve closed
2/21/2012	2:25:58 PM	PH3 valve closed
2/21/2012	2:25:58 PM	SiCl4 pre valve closed
2/21/2012	2:25:58 PM	SiCl4 post valve closed
2/21/2012	2:25:58 PM	Main Vac valve closed
2/21/2012	2:25:58 PM	Bypass valve closed
2/21/2012	2:25:58 PM	Bubbler valve closed
2/21/2012	2:25:58 PM	H2 valve opened
2/21/2012	2:25:58 PM	Helium MFC set to  0.000000
2/21/2012	2:25:58 PM	H2 MFC set to  500.000000
2/21/2012	2:25:58 PM	BCl3 MFC set to  0.000000
2/21/2012	2:25:58 PM	PH3 MFC set to  0.000000
2/21/2012	2:25:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:25:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:25:58 PM	Tube furnace set to 0
2/21/2012	2:27:02 PM	Helium valve closed
2/21/2012	2:27:02 PM	BCl3 valve closed
2/21/2012	2:27:02 PM	PH3 valve closed
2/21/2012	2:27:02 PM	SiCl4 pre valve closed
2/21/2012	2:27:02 PM	SiCl4 post valve closed
2/21/2012	2:27:02 PM	Main Vac valve closed
2/21/2012	2:27:02 PM	Bypass valve closed
2/21/2012	2:27:02 PM	H2 valve opened
2/21/2012	2:27:02 PM	Bubbler valve opened
2/21/2012	2:27:02 PM	Helium MFC set to  0.000000
2/21/2012	2:27:02 PM	H2 MFC set to  500.000000
2/21/2012	2:27:02 PM	BCl3 MFC set to  0.000000
2/21/2012	2:27:02 PM	PH3 MFC set to  0.000000
2/21/2012	2:27:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:27:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:27:03 PM	Tube furnace set to 0
2/21/2012	2:27:04 PM	Helium valve closed
2/21/2012	2:27:04 PM	BCl3 valve closed
2/21/2012	2:27:04 PM	PH3 valve closed
2/21/2012	2:27:04 PM	SiCl4 pre valve closed
2/21/2012	2:27:04 PM	SiCl4 post valve closed
2/21/2012	2:27:04 PM	Main Vac valve closed
2/21/2012	2:27:04 PM	Bypass valve closed
2/21/2012	2:27:04 PM	H2 valve opened
2/21/2012	2:27:04 PM	Bubbler valve opened
2/21/2012	2:27:04 PM	Helium MFC set to  0.000000
2/21/2012	2:27:04 PM	H2 MFC set to  500.000000
2/21/2012	2:27:04 PM	BCl3 MFC set to  0.000000
2/21/2012	2:27:04 PM	PH3 MFC set to  0.000000
2/21/2012	2:27:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	2:27:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:27:04 PM	Tube furnace set to 1000
2/21/2012	2:47:04 PM	Helium valve closed
2/21/2012	2:47:04 PM	PH3 valve closed
2/21/2012	2:47:04 PM	Main Vac valve closed
2/21/2012	2:47:04 PM	Bypass valve closed
2/21/2012	2:47:04 PM	H2 valve opened
2/21/2012	2:47:04 PM	BCl3 valve opened
2/21/2012	2:47:04 PM	SiCl4 pre valve opened
2/21/2012	2:47:04 PM	SiCl4 post valve opened
2/21/2012	2:47:04 PM	Bubbler valve opened
2/21/2012	2:47:04 PM	Helium MFC set to  0.000000
2/21/2012	2:47:04 PM	H2 MFC set to  450.000000
2/21/2012	2:47:04 PM	BCl3 MFC set to  1.500000
2/21/2012	2:47:04 PM	PH3 MFC set to  0.000000
2/21/2012	2:47:04 PM	SiCl4 MFC set to  50.000000
2/21/2012	2:47:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	2:47:04 PM	Tube furnace set to 1000
2/21/2012	3:03:04 PM	Helium valve closed
2/21/2012	3:03:04 PM	BCl3 valve closed
2/21/2012	3:03:04 PM	PH3 valve closed
2/21/2012	3:03:04 PM	SiCl4 pre valve closed
2/21/2012	3:03:04 PM	SiCl4 post valve closed
2/21/2012	3:03:04 PM	Main Vac valve closed
2/21/2012	3:03:04 PM	Bypass valve closed
2/21/2012	3:03:04 PM	H2 valve opened
2/21/2012	3:03:04 PM	Bubbler valve opened
2/21/2012	3:03:04 PM	Helium MFC set to  0.000000
2/21/2012	3:03:04 PM	H2 MFC set to  500.000000
2/21/2012	3:03:04 PM	BCl3 MFC set to  0.000000
2/21/2012	3:03:04 PM	PH3 MFC set to  0.000000
2/21/2012	3:03:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:03:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:03:04 PM	Tube furnace set to 950
2/21/2012	3:05:04 PM	Helium valve closed
2/21/2012	3:05:04 PM	BCl3 valve closed
2/21/2012	3:05:04 PM	PH3 valve closed
2/21/2012	3:05:04 PM	SiCl4 pre valve closed
2/21/2012	3:05:04 PM	SiCl4 post valve closed
2/21/2012	3:05:04 PM	Main Vac valve closed
2/21/2012	3:05:04 PM	Bypass valve closed
2/21/2012	3:05:04 PM	H2 valve opened
2/21/2012	3:05:04 PM	Bubbler valve opened
2/21/2012	3:05:04 PM	Helium MFC set to  0.000000
2/21/2012	3:05:04 PM	H2 MFC set to  500.000000
2/21/2012	3:05:04 PM	BCl3 MFC set to  0.000000
2/21/2012	3:05:04 PM	PH3 MFC set to  0.000000
2/21/2012	3:05:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:05:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:05:04 PM	Tube furnace set to 900
2/21/2012	3:07:04 PM	Helium valve closed
2/21/2012	3:07:04 PM	BCl3 valve closed
2/21/2012	3:07:04 PM	PH3 valve closed
2/21/2012	3:07:04 PM	SiCl4 pre valve closed
2/21/2012	3:07:04 PM	SiCl4 post valve closed
2/21/2012	3:07:04 PM	Main Vac valve closed
2/21/2012	3:07:04 PM	Bypass valve closed
2/21/2012	3:07:04 PM	H2 valve opened
2/21/2012	3:07:04 PM	Bubbler valve opened
2/21/2012	3:07:04 PM	Helium MFC set to  0.000000
2/21/2012	3:07:04 PM	H2 MFC set to  500.000000
2/21/2012	3:07:04 PM	BCl3 MFC set to  0.000000
2/21/2012	3:07:04 PM	PH3 MFC set to  0.000000
2/21/2012	3:07:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:07:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:07:05 PM	Tube furnace set to 850
2/21/2012	3:09:05 PM	H2 valve closed
2/21/2012	3:09:05 PM	BCl3 valve closed
2/21/2012	3:09:05 PM	PH3 valve closed
2/21/2012	3:09:05 PM	SiCl4 pre valve closed
2/21/2012	3:09:05 PM	SiCl4 post valve closed
2/21/2012	3:09:05 PM	Main Vac valve closed
2/21/2012	3:09:05 PM	Bypass valve closed
2/21/2012	3:09:05 PM	Helium valve opened
2/21/2012	3:09:05 PM	Bubbler valve opened
2/21/2012	3:09:05 PM	Helium MFC set to  500.000000
2/21/2012	3:09:05 PM	H2 MFC set to  0.000000
2/21/2012	3:09:05 PM	BCl3 MFC set to  0.000000
2/21/2012	3:09:05 PM	PH3 MFC set to  0.000000
2/21/2012	3:09:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:09:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:09:05 PM	Tube furnace set to 800
2/21/2012	3:11:05 PM	H2 valve closed
2/21/2012	3:11:05 PM	BCl3 valve closed
2/21/2012	3:11:05 PM	PH3 valve closed
2/21/2012	3:11:05 PM	SiCl4 pre valve closed
2/21/2012	3:11:05 PM	SiCl4 post valve closed
2/21/2012	3:11:05 PM	Main Vac valve closed
2/21/2012	3:11:05 PM	Bypass valve closed
2/21/2012	3:11:05 PM	Helium valve opened
2/21/2012	3:11:05 PM	Bubbler valve opened
2/21/2012	3:11:05 PM	Helium MFC set to  500.000000
2/21/2012	3:11:05 PM	H2 MFC set to  0.000000
2/21/2012	3:11:05 PM	BCl3 MFC set to  0.000000
2/21/2012	3:11:05 PM	PH3 MFC set to  0.000000
2/21/2012	3:11:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:11:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:11:05 PM	Tube furnace set to 750
2/21/2012	3:13:05 PM	H2 valve closed
2/21/2012	3:13:05 PM	BCl3 valve closed
2/21/2012	3:13:05 PM	PH3 valve closed
2/21/2012	3:13:05 PM	SiCl4 pre valve closed
2/21/2012	3:13:05 PM	SiCl4 post valve closed
2/21/2012	3:13:05 PM	Main Vac valve closed
2/21/2012	3:13:05 PM	Bypass valve closed
2/21/2012	3:13:05 PM	Helium valve opened
2/21/2012	3:13:05 PM	Bubbler valve opened
2/21/2012	3:13:05 PM	Helium MFC set to  500.000000
2/21/2012	3:13:05 PM	H2 MFC set to  0.000000
2/21/2012	3:13:05 PM	BCl3 MFC set to  0.000000
2/21/2012	3:13:05 PM	PH3 MFC set to  0.000000
2/21/2012	3:13:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:13:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:13:05 PM	Tube furnace set to 0
2/21/2012	3:33:05 PM	Helium valve closed
2/21/2012	3:33:05 PM	H2 valve closed
2/21/2012	3:33:05 PM	BCl3 valve closed
2/21/2012	3:33:05 PM	PH3 valve closed
2/21/2012	3:33:05 PM	SiCl4 pre valve closed
2/21/2012	3:33:05 PM	SiCl4 post valve closed
2/21/2012	3:33:05 PM	Main Vac valve closed
2/21/2012	3:33:05 PM	Bypass valve closed
2/21/2012	3:33:05 PM	Bubbler valve closed
2/21/2012	3:33:05 PM	Helium MFC set to  0.000000
2/21/2012	3:33:05 PM	H2 MFC set to  0.000000
2/21/2012	3:33:05 PM	BCl3 MFC set to  0.000000
2/21/2012	3:33:05 PM	PH3 MFC set to  0.000000
2/21/2012	3:33:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:33:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:33:06 PM	Tube furnace set to 0
2/21/2012	3:33:07 PM	Run finished at 3:33 PM
2/21/2012	3:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	3:34:56 PM	Recipe started at 3:34 PM
2/21/2012	3:34:56 PM	Helium valve closed
2/21/2012	3:34:56 PM	H2 valve closed
2/21/2012	3:34:56 PM	BCl3 valve closed
2/21/2012	3:34:56 PM	PH3 valve closed
2/21/2012	3:34:56 PM	SiCl4 pre valve closed
2/21/2012	3:34:56 PM	SiCl4 post valve closed
2/21/2012	3:34:56 PM	Main Vac valve closed
2/21/2012	3:34:56 PM	Bypass valve closed
2/21/2012	3:34:56 PM	Bubbler valve closed
2/21/2012	3:34:56 PM	Helium MFC set to  0.000000
2/21/2012	3:34:56 PM	H2 MFC set to  0.000000
2/21/2012	3:34:56 PM	BCl3 MFC set to  0.000000
2/21/2012	3:34:56 PM	PH3 MFC set to  0.000000
2/21/2012	3:34:56 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:34:56 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:34:56 PM	Tube furnace set to 0
2/21/2012	3:34:59 PM	H2 valve closed
2/21/2012	3:34:59 PM	BCl3 valve closed
2/21/2012	3:34:59 PM	PH3 valve closed
2/21/2012	3:34:59 PM	SiCl4 pre valve closed
2/21/2012	3:34:59 PM	SiCl4 post valve closed
2/21/2012	3:34:59 PM	Main Vac valve closed
2/21/2012	3:34:59 PM	Bypass valve closed
2/21/2012	3:34:59 PM	Bubbler valve closed
2/21/2012	3:34:59 PM	Helium valve opened
2/21/2012	3:34:59 PM	Helium MFC set to  500.000000
2/21/2012	3:34:59 PM	H2 MFC set to  0.000000
2/21/2012	3:34:59 PM	BCl3 MFC set to  0.000000
2/21/2012	3:34:59 PM	PH3 MFC set to  0.000000
2/21/2012	3:34:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:34:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:34:59 PM	Tube furnace set to 0
2/21/2012	3:35:00 PM	Helium valve closed
2/21/2012	3:35:00 PM	H2 valve closed
2/21/2012	3:35:00 PM	BCl3 valve closed
2/21/2012	3:35:00 PM	PH3 valve closed
2/21/2012	3:35:00 PM	SiCl4 pre valve closed
2/21/2012	3:35:00 PM	SiCl4 post valve closed
2/21/2012	3:35:00 PM	Main Vac valve closed
2/21/2012	3:35:00 PM	Bypass valve closed
2/21/2012	3:35:00 PM	Bubbler valve closed
2/21/2012	3:35:00 PM	Helium MFC set to  0.000000
2/21/2012	3:35:00 PM	H2 MFC set to  0.000000
2/21/2012	3:35:00 PM	BCl3 MFC set to  0.000000
2/21/2012	3:35:00 PM	PH3 MFC set to  0.000000
2/21/2012	3:35:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:35:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:35:00 PM	Tube furnace set to 0
2/21/2012	3:35:01 PM	Run finished at 3:35 PM
2/21/2012	3:35:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	3:36:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	3:36:52 PM	Recipe started at 3:36 PM
2/21/2012	3:36:52 PM	Helium valve closed
2/21/2012	3:36:52 PM	H2 valve closed
2/21/2012	3:36:52 PM	BCl3 valve closed
2/21/2012	3:36:52 PM	PH3 valve closed
2/21/2012	3:36:52 PM	SiCl4 pre valve closed
2/21/2012	3:36:52 PM	SiCl4 post valve closed
2/21/2012	3:36:52 PM	Main Vac valve closed
2/21/2012	3:36:52 PM	Bubbler valve closed
2/21/2012	3:36:52 PM	Bypass valve opened
2/21/2012	3:36:52 PM	Helium MFC set to  0.000000
2/21/2012	3:36:52 PM	H2 MFC set to  0.000000
2/21/2012	3:36:52 PM	BCl3 MFC set to  0.000000
2/21/2012	3:36:52 PM	PH3 MFC set to  0.000000
2/21/2012	3:36:52 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:36:52 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:36:52 PM	Tube furnace set to 0
2/21/2012	3:37:48 PM	Helium valve closed
2/21/2012	3:37:48 PM	H2 valve closed
2/21/2012	3:37:48 PM	BCl3 valve closed
2/21/2012	3:37:48 PM	PH3 valve closed
2/21/2012	3:37:48 PM	SiCl4 pre valve closed
2/21/2012	3:37:48 PM	SiCl4 post valve closed
2/21/2012	3:37:48 PM	Main Vac valve closed
2/21/2012	3:37:48 PM	Bubbler valve closed
2/21/2012	3:37:48 PM	Bypass valve opened
2/21/2012	3:37:48 PM	Helium MFC set to  0.000000
2/21/2012	3:37:48 PM	H2 MFC set to  0.000000
2/21/2012	3:37:48 PM	BCl3 MFC set to  0.000000
2/21/2012	3:37:48 PM	PH3 MFC set to  0.000000
2/21/2012	3:37:48 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:37:48 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:37:48 PM	Tube furnace set to 0
2/21/2012	3:38:48 PM	Helium valve closed
2/21/2012	3:38:48 PM	H2 valve closed
2/21/2012	3:38:48 PM	BCl3 valve closed
2/21/2012	3:38:48 PM	PH3 valve closed
2/21/2012	3:38:48 PM	SiCl4 pre valve closed
2/21/2012	3:38:48 PM	SiCl4 post valve closed
2/21/2012	3:38:48 PM	Bypass valve closed
2/21/2012	3:38:48 PM	Bubbler valve closed
2/21/2012	3:38:48 PM	Main Vac valve opened
2/21/2012	3:38:48 PM	Helium MFC set to  0.000000
2/21/2012	3:38:48 PM	H2 MFC set to  0.000000
2/21/2012	3:38:48 PM	BCl3 MFC set to  0.000000
2/21/2012	3:38:48 PM	PH3 MFC set to  0.000000
2/21/2012	3:38:48 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:38:48 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:38:48 PM	Tube furnace set to 0
2/21/2012	3:38:49 PM	Run finished at 3:38 PM
2/21/2012	3:38:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	3:48:08 PM	Recipe started at 3:47 PM
2/21/2012	3:48:08 PM	Helium valve closed
2/21/2012	3:48:08 PM	H2 valve closed
2/21/2012	3:48:08 PM	BCl3 valve closed
2/21/2012	3:48:08 PM	PH3 valve closed
2/21/2012	3:48:08 PM	SiCl4 pre valve closed
2/21/2012	3:48:08 PM	SiCl4 post valve closed
2/21/2012	3:48:08 PM	Bypass valve closed
2/21/2012	3:48:08 PM	Bubbler valve closed
2/21/2012	3:48:08 PM	Main Vac valve opened
2/21/2012	3:48:08 PM	Helium MFC set to  0.000000
2/21/2012	3:48:08 PM	H2 MFC set to  0.000000
2/21/2012	3:48:08 PM	BCl3 MFC set to  0.000000
2/21/2012	3:48:08 PM	PH3 MFC set to  0.000000
2/21/2012	3:48:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:48:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:48:08 PM	Tube furnace set to 0
2/21/2012	3:48:38 PM	H2 valve closed
2/21/2012	3:48:38 PM	BCl3 valve closed
2/21/2012	3:48:38 PM	PH3 valve closed
2/21/2012	3:48:38 PM	SiCl4 pre valve closed
2/21/2012	3:48:38 PM	SiCl4 post valve closed
2/21/2012	3:48:38 PM	Bypass valve closed
2/21/2012	3:48:38 PM	Bubbler valve closed
2/21/2012	3:48:38 PM	Helium valve opened
2/21/2012	3:48:38 PM	Main Vac valve opened
2/21/2012	3:48:38 PM	Helium MFC set to  20.000000
2/21/2012	3:48:38 PM	H2 MFC set to  0.000000
2/21/2012	3:48:38 PM	BCl3 MFC set to  0.000000
2/21/2012	3:48:38 PM	PH3 MFC set to  0.000000
2/21/2012	3:48:38 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:48:38 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:48:38 PM	Tube furnace set to 0
2/21/2012	3:49:08 PM	Helium valve closed
2/21/2012	3:49:08 PM	H2 valve closed
2/21/2012	3:49:08 PM	BCl3 valve closed
2/21/2012	3:49:08 PM	PH3 valve closed
2/21/2012	3:49:08 PM	SiCl4 pre valve closed
2/21/2012	3:49:08 PM	SiCl4 post valve closed
2/21/2012	3:49:08 PM	Bypass valve closed
2/21/2012	3:49:08 PM	Bubbler valve closed
2/21/2012	3:49:08 PM	Main Vac valve opened
2/21/2012	3:49:08 PM	Helium MFC set to  0.000000
2/21/2012	3:49:08 PM	H2 MFC set to  0.000000
2/21/2012	3:49:08 PM	BCl3 MFC set to  0.000000
2/21/2012	3:49:08 PM	PH3 MFC set to  0.000000
2/21/2012	3:49:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:49:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:49:08 PM	Tube furnace set to 0
2/21/2012	3:49:38 PM	H2 valve closed
2/21/2012	3:49:38 PM	BCl3 valve closed
2/21/2012	3:49:38 PM	PH3 valve closed
2/21/2012	3:49:38 PM	SiCl4 pre valve closed
2/21/2012	3:49:38 PM	SiCl4 post valve closed
2/21/2012	3:49:38 PM	Bypass valve closed
2/21/2012	3:49:38 PM	Bubbler valve closed
2/21/2012	3:49:38 PM	Helium valve opened
2/21/2012	3:49:38 PM	Main Vac valve opened
2/21/2012	3:49:38 PM	Helium MFC set to  20.000000
2/21/2012	3:49:38 PM	H2 MFC set to  0.000000
2/21/2012	3:49:38 PM	BCl3 MFC set to  0.000000
2/21/2012	3:49:38 PM	PH3 MFC set to  0.000000
2/21/2012	3:49:38 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:49:38 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:49:39 PM	Tube furnace set to 0
2/21/2012	3:50:09 PM	Helium valve closed
2/21/2012	3:50:09 PM	H2 valve closed
2/21/2012	3:50:09 PM	BCl3 valve closed
2/21/2012	3:50:09 PM	PH3 valve closed
2/21/2012	3:50:09 PM	SiCl4 pre valve closed
2/21/2012	3:50:09 PM	SiCl4 post valve closed
2/21/2012	3:50:09 PM	Bypass valve closed
2/21/2012	3:50:09 PM	Bubbler valve closed
2/21/2012	3:50:09 PM	Main Vac valve opened
2/21/2012	3:50:09 PM	Helium MFC set to  0.000000
2/21/2012	3:50:09 PM	H2 MFC set to  0.000000
2/21/2012	3:50:09 PM	BCl3 MFC set to  0.000000
2/21/2012	3:50:09 PM	PH3 MFC set to  0.000000
2/21/2012	3:50:09 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:50:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:50:09 PM	Tube furnace set to 0
2/21/2012	3:50:39 PM	H2 valve closed
2/21/2012	3:50:39 PM	BCl3 valve closed
2/21/2012	3:50:39 PM	PH3 valve closed
2/21/2012	3:50:39 PM	SiCl4 pre valve closed
2/21/2012	3:50:39 PM	SiCl4 post valve closed
2/21/2012	3:50:39 PM	Bypass valve closed
2/21/2012	3:50:39 PM	Bubbler valve closed
2/21/2012	3:50:39 PM	Helium valve opened
2/21/2012	3:50:39 PM	Main Vac valve opened
2/21/2012	3:50:39 PM	Helium MFC set to  20.000000
2/21/2012	3:50:39 PM	H2 MFC set to  0.000000
2/21/2012	3:50:39 PM	BCl3 MFC set to  0.000000
2/21/2012	3:50:39 PM	PH3 MFC set to  0.000000
2/21/2012	3:50:39 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:50:39 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:50:39 PM	Tube furnace set to 0
2/21/2012	3:51:09 PM	Helium valve closed
2/21/2012	3:51:09 PM	H2 valve closed
2/21/2012	3:51:09 PM	BCl3 valve closed
2/21/2012	3:51:09 PM	PH3 valve closed
2/21/2012	3:51:09 PM	SiCl4 pre valve closed
2/21/2012	3:51:09 PM	SiCl4 post valve closed
2/21/2012	3:51:09 PM	Bypass valve closed
2/21/2012	3:51:09 PM	Bubbler valve closed
2/21/2012	3:51:09 PM	Main Vac valve opened
2/21/2012	3:51:09 PM	Helium MFC set to  0.000000
2/21/2012	3:51:09 PM	H2 MFC set to  0.000000
2/21/2012	3:51:09 PM	BCl3 MFC set to  0.000000
2/21/2012	3:51:09 PM	PH3 MFC set to  0.000000
2/21/2012	3:51:09 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:51:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:51:09 PM	Tube furnace set to 0
2/21/2012	3:51:39 PM	H2 valve closed
2/21/2012	3:51:39 PM	BCl3 valve closed
2/21/2012	3:51:39 PM	PH3 valve closed
2/21/2012	3:51:39 PM	SiCl4 pre valve closed
2/21/2012	3:51:39 PM	SiCl4 post valve closed
2/21/2012	3:51:39 PM	Bypass valve closed
2/21/2012	3:51:39 PM	Bubbler valve closed
2/21/2012	3:51:39 PM	Helium valve opened
2/21/2012	3:51:39 PM	Main Vac valve opened
2/21/2012	3:51:39 PM	Helium MFC set to  20.000000
2/21/2012	3:51:39 PM	H2 MFC set to  0.000000
2/21/2012	3:51:39 PM	BCl3 MFC set to  0.000000
2/21/2012	3:51:39 PM	PH3 MFC set to  0.000000
2/21/2012	3:51:39 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:51:39 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:51:39 PM	Tube furnace set to 0
2/21/2012	3:52:09 PM	Helium valve closed
2/21/2012	3:52:09 PM	H2 valve closed
2/21/2012	3:52:09 PM	BCl3 valve closed
2/21/2012	3:52:09 PM	PH3 valve closed
2/21/2012	3:52:09 PM	SiCl4 pre valve closed
2/21/2012	3:52:09 PM	SiCl4 post valve closed
2/21/2012	3:52:09 PM	Bypass valve closed
2/21/2012	3:52:09 PM	Bubbler valve closed
2/21/2012	3:52:09 PM	Main Vac valve opened
2/21/2012	3:52:09 PM	Helium MFC set to  0.000000
2/21/2012	3:52:09 PM	H2 MFC set to  0.000000
2/21/2012	3:52:09 PM	BCl3 MFC set to  0.000000
2/21/2012	3:52:09 PM	PH3 MFC set to  0.000000
2/21/2012	3:52:09 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:52:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:52:10 PM	Tube furnace set to 0
2/21/2012	3:52:40 PM	H2 valve closed
2/21/2012	3:52:40 PM	BCl3 valve closed
2/21/2012	3:52:40 PM	PH3 valve closed
2/21/2012	3:52:40 PM	SiCl4 pre valve closed
2/21/2012	3:52:40 PM	SiCl4 post valve closed
2/21/2012	3:52:40 PM	Bypass valve closed
2/21/2012	3:52:40 PM	Bubbler valve closed
2/21/2012	3:52:40 PM	Helium valve opened
2/21/2012	3:52:40 PM	Main Vac valve opened
2/21/2012	3:52:40 PM	Helium MFC set to  20.000000
2/21/2012	3:52:40 PM	H2 MFC set to  0.000000
2/21/2012	3:52:40 PM	BCl3 MFC set to  0.000000
2/21/2012	3:52:40 PM	PH3 MFC set to  0.000000
2/21/2012	3:52:40 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:52:40 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:52:40 PM	Tube furnace set to 0
2/21/2012	3:53:10 PM	Helium valve closed
2/21/2012	3:53:10 PM	H2 valve closed
2/21/2012	3:53:10 PM	BCl3 valve closed
2/21/2012	3:53:10 PM	PH3 valve closed
2/21/2012	3:53:10 PM	SiCl4 pre valve closed
2/21/2012	3:53:10 PM	SiCl4 post valve closed
2/21/2012	3:53:10 PM	Bypass valve closed
2/21/2012	3:53:10 PM	Bubbler valve closed
2/21/2012	3:53:10 PM	Main Vac valve opened
2/21/2012	3:53:10 PM	Helium MFC set to  0.000000
2/21/2012	3:53:10 PM	H2 MFC set to  0.000000
2/21/2012	3:53:10 PM	BCl3 MFC set to  0.000000
2/21/2012	3:53:10 PM	PH3 MFC set to  0.000000
2/21/2012	3:53:10 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:53:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:53:10 PM	Tube furnace set to 0
2/21/2012	3:53:40 PM	H2 valve closed
2/21/2012	3:53:40 PM	BCl3 valve closed
2/21/2012	3:53:40 PM	PH3 valve closed
2/21/2012	3:53:40 PM	SiCl4 pre valve closed
2/21/2012	3:53:40 PM	SiCl4 post valve closed
2/21/2012	3:53:40 PM	Bypass valve closed
2/21/2012	3:53:40 PM	Bubbler valve closed
2/21/2012	3:53:40 PM	Helium valve opened
2/21/2012	3:53:40 PM	Main Vac valve opened
2/21/2012	3:53:40 PM	Helium MFC set to  20.000000
2/21/2012	3:53:40 PM	H2 MFC set to  0.000000
2/21/2012	3:53:40 PM	BCl3 MFC set to  0.000000
2/21/2012	3:53:40 PM	PH3 MFC set to  0.000000
2/21/2012	3:53:40 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:53:40 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:53:40 PM	Tube furnace set to 0
2/21/2012	3:54:10 PM	Helium valve closed
2/21/2012	3:54:10 PM	H2 valve closed
2/21/2012	3:54:10 PM	BCl3 valve closed
2/21/2012	3:54:10 PM	PH3 valve closed
2/21/2012	3:54:10 PM	SiCl4 pre valve closed
2/21/2012	3:54:10 PM	SiCl4 post valve closed
2/21/2012	3:54:10 PM	Bypass valve closed
2/21/2012	3:54:10 PM	Bubbler valve closed
2/21/2012	3:54:10 PM	Main Vac valve opened
2/21/2012	3:54:10 PM	Helium MFC set to  0.000000
2/21/2012	3:54:10 PM	H2 MFC set to  0.000000
2/21/2012	3:54:10 PM	BCl3 MFC set to  0.000000
2/21/2012	3:54:10 PM	PH3 MFC set to  0.000000
2/21/2012	3:54:10 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:54:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:54:10 PM	Tube furnace set to 0
2/21/2012	3:54:40 PM	H2 valve closed
2/21/2012	3:54:40 PM	BCl3 valve closed
2/21/2012	3:54:40 PM	PH3 valve closed
2/21/2012	3:54:40 PM	SiCl4 pre valve closed
2/21/2012	3:54:40 PM	SiCl4 post valve closed
2/21/2012	3:54:40 PM	Bypass valve closed
2/21/2012	3:54:40 PM	Bubbler valve closed
2/21/2012	3:54:40 PM	Helium valve opened
2/21/2012	3:54:40 PM	Main Vac valve opened
2/21/2012	3:54:40 PM	Helium MFC set to  20.000000
2/21/2012	3:54:40 PM	H2 MFC set to  0.000000
2/21/2012	3:54:40 PM	BCl3 MFC set to  0.000000
2/21/2012	3:54:40 PM	PH3 MFC set to  0.000000
2/21/2012	3:54:40 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:54:40 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:54:41 PM	Tube furnace set to 0
2/21/2012	3:55:11 PM	Helium valve closed
2/21/2012	3:55:11 PM	H2 valve closed
2/21/2012	3:55:11 PM	BCl3 valve closed
2/21/2012	3:55:11 PM	PH3 valve closed
2/21/2012	3:55:11 PM	SiCl4 pre valve closed
2/21/2012	3:55:11 PM	SiCl4 post valve closed
2/21/2012	3:55:11 PM	Bypass valve closed
2/21/2012	3:55:11 PM	Bubbler valve closed
2/21/2012	3:55:11 PM	Main Vac valve opened
2/21/2012	3:55:11 PM	Helium MFC set to  0.000000
2/21/2012	3:55:11 PM	H2 MFC set to  0.000000
2/21/2012	3:55:11 PM	BCl3 MFC set to  0.000000
2/21/2012	3:55:11 PM	PH3 MFC set to  0.000000
2/21/2012	3:55:11 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:55:11 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:55:11 PM	Tube furnace set to 0
2/21/2012	3:55:41 PM	H2 valve closed
2/21/2012	3:55:41 PM	BCl3 valve closed
2/21/2012	3:55:41 PM	PH3 valve closed
2/21/2012	3:55:41 PM	SiCl4 pre valve closed
2/21/2012	3:55:41 PM	SiCl4 post valve closed
2/21/2012	3:55:41 PM	Bypass valve closed
2/21/2012	3:55:41 PM	Bubbler valve closed
2/21/2012	3:55:41 PM	Helium valve opened
2/21/2012	3:55:41 PM	Main Vac valve opened
2/21/2012	3:55:41 PM	Helium MFC set to  20.000000
2/21/2012	3:55:41 PM	H2 MFC set to  0.000000
2/21/2012	3:55:41 PM	BCl3 MFC set to  0.000000
2/21/2012	3:55:41 PM	PH3 MFC set to  0.000000
2/21/2012	3:55:41 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:55:41 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:55:41 PM	Tube furnace set to 0
2/21/2012	3:56:11 PM	Helium valve closed
2/21/2012	3:56:11 PM	H2 valve closed
2/21/2012	3:56:11 PM	BCl3 valve closed
2/21/2012	3:56:11 PM	PH3 valve closed
2/21/2012	3:56:11 PM	SiCl4 pre valve closed
2/21/2012	3:56:11 PM	SiCl4 post valve closed
2/21/2012	3:56:11 PM	Bypass valve closed
2/21/2012	3:56:11 PM	Bubbler valve closed
2/21/2012	3:56:11 PM	Main Vac valve opened
2/21/2012	3:56:11 PM	Helium MFC set to  0.000000
2/21/2012	3:56:11 PM	H2 MFC set to  0.000000
2/21/2012	3:56:11 PM	BCl3 MFC set to  0.000000
2/21/2012	3:56:11 PM	PH3 MFC set to  0.000000
2/21/2012	3:56:11 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:56:11 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:56:11 PM	Tube furnace set to 0
2/21/2012	3:56:41 PM	H2 valve closed
2/21/2012	3:56:41 PM	BCl3 valve closed
2/21/2012	3:56:41 PM	PH3 valve closed
2/21/2012	3:56:41 PM	SiCl4 pre valve closed
2/21/2012	3:56:41 PM	SiCl4 post valve closed
2/21/2012	3:56:41 PM	Bypass valve closed
2/21/2012	3:56:41 PM	Bubbler valve closed
2/21/2012	3:56:41 PM	Helium valve opened
2/21/2012	3:56:41 PM	Main Vac valve opened
2/21/2012	3:56:41 PM	Helium MFC set to  20.000000
2/21/2012	3:56:41 PM	H2 MFC set to  0.000000
2/21/2012	3:56:41 PM	BCl3 MFC set to  0.000000
2/21/2012	3:56:41 PM	PH3 MFC set to  0.000000
2/21/2012	3:56:41 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:56:41 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:56:41 PM	Tube furnace set to 0
2/21/2012	3:57:11 PM	Helium valve closed
2/21/2012	3:57:11 PM	H2 valve closed
2/21/2012	3:57:11 PM	BCl3 valve closed
2/21/2012	3:57:11 PM	PH3 valve closed
2/21/2012	3:57:11 PM	SiCl4 pre valve closed
2/21/2012	3:57:11 PM	SiCl4 post valve closed
2/21/2012	3:57:11 PM	Bypass valve closed
2/21/2012	3:57:11 PM	Bubbler valve closed
2/21/2012	3:57:11 PM	Main Vac valve opened
2/21/2012	3:57:11 PM	Helium MFC set to  0.000000
2/21/2012	3:57:11 PM	H2 MFC set to  0.000000
2/21/2012	3:57:11 PM	BCl3 MFC set to  0.000000
2/21/2012	3:57:11 PM	PH3 MFC set to  0.000000
2/21/2012	3:57:11 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:57:11 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:57:12 PM	Tube furnace set to 200
2/21/2012	3:57:42 PM	H2 valve closed
2/21/2012	3:57:42 PM	BCl3 valve closed
2/21/2012	3:57:42 PM	PH3 valve closed
2/21/2012	3:57:42 PM	SiCl4 pre valve closed
2/21/2012	3:57:42 PM	SiCl4 post valve closed
2/21/2012	3:57:42 PM	Bypass valve closed
2/21/2012	3:57:42 PM	Bubbler valve closed
2/21/2012	3:57:42 PM	Helium valve opened
2/21/2012	3:57:42 PM	Main Vac valve opened
2/21/2012	3:57:42 PM	Helium MFC set to  20.000000
2/21/2012	3:57:42 PM	H2 MFC set to  0.000000
2/21/2012	3:57:42 PM	BCl3 MFC set to  0.000000
2/21/2012	3:57:42 PM	PH3 MFC set to  0.000000
2/21/2012	3:57:42 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:57:42 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:57:42 PM	Tube furnace set to 200
2/21/2012	3:58:12 PM	Helium valve closed
2/21/2012	3:58:12 PM	H2 valve closed
2/21/2012	3:58:12 PM	BCl3 valve closed
2/21/2012	3:58:12 PM	PH3 valve closed
2/21/2012	3:58:12 PM	SiCl4 pre valve closed
2/21/2012	3:58:12 PM	SiCl4 post valve closed
2/21/2012	3:58:12 PM	Bypass valve closed
2/21/2012	3:58:12 PM	Bubbler valve closed
2/21/2012	3:58:12 PM	Main Vac valve opened
2/21/2012	3:58:12 PM	Helium MFC set to  0.000000
2/21/2012	3:58:12 PM	H2 MFC set to  0.000000
2/21/2012	3:58:12 PM	BCl3 MFC set to  0.000000
2/21/2012	3:58:12 PM	PH3 MFC set to  0.000000
2/21/2012	3:58:12 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:58:12 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:58:12 PM	Tube furnace set to 200
2/21/2012	3:58:42 PM	H2 valve closed
2/21/2012	3:58:42 PM	BCl3 valve closed
2/21/2012	3:58:42 PM	PH3 valve closed
2/21/2012	3:58:42 PM	SiCl4 pre valve closed
2/21/2012	3:58:42 PM	SiCl4 post valve closed
2/21/2012	3:58:42 PM	Bypass valve closed
2/21/2012	3:58:42 PM	Bubbler valve closed
2/21/2012	3:58:42 PM	Helium valve opened
2/21/2012	3:58:42 PM	Main Vac valve opened
2/21/2012	3:58:42 PM	Helium MFC set to  20.000000
2/21/2012	3:58:42 PM	H2 MFC set to  0.000000
2/21/2012	3:58:42 PM	BCl3 MFC set to  0.000000
2/21/2012	3:58:42 PM	PH3 MFC set to  0.000000
2/21/2012	3:58:42 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:58:42 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:58:42 PM	Tube furnace set to 200
2/21/2012	3:59:12 PM	Helium valve closed
2/21/2012	3:59:12 PM	H2 valve closed
2/21/2012	3:59:12 PM	BCl3 valve closed
2/21/2012	3:59:12 PM	PH3 valve closed
2/21/2012	3:59:12 PM	SiCl4 pre valve closed
2/21/2012	3:59:12 PM	SiCl4 post valve closed
2/21/2012	3:59:12 PM	Bypass valve closed
2/21/2012	3:59:12 PM	Bubbler valve closed
2/21/2012	3:59:12 PM	Main Vac valve opened
2/21/2012	3:59:12 PM	Helium MFC set to  0.000000
2/21/2012	3:59:12 PM	H2 MFC set to  0.000000
2/21/2012	3:59:12 PM	BCl3 MFC set to  0.000000
2/21/2012	3:59:12 PM	PH3 MFC set to  0.000000
2/21/2012	3:59:12 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:59:12 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:59:12 PM	Tube furnace set to 200
2/21/2012	3:59:43 PM	H2 valve closed
2/21/2012	3:59:43 PM	BCl3 valve closed
2/21/2012	3:59:43 PM	PH3 valve closed
2/21/2012	3:59:43 PM	SiCl4 pre valve closed
2/21/2012	3:59:43 PM	SiCl4 post valve closed
2/21/2012	3:59:43 PM	Bypass valve closed
2/21/2012	3:59:43 PM	Bubbler valve closed
2/21/2012	3:59:43 PM	Helium valve opened
2/21/2012	3:59:43 PM	Main Vac valve opened
2/21/2012	3:59:43 PM	Helium MFC set to  20.000000
2/21/2012	3:59:43 PM	H2 MFC set to  0.000000
2/21/2012	3:59:43 PM	BCl3 MFC set to  0.000000
2/21/2012	3:59:43 PM	PH3 MFC set to  0.000000
2/21/2012	3:59:43 PM	SiCl4 MFC set to  0.000000
2/21/2012	3:59:43 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	3:59:43 PM	Tube furnace set to 200
2/21/2012	4:00:13 PM	Helium valve closed
2/21/2012	4:00:13 PM	H2 valve closed
2/21/2012	4:00:13 PM	BCl3 valve closed
2/21/2012	4:00:13 PM	PH3 valve closed
2/21/2012	4:00:13 PM	SiCl4 pre valve closed
2/21/2012	4:00:13 PM	SiCl4 post valve closed
2/21/2012	4:00:13 PM	Bypass valve closed
2/21/2012	4:00:13 PM	Bubbler valve closed
2/21/2012	4:00:13 PM	Main Vac valve opened
2/21/2012	4:00:13 PM	Helium MFC set to  0.000000
2/21/2012	4:00:13 PM	H2 MFC set to  0.000000
2/21/2012	4:00:13 PM	BCl3 MFC set to  0.000000
2/21/2012	4:00:13 PM	PH3 MFC set to  0.000000
2/21/2012	4:00:13 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:00:13 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:00:13 PM	Tube furnace set to 200
2/21/2012	4:00:43 PM	H2 valve closed
2/21/2012	4:00:43 PM	BCl3 valve closed
2/21/2012	4:00:43 PM	PH3 valve closed
2/21/2012	4:00:43 PM	SiCl4 pre valve closed
2/21/2012	4:00:43 PM	SiCl4 post valve closed
2/21/2012	4:00:43 PM	Bypass valve closed
2/21/2012	4:00:43 PM	Bubbler valve closed
2/21/2012	4:00:43 PM	Helium valve opened
2/21/2012	4:00:43 PM	Main Vac valve opened
2/21/2012	4:00:43 PM	Helium MFC set to  20.000000
2/21/2012	4:00:43 PM	H2 MFC set to  0.000000
2/21/2012	4:00:43 PM	BCl3 MFC set to  0.000000
2/21/2012	4:00:43 PM	PH3 MFC set to  0.000000
2/21/2012	4:00:43 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:00:43 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:00:43 PM	Tube furnace set to 200
2/21/2012	4:01:13 PM	Helium valve closed
2/21/2012	4:01:13 PM	H2 valve closed
2/21/2012	4:01:13 PM	BCl3 valve closed
2/21/2012	4:01:13 PM	PH3 valve closed
2/21/2012	4:01:13 PM	SiCl4 pre valve closed
2/21/2012	4:01:13 PM	SiCl4 post valve closed
2/21/2012	4:01:13 PM	Bypass valve closed
2/21/2012	4:01:13 PM	Bubbler valve closed
2/21/2012	4:01:13 PM	Main Vac valve opened
2/21/2012	4:01:13 PM	Helium MFC set to  0.000000
2/21/2012	4:01:13 PM	H2 MFC set to  0.000000
2/21/2012	4:01:13 PM	BCl3 MFC set to  0.000000
2/21/2012	4:01:13 PM	PH3 MFC set to  0.000000
2/21/2012	4:01:13 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:01:13 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:01:13 PM	Tube furnace set to 200
2/21/2012	4:01:43 PM	H2 valve closed
2/21/2012	4:01:43 PM	BCl3 valve closed
2/21/2012	4:01:43 PM	PH3 valve closed
2/21/2012	4:01:43 PM	SiCl4 pre valve closed
2/21/2012	4:01:43 PM	SiCl4 post valve closed
2/21/2012	4:01:43 PM	Bypass valve closed
2/21/2012	4:01:43 PM	Bubbler valve closed
2/21/2012	4:01:43 PM	Helium valve opened
2/21/2012	4:01:43 PM	Main Vac valve opened
2/21/2012	4:01:43 PM	Helium MFC set to  20.000000
2/21/2012	4:01:43 PM	H2 MFC set to  0.000000
2/21/2012	4:01:43 PM	BCl3 MFC set to  0.000000
2/21/2012	4:01:43 PM	PH3 MFC set to  0.000000
2/21/2012	4:01:43 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:01:43 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:01:44 PM	Tube furnace set to 200
2/21/2012	4:02:14 PM	Helium valve closed
2/21/2012	4:02:14 PM	H2 valve closed
2/21/2012	4:02:14 PM	BCl3 valve closed
2/21/2012	4:02:14 PM	PH3 valve closed
2/21/2012	4:02:14 PM	SiCl4 pre valve closed
2/21/2012	4:02:14 PM	SiCl4 post valve closed
2/21/2012	4:02:14 PM	Bypass valve closed
2/21/2012	4:02:14 PM	Bubbler valve closed
2/21/2012	4:02:14 PM	Main Vac valve opened
2/21/2012	4:02:14 PM	Helium MFC set to  0.000000
2/21/2012	4:02:14 PM	H2 MFC set to  0.000000
2/21/2012	4:02:14 PM	BCl3 MFC set to  0.000000
2/21/2012	4:02:14 PM	PH3 MFC set to  0.000000
2/21/2012	4:02:14 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:02:14 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:02:14 PM	Tube furnace set to 200
2/21/2012	4:02:44 PM	H2 valve closed
2/21/2012	4:02:44 PM	BCl3 valve closed
2/21/2012	4:02:44 PM	PH3 valve closed
2/21/2012	4:02:44 PM	SiCl4 pre valve closed
2/21/2012	4:02:44 PM	SiCl4 post valve closed
2/21/2012	4:02:44 PM	Bypass valve closed
2/21/2012	4:02:44 PM	Bubbler valve closed
2/21/2012	4:02:44 PM	Helium valve opened
2/21/2012	4:02:44 PM	Main Vac valve opened
2/21/2012	4:02:44 PM	Helium MFC set to  20.000000
2/21/2012	4:02:44 PM	H2 MFC set to  0.000000
2/21/2012	4:02:44 PM	BCl3 MFC set to  0.000000
2/21/2012	4:02:44 PM	PH3 MFC set to  0.000000
2/21/2012	4:02:44 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:02:44 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:02:44 PM	Tube furnace set to 200
2/21/2012	4:03:14 PM	Helium valve closed
2/21/2012	4:03:14 PM	H2 valve closed
2/21/2012	4:03:14 PM	BCl3 valve closed
2/21/2012	4:03:14 PM	PH3 valve closed
2/21/2012	4:03:14 PM	SiCl4 pre valve closed
2/21/2012	4:03:14 PM	SiCl4 post valve closed
2/21/2012	4:03:14 PM	Bypass valve closed
2/21/2012	4:03:14 PM	Bubbler valve closed
2/21/2012	4:03:14 PM	Main Vac valve opened
2/21/2012	4:03:14 PM	Helium MFC set to  0.000000
2/21/2012	4:03:14 PM	H2 MFC set to  0.000000
2/21/2012	4:03:14 PM	BCl3 MFC set to  0.000000
2/21/2012	4:03:14 PM	PH3 MFC set to  0.000000
2/21/2012	4:03:14 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:03:14 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:03:14 PM	Tube furnace set to 0
2/21/2012	4:03:15 PM	Run finished at 4:03 PM
2/21/2012	4:17:37 PM	Main Vac valve closed
2/21/2012	4:17:46 PM	Main Vac valve opened
2/21/2012	4:18:23 PM	Recipe started at 4:18 PM
2/21/2012	4:18:23 PM	Helium valve closed
2/21/2012	4:18:23 PM	H2 valve closed
2/21/2012	4:18:23 PM	BCl3 valve closed
2/21/2012	4:18:23 PM	PH3 valve closed
2/21/2012	4:18:23 PM	SiCl4 pre valve closed
2/21/2012	4:18:23 PM	SiCl4 post valve closed
2/21/2012	4:18:23 PM	Main Vac valve closed
2/21/2012	4:18:23 PM	Bypass valve closed
2/21/2012	4:18:23 PM	Bubbler valve closed
2/21/2012	4:18:23 PM	Helium MFC set to  0.000000
2/21/2012	4:18:23 PM	H2 MFC set to  0.000000
2/21/2012	4:18:23 PM	BCl3 MFC set to  0.000000
2/21/2012	4:18:23 PM	PH3 MFC set to  0.000000
2/21/2012	4:18:23 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:18:23 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:18:23 PM	Tube furnace set to 0
2/21/2012	4:18:26 PM	Helium valve closed
2/21/2012	4:18:26 PM	BCl3 valve closed
2/21/2012	4:18:26 PM	PH3 valve closed
2/21/2012	4:18:26 PM	SiCl4 pre valve closed
2/21/2012	4:18:26 PM	SiCl4 post valve closed
2/21/2012	4:18:26 PM	Main Vac valve closed
2/21/2012	4:18:26 PM	Bypass valve closed
2/21/2012	4:18:26 PM	Bubbler valve closed
2/21/2012	4:18:26 PM	H2 valve opened
2/21/2012	4:18:26 PM	Helium MFC set to  0.000000
2/21/2012	4:18:26 PM	H2 MFC set to  500.000000
2/21/2012	4:18:26 PM	BCl3 MFC set to  0.000000
2/21/2012	4:18:26 PM	PH3 MFC set to  0.000000
2/21/2012	4:18:26 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:18:26 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:18:27 PM	Tube furnace set to 0
2/21/2012	4:19:30 PM	Helium valve closed
2/21/2012	4:19:30 PM	BCl3 valve closed
2/21/2012	4:19:30 PM	PH3 valve closed
2/21/2012	4:19:30 PM	SiCl4 pre valve closed
2/21/2012	4:19:30 PM	SiCl4 post valve closed
2/21/2012	4:19:30 PM	Main Vac valve closed
2/21/2012	4:19:30 PM	Bypass valve closed
2/21/2012	4:19:30 PM	H2 valve opened
2/21/2012	4:19:30 PM	Bubbler valve opened
2/21/2012	4:19:30 PM	Helium MFC set to  0.000000
2/21/2012	4:19:30 PM	H2 MFC set to  500.000000
2/21/2012	4:19:30 PM	BCl3 MFC set to  0.000000
2/21/2012	4:19:30 PM	PH3 MFC set to  0.000000
2/21/2012	4:19:30 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:19:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:19:30 PM	Tube furnace set to 0
2/21/2012	4:19:31 PM	Helium valve closed
2/21/2012	4:19:31 PM	BCl3 valve closed
2/21/2012	4:19:31 PM	PH3 valve closed
2/21/2012	4:19:31 PM	SiCl4 pre valve closed
2/21/2012	4:19:31 PM	SiCl4 post valve closed
2/21/2012	4:19:31 PM	Main Vac valve closed
2/21/2012	4:19:31 PM	Bypass valve closed
2/21/2012	4:19:31 PM	H2 valve opened
2/21/2012	4:19:31 PM	Bubbler valve opened
2/21/2012	4:19:31 PM	Helium MFC set to  0.000000
2/21/2012	4:19:31 PM	H2 MFC set to  500.000000
2/21/2012	4:19:31 PM	BCl3 MFC set to  0.000000
2/21/2012	4:19:31 PM	PH3 MFC set to  0.000000
2/21/2012	4:19:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:19:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:19:31 PM	Tube furnace set to 1000
2/21/2012	4:39:32 PM	Helium valve closed
2/21/2012	4:39:32 PM	PH3 valve closed
2/21/2012	4:39:32 PM	Main Vac valve closed
2/21/2012	4:39:32 PM	Bypass valve closed
2/21/2012	4:39:32 PM	H2 valve opened
2/21/2012	4:39:32 PM	BCl3 valve opened
2/21/2012	4:39:32 PM	SiCl4 pre valve opened
2/21/2012	4:39:32 PM	SiCl4 post valve opened
2/21/2012	4:39:32 PM	Bubbler valve opened
2/21/2012	4:39:32 PM	Helium MFC set to  0.000000
2/21/2012	4:39:32 PM	H2 MFC set to  450.000000
2/21/2012	4:39:32 PM	BCl3 MFC set to  1.500000
2/21/2012	4:39:32 PM	PH3 MFC set to  0.000000
2/21/2012	4:39:32 PM	SiCl4 MFC set to  50.000000
2/21/2012	4:39:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:39:32 PM	Tube furnace set to 1000
2/21/2012	4:51:32 PM	Helium valve closed
2/21/2012	4:51:32 PM	BCl3 valve closed
2/21/2012	4:51:32 PM	PH3 valve closed
2/21/2012	4:51:32 PM	SiCl4 pre valve closed
2/21/2012	4:51:32 PM	SiCl4 post valve closed
2/21/2012	4:51:32 PM	Main Vac valve closed
2/21/2012	4:51:32 PM	Bypass valve closed
2/21/2012	4:51:32 PM	H2 valve opened
2/21/2012	4:51:32 PM	Bubbler valve opened
2/21/2012	4:51:32 PM	Helium MFC set to  0.000000
2/21/2012	4:51:32 PM	H2 MFC set to  500.000000
2/21/2012	4:51:32 PM	BCl3 MFC set to  0.000000
2/21/2012	4:51:32 PM	PH3 MFC set to  0.000000
2/21/2012	4:51:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:51:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:51:32 PM	Tube furnace set to 950
2/21/2012	4:53:32 PM	Helium valve closed
2/21/2012	4:53:32 PM	BCl3 valve closed
2/21/2012	4:53:32 PM	PH3 valve closed
2/21/2012	4:53:32 PM	SiCl4 pre valve closed
2/21/2012	4:53:32 PM	SiCl4 post valve closed
2/21/2012	4:53:32 PM	Main Vac valve closed
2/21/2012	4:53:32 PM	Bypass valve closed
2/21/2012	4:53:32 PM	H2 valve opened
2/21/2012	4:53:32 PM	Bubbler valve opened
2/21/2012	4:53:32 PM	Helium MFC set to  0.000000
2/21/2012	4:53:32 PM	H2 MFC set to  500.000000
2/21/2012	4:53:32 PM	BCl3 MFC set to  0.000000
2/21/2012	4:53:32 PM	PH3 MFC set to  0.000000
2/21/2012	4:53:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:53:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:53:32 PM	Tube furnace set to 900
2/21/2012	4:55:32 PM	Helium valve closed
2/21/2012	4:55:32 PM	BCl3 valve closed
2/21/2012	4:55:32 PM	PH3 valve closed
2/21/2012	4:55:32 PM	SiCl4 pre valve closed
2/21/2012	4:55:32 PM	SiCl4 post valve closed
2/21/2012	4:55:32 PM	Main Vac valve closed
2/21/2012	4:55:32 PM	Bypass valve closed
2/21/2012	4:55:32 PM	H2 valve opened
2/21/2012	4:55:32 PM	Bubbler valve opened
2/21/2012	4:55:32 PM	Helium MFC set to  0.000000
2/21/2012	4:55:32 PM	H2 MFC set to  500.000000
2/21/2012	4:55:32 PM	BCl3 MFC set to  0.000000
2/21/2012	4:55:32 PM	PH3 MFC set to  0.000000
2/21/2012	4:55:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:55:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:55:32 PM	Tube furnace set to 850
2/21/2012	4:57:32 PM	H2 valve closed
2/21/2012	4:57:32 PM	BCl3 valve closed
2/21/2012	4:57:32 PM	PH3 valve closed
2/21/2012	4:57:32 PM	SiCl4 pre valve closed
2/21/2012	4:57:32 PM	SiCl4 post valve closed
2/21/2012	4:57:32 PM	Main Vac valve closed
2/21/2012	4:57:32 PM	Bypass valve closed
2/21/2012	4:57:32 PM	Helium valve opened
2/21/2012	4:57:32 PM	Bubbler valve opened
2/21/2012	4:57:32 PM	Helium MFC set to  500.000000
2/21/2012	4:57:32 PM	H2 MFC set to  0.000000
2/21/2012	4:57:32 PM	BCl3 MFC set to  0.000000
2/21/2012	4:57:32 PM	PH3 MFC set to  0.000000
2/21/2012	4:57:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:57:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:57:33 PM	Tube furnace set to 800
2/21/2012	4:59:33 PM	H2 valve closed
2/21/2012	4:59:33 PM	BCl3 valve closed
2/21/2012	4:59:33 PM	PH3 valve closed
2/21/2012	4:59:33 PM	SiCl4 pre valve closed
2/21/2012	4:59:33 PM	SiCl4 post valve closed
2/21/2012	4:59:33 PM	Main Vac valve closed
2/21/2012	4:59:33 PM	Bypass valve closed
2/21/2012	4:59:33 PM	Helium valve opened
2/21/2012	4:59:33 PM	Bubbler valve opened
2/21/2012	4:59:33 PM	Helium MFC set to  500.000000
2/21/2012	4:59:33 PM	H2 MFC set to  0.000000
2/21/2012	4:59:33 PM	BCl3 MFC set to  0.000000
2/21/2012	4:59:33 PM	PH3 MFC set to  0.000000
2/21/2012	4:59:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	4:59:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	4:59:33 PM	Tube furnace set to 750
2/21/2012	5:01:33 PM	H2 valve closed
2/21/2012	5:01:33 PM	BCl3 valve closed
2/21/2012	5:01:33 PM	PH3 valve closed
2/21/2012	5:01:33 PM	SiCl4 pre valve closed
2/21/2012	5:01:33 PM	SiCl4 post valve closed
2/21/2012	5:01:33 PM	Main Vac valve closed
2/21/2012	5:01:33 PM	Bypass valve closed
2/21/2012	5:01:33 PM	Helium valve opened
2/21/2012	5:01:33 PM	Bubbler valve opened
2/21/2012	5:01:33 PM	Helium MFC set to  500.000000
2/21/2012	5:01:33 PM	H2 MFC set to  0.000000
2/21/2012	5:01:33 PM	BCl3 MFC set to  0.000000
2/21/2012	5:01:33 PM	PH3 MFC set to  0.000000
2/21/2012	5:01:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:01:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:01:33 PM	Tube furnace set to 0
2/21/2012	5:21:33 PM	Helium valve closed
2/21/2012	5:21:33 PM	H2 valve closed
2/21/2012	5:21:33 PM	BCl3 valve closed
2/21/2012	5:21:33 PM	PH3 valve closed
2/21/2012	5:21:33 PM	SiCl4 pre valve closed
2/21/2012	5:21:33 PM	SiCl4 post valve closed
2/21/2012	5:21:33 PM	Main Vac valve closed
2/21/2012	5:21:33 PM	Bypass valve closed
2/21/2012	5:21:33 PM	Bubbler valve closed
2/21/2012	5:21:33 PM	Helium MFC set to  0.000000
2/21/2012	5:21:33 PM	H2 MFC set to  0.000000
2/21/2012	5:21:33 PM	BCl3 MFC set to  0.000000
2/21/2012	5:21:33 PM	PH3 MFC set to  0.000000
2/21/2012	5:21:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:21:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:21:33 PM	Tube furnace set to 0
2/21/2012	5:21:34 PM	Run finished at 5:21 PM
2/21/2012	5:30:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	5:30:15 PM	Recipe started at 5:30 PM
2/21/2012	5:30:15 PM	Helium valve closed
2/21/2012	5:30:15 PM	H2 valve closed
2/21/2012	5:30:15 PM	BCl3 valve closed
2/21/2012	5:30:15 PM	PH3 valve closed
2/21/2012	5:30:15 PM	SiCl4 pre valve closed
2/21/2012	5:30:15 PM	SiCl4 post valve closed
2/21/2012	5:30:15 PM	Main Vac valve closed
2/21/2012	5:30:15 PM	Bypass valve closed
2/21/2012	5:30:15 PM	Bubbler valve closed
2/21/2012	5:30:15 PM	Helium MFC set to  0.000000
2/21/2012	5:30:15 PM	H2 MFC set to  0.000000
2/21/2012	5:30:15 PM	BCl3 MFC set to  0.000000
2/21/2012	5:30:15 PM	PH3 MFC set to  0.000000
2/21/2012	5:30:15 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:30:15 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:30:15 PM	Tube furnace set to 0
2/21/2012	5:30:18 PM	H2 valve closed
2/21/2012	5:30:18 PM	BCl3 valve closed
2/21/2012	5:30:18 PM	PH3 valve closed
2/21/2012	5:30:18 PM	SiCl4 pre valve closed
2/21/2012	5:30:18 PM	SiCl4 post valve closed
2/21/2012	5:30:18 PM	Main Vac valve closed
2/21/2012	5:30:18 PM	Bypass valve closed
2/21/2012	5:30:18 PM	Bubbler valve closed
2/21/2012	5:30:18 PM	Helium valve opened
2/21/2012	5:30:18 PM	Helium MFC set to  500.000000
2/21/2012	5:30:18 PM	H2 MFC set to  0.000000
2/21/2012	5:30:18 PM	BCl3 MFC set to  0.000000
2/21/2012	5:30:18 PM	PH3 MFC set to  0.000000
2/21/2012	5:30:18 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:30:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:30:18 PM	Tube furnace set to 0
2/21/2012	5:30:20 PM	Helium valve closed
2/21/2012	5:30:20 PM	H2 valve closed
2/21/2012	5:30:20 PM	BCl3 valve closed
2/21/2012	5:30:20 PM	PH3 valve closed
2/21/2012	5:30:20 PM	SiCl4 pre valve closed
2/21/2012	5:30:20 PM	SiCl4 post valve closed
2/21/2012	5:30:20 PM	Main Vac valve closed
2/21/2012	5:30:20 PM	Bypass valve closed
2/21/2012	5:30:20 PM	Bubbler valve closed
2/21/2012	5:30:20 PM	Helium MFC set to  0.000000
2/21/2012	5:30:20 PM	H2 MFC set to  0.000000
2/21/2012	5:30:20 PM	BCl3 MFC set to  0.000000
2/21/2012	5:30:20 PM	PH3 MFC set to  0.000000
2/21/2012	5:30:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:30:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:30:21 PM	Tube furnace set to 0
2/21/2012	5:30:22 PM	Run finished at 5:30 PM
2/21/2012	5:30:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	5:32:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	5:32:19 PM	Recipe started at 5:32 PM
2/21/2012	5:32:19 PM	Helium valve closed
2/21/2012	5:32:19 PM	H2 valve closed
2/21/2012	5:32:19 PM	BCl3 valve closed
2/21/2012	5:32:19 PM	PH3 valve closed
2/21/2012	5:32:19 PM	SiCl4 pre valve closed
2/21/2012	5:32:19 PM	SiCl4 post valve closed
2/21/2012	5:32:19 PM	Main Vac valve closed
2/21/2012	5:32:19 PM	Bubbler valve closed
2/21/2012	5:32:19 PM	Bypass valve opened
2/21/2012	5:32:19 PM	Helium MFC set to  0.000000
2/21/2012	5:32:19 PM	H2 MFC set to  0.000000
2/21/2012	5:32:19 PM	BCl3 MFC set to  0.000000
2/21/2012	5:32:19 PM	PH3 MFC set to  0.000000
2/21/2012	5:32:19 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:32:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:32:19 PM	Tube furnace set to 0
2/21/2012	5:33:18 PM	Helium valve closed
2/21/2012	5:33:18 PM	H2 valve closed
2/21/2012	5:33:18 PM	BCl3 valve closed
2/21/2012	5:33:18 PM	PH3 valve closed
2/21/2012	5:33:18 PM	SiCl4 pre valve closed
2/21/2012	5:33:18 PM	SiCl4 post valve closed
2/21/2012	5:33:18 PM	Main Vac valve closed
2/21/2012	5:33:18 PM	Bubbler valve closed
2/21/2012	5:33:18 PM	Bypass valve opened
2/21/2012	5:33:18 PM	Helium MFC set to  0.000000
2/21/2012	5:33:18 PM	H2 MFC set to  0.000000
2/21/2012	5:33:18 PM	BCl3 MFC set to  0.000000
2/21/2012	5:33:18 PM	PH3 MFC set to  0.000000
2/21/2012	5:33:18 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:33:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:33:18 PM	Tube furnace set to 0
2/21/2012	5:34:18 PM	Helium valve closed
2/21/2012	5:34:18 PM	H2 valve closed
2/21/2012	5:34:18 PM	BCl3 valve closed
2/21/2012	5:34:18 PM	PH3 valve closed
2/21/2012	5:34:18 PM	SiCl4 pre valve closed
2/21/2012	5:34:18 PM	SiCl4 post valve closed
2/21/2012	5:34:18 PM	Bypass valve closed
2/21/2012	5:34:18 PM	Bubbler valve closed
2/21/2012	5:34:18 PM	Main Vac valve opened
2/21/2012	5:34:18 PM	Helium MFC set to  0.000000
2/21/2012	5:34:18 PM	H2 MFC set to  0.000000
2/21/2012	5:34:18 PM	BCl3 MFC set to  0.000000
2/21/2012	5:34:18 PM	PH3 MFC set to  0.000000
2/21/2012	5:34:18 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:34:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:34:18 PM	Tube furnace set to 0
2/21/2012	5:34:19 PM	Run finished at 5:34 PM
2/21/2012	5:34:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	5:48:33 PM	Recipe started at 5:48 PM
2/21/2012	5:48:33 PM	Helium valve closed
2/21/2012	5:48:33 PM	H2 valve closed
2/21/2012	5:48:33 PM	BCl3 valve closed
2/21/2012	5:48:33 PM	PH3 valve closed
2/21/2012	5:48:33 PM	SiCl4 pre valve closed
2/21/2012	5:48:33 PM	SiCl4 post valve closed
2/21/2012	5:48:33 PM	Bypass valve closed
2/21/2012	5:48:33 PM	Bubbler valve closed
2/21/2012	5:48:33 PM	Main Vac valve opened
2/21/2012	5:48:33 PM	Helium MFC set to  0.000000
2/21/2012	5:48:33 PM	H2 MFC set to  0.000000
2/21/2012	5:48:33 PM	BCl3 MFC set to  0.000000
2/21/2012	5:48:33 PM	PH3 MFC set to  0.000000
2/21/2012	5:48:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:48:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:48:33 PM	Tube furnace set to 0
2/21/2012	5:49:03 PM	H2 valve closed
2/21/2012	5:49:03 PM	BCl3 valve closed
2/21/2012	5:49:03 PM	PH3 valve closed
2/21/2012	5:49:03 PM	SiCl4 pre valve closed
2/21/2012	5:49:03 PM	SiCl4 post valve closed
2/21/2012	5:49:03 PM	Bypass valve closed
2/21/2012	5:49:03 PM	Bubbler valve closed
2/21/2012	5:49:03 PM	Helium valve opened
2/21/2012	5:49:03 PM	Main Vac valve opened
2/21/2012	5:49:03 PM	Helium MFC set to  20.000000
2/21/2012	5:49:03 PM	H2 MFC set to  0.000000
2/21/2012	5:49:03 PM	BCl3 MFC set to  0.000000
2/21/2012	5:49:03 PM	PH3 MFC set to  0.000000
2/21/2012	5:49:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:49:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:49:03 PM	Tube furnace set to 0
2/21/2012	5:49:33 PM	Helium valve closed
2/21/2012	5:49:33 PM	H2 valve closed
2/21/2012	5:49:33 PM	BCl3 valve closed
2/21/2012	5:49:33 PM	PH3 valve closed
2/21/2012	5:49:33 PM	SiCl4 pre valve closed
2/21/2012	5:49:33 PM	SiCl4 post valve closed
2/21/2012	5:49:33 PM	Bypass valve closed
2/21/2012	5:49:33 PM	Bubbler valve closed
2/21/2012	5:49:33 PM	Main Vac valve opened
2/21/2012	5:49:33 PM	Helium MFC set to  0.000000
2/21/2012	5:49:33 PM	H2 MFC set to  0.000000
2/21/2012	5:49:33 PM	BCl3 MFC set to  0.000000
2/21/2012	5:49:33 PM	PH3 MFC set to  0.000000
2/21/2012	5:49:33 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:49:33 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:49:33 PM	Tube furnace set to 0
2/21/2012	5:50:03 PM	H2 valve closed
2/21/2012	5:50:03 PM	BCl3 valve closed
2/21/2012	5:50:03 PM	PH3 valve closed
2/21/2012	5:50:03 PM	SiCl4 pre valve closed
2/21/2012	5:50:03 PM	SiCl4 post valve closed
2/21/2012	5:50:03 PM	Bypass valve closed
2/21/2012	5:50:03 PM	Bubbler valve closed
2/21/2012	5:50:03 PM	Helium valve opened
2/21/2012	5:50:03 PM	Main Vac valve opened
2/21/2012	5:50:03 PM	Helium MFC set to  20.000000
2/21/2012	5:50:03 PM	H2 MFC set to  0.000000
2/21/2012	5:50:03 PM	BCl3 MFC set to  0.000000
2/21/2012	5:50:03 PM	PH3 MFC set to  0.000000
2/21/2012	5:50:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:50:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:50:04 PM	Tube furnace set to 0
2/21/2012	5:50:34 PM	Helium valve closed
2/21/2012	5:50:34 PM	H2 valve closed
2/21/2012	5:50:34 PM	BCl3 valve closed
2/21/2012	5:50:34 PM	PH3 valve closed
2/21/2012	5:50:34 PM	SiCl4 pre valve closed
2/21/2012	5:50:34 PM	SiCl4 post valve closed
2/21/2012	5:50:34 PM	Bypass valve closed
2/21/2012	5:50:34 PM	Bubbler valve closed
2/21/2012	5:50:34 PM	Main Vac valve opened
2/21/2012	5:50:34 PM	Helium MFC set to  0.000000
2/21/2012	5:50:34 PM	H2 MFC set to  0.000000
2/21/2012	5:50:34 PM	BCl3 MFC set to  0.000000
2/21/2012	5:50:34 PM	PH3 MFC set to  0.000000
2/21/2012	5:50:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:50:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:50:34 PM	Tube furnace set to 0
2/21/2012	5:51:04 PM	H2 valve closed
2/21/2012	5:51:04 PM	BCl3 valve closed
2/21/2012	5:51:04 PM	PH3 valve closed
2/21/2012	5:51:04 PM	SiCl4 pre valve closed
2/21/2012	5:51:04 PM	SiCl4 post valve closed
2/21/2012	5:51:04 PM	Bypass valve closed
2/21/2012	5:51:04 PM	Bubbler valve closed
2/21/2012	5:51:04 PM	Helium valve opened
2/21/2012	5:51:04 PM	Main Vac valve opened
2/21/2012	5:51:04 PM	Helium MFC set to  20.000000
2/21/2012	5:51:04 PM	H2 MFC set to  0.000000
2/21/2012	5:51:04 PM	BCl3 MFC set to  0.000000
2/21/2012	5:51:04 PM	PH3 MFC set to  0.000000
2/21/2012	5:51:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:51:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:51:04 PM	Tube furnace set to 0
2/21/2012	5:51:34 PM	Helium valve closed
2/21/2012	5:51:34 PM	H2 valve closed
2/21/2012	5:51:34 PM	BCl3 valve closed
2/21/2012	5:51:34 PM	PH3 valve closed
2/21/2012	5:51:34 PM	SiCl4 pre valve closed
2/21/2012	5:51:34 PM	SiCl4 post valve closed
2/21/2012	5:51:34 PM	Bypass valve closed
2/21/2012	5:51:34 PM	Bubbler valve closed
2/21/2012	5:51:34 PM	Main Vac valve opened
2/21/2012	5:51:34 PM	Helium MFC set to  0.000000
2/21/2012	5:51:34 PM	H2 MFC set to  0.000000
2/21/2012	5:51:34 PM	BCl3 MFC set to  0.000000
2/21/2012	5:51:34 PM	PH3 MFC set to  0.000000
2/21/2012	5:51:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:51:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:51:34 PM	Tube furnace set to 0
2/21/2012	5:52:04 PM	H2 valve closed
2/21/2012	5:52:04 PM	BCl3 valve closed
2/21/2012	5:52:04 PM	PH3 valve closed
2/21/2012	5:52:04 PM	SiCl4 pre valve closed
2/21/2012	5:52:04 PM	SiCl4 post valve closed
2/21/2012	5:52:04 PM	Bypass valve closed
2/21/2012	5:52:04 PM	Bubbler valve closed
2/21/2012	5:52:04 PM	Helium valve opened
2/21/2012	5:52:04 PM	Main Vac valve opened
2/21/2012	5:52:04 PM	Helium MFC set to  20.000000
2/21/2012	5:52:04 PM	H2 MFC set to  0.000000
2/21/2012	5:52:04 PM	BCl3 MFC set to  0.000000
2/21/2012	5:52:04 PM	PH3 MFC set to  0.000000
2/21/2012	5:52:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:52:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:52:04 PM	Tube furnace set to 0
2/21/2012	5:52:34 PM	Helium valve closed
2/21/2012	5:52:34 PM	H2 valve closed
2/21/2012	5:52:34 PM	BCl3 valve closed
2/21/2012	5:52:34 PM	PH3 valve closed
2/21/2012	5:52:34 PM	SiCl4 pre valve closed
2/21/2012	5:52:34 PM	SiCl4 post valve closed
2/21/2012	5:52:34 PM	Bypass valve closed
2/21/2012	5:52:34 PM	Bubbler valve closed
2/21/2012	5:52:34 PM	Main Vac valve opened
2/21/2012	5:52:34 PM	Helium MFC set to  0.000000
2/21/2012	5:52:34 PM	H2 MFC set to  0.000000
2/21/2012	5:52:34 PM	BCl3 MFC set to  0.000000
2/21/2012	5:52:34 PM	PH3 MFC set to  0.000000
2/21/2012	5:52:34 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:52:34 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:52:35 PM	Tube furnace set to 0
2/21/2012	5:53:05 PM	H2 valve closed
2/21/2012	5:53:05 PM	BCl3 valve closed
2/21/2012	5:53:05 PM	PH3 valve closed
2/21/2012	5:53:05 PM	SiCl4 pre valve closed
2/21/2012	5:53:05 PM	SiCl4 post valve closed
2/21/2012	5:53:05 PM	Bypass valve closed
2/21/2012	5:53:05 PM	Bubbler valve closed
2/21/2012	5:53:05 PM	Helium valve opened
2/21/2012	5:53:05 PM	Main Vac valve opened
2/21/2012	5:53:05 PM	Helium MFC set to  20.000000
2/21/2012	5:53:05 PM	H2 MFC set to  0.000000
2/21/2012	5:53:05 PM	BCl3 MFC set to  0.000000
2/21/2012	5:53:05 PM	PH3 MFC set to  0.000000
2/21/2012	5:53:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:53:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:53:05 PM	Tube furnace set to 0
2/21/2012	5:53:35 PM	Helium valve closed
2/21/2012	5:53:35 PM	H2 valve closed
2/21/2012	5:53:35 PM	BCl3 valve closed
2/21/2012	5:53:35 PM	PH3 valve closed
2/21/2012	5:53:35 PM	SiCl4 pre valve closed
2/21/2012	5:53:35 PM	SiCl4 post valve closed
2/21/2012	5:53:35 PM	Bypass valve closed
2/21/2012	5:53:35 PM	Bubbler valve closed
2/21/2012	5:53:35 PM	Main Vac valve opened
2/21/2012	5:53:35 PM	Helium MFC set to  0.000000
2/21/2012	5:53:35 PM	H2 MFC set to  0.000000
2/21/2012	5:53:35 PM	BCl3 MFC set to  0.000000
2/21/2012	5:53:35 PM	PH3 MFC set to  0.000000
2/21/2012	5:53:35 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:53:35 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:53:35 PM	Tube furnace set to 0
2/21/2012	5:54:05 PM	H2 valve closed
2/21/2012	5:54:05 PM	BCl3 valve closed
2/21/2012	5:54:05 PM	PH3 valve closed
2/21/2012	5:54:05 PM	SiCl4 pre valve closed
2/21/2012	5:54:05 PM	SiCl4 post valve closed
2/21/2012	5:54:05 PM	Bypass valve closed
2/21/2012	5:54:05 PM	Bubbler valve closed
2/21/2012	5:54:05 PM	Helium valve opened
2/21/2012	5:54:05 PM	Main Vac valve opened
2/21/2012	5:54:05 PM	Helium MFC set to  20.000000
2/21/2012	5:54:05 PM	H2 MFC set to  0.000000
2/21/2012	5:54:05 PM	BCl3 MFC set to  0.000000
2/21/2012	5:54:05 PM	PH3 MFC set to  0.000000
2/21/2012	5:54:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:54:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:54:05 PM	Tube furnace set to 0
2/21/2012	5:54:35 PM	Helium valve closed
2/21/2012	5:54:35 PM	H2 valve closed
2/21/2012	5:54:35 PM	BCl3 valve closed
2/21/2012	5:54:35 PM	PH3 valve closed
2/21/2012	5:54:35 PM	SiCl4 pre valve closed
2/21/2012	5:54:35 PM	SiCl4 post valve closed
2/21/2012	5:54:35 PM	Bypass valve closed
2/21/2012	5:54:35 PM	Bubbler valve closed
2/21/2012	5:54:35 PM	Main Vac valve opened
2/21/2012	5:54:35 PM	Helium MFC set to  0.000000
2/21/2012	5:54:35 PM	H2 MFC set to  0.000000
2/21/2012	5:54:35 PM	BCl3 MFC set to  0.000000
2/21/2012	5:54:35 PM	PH3 MFC set to  0.000000
2/21/2012	5:54:35 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:54:35 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:54:35 PM	Tube furnace set to 0
2/21/2012	5:55:05 PM	H2 valve closed
2/21/2012	5:55:05 PM	BCl3 valve closed
2/21/2012	5:55:05 PM	PH3 valve closed
2/21/2012	5:55:05 PM	SiCl4 pre valve closed
2/21/2012	5:55:05 PM	SiCl4 post valve closed
2/21/2012	5:55:05 PM	Bypass valve closed
2/21/2012	5:55:05 PM	Bubbler valve closed
2/21/2012	5:55:05 PM	Helium valve opened
2/21/2012	5:55:05 PM	Main Vac valve opened
2/21/2012	5:55:05 PM	Helium MFC set to  20.000000
2/21/2012	5:55:05 PM	H2 MFC set to  0.000000
2/21/2012	5:55:05 PM	BCl3 MFC set to  0.000000
2/21/2012	5:55:05 PM	PH3 MFC set to  0.000000
2/21/2012	5:55:05 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:55:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:55:06 PM	Tube furnace set to 0
2/21/2012	5:55:36 PM	Helium valve closed
2/21/2012	5:55:36 PM	H2 valve closed
2/21/2012	5:55:36 PM	BCl3 valve closed
2/21/2012	5:55:36 PM	PH3 valve closed
2/21/2012	5:55:36 PM	SiCl4 pre valve closed
2/21/2012	5:55:36 PM	SiCl4 post valve closed
2/21/2012	5:55:36 PM	Bypass valve closed
2/21/2012	5:55:36 PM	Bubbler valve closed
2/21/2012	5:55:36 PM	Main Vac valve opened
2/21/2012	5:55:36 PM	Helium MFC set to  0.000000
2/21/2012	5:55:36 PM	H2 MFC set to  0.000000
2/21/2012	5:55:36 PM	BCl3 MFC set to  0.000000
2/21/2012	5:55:36 PM	PH3 MFC set to  0.000000
2/21/2012	5:55:36 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:55:36 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:55:36 PM	Tube furnace set to 0
2/21/2012	5:56:06 PM	H2 valve closed
2/21/2012	5:56:06 PM	BCl3 valve closed
2/21/2012	5:56:06 PM	PH3 valve closed
2/21/2012	5:56:06 PM	SiCl4 pre valve closed
2/21/2012	5:56:06 PM	SiCl4 post valve closed
2/21/2012	5:56:06 PM	Bypass valve closed
2/21/2012	5:56:06 PM	Bubbler valve closed
2/21/2012	5:56:06 PM	Helium valve opened
2/21/2012	5:56:06 PM	Main Vac valve opened
2/21/2012	5:56:06 PM	Helium MFC set to  20.000000
2/21/2012	5:56:06 PM	H2 MFC set to  0.000000
2/21/2012	5:56:06 PM	BCl3 MFC set to  0.000000
2/21/2012	5:56:06 PM	PH3 MFC set to  0.000000
2/21/2012	5:56:06 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:56:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:56:06 PM	Tube furnace set to 0
2/21/2012	5:56:36 PM	Helium valve closed
2/21/2012	5:56:36 PM	H2 valve closed
2/21/2012	5:56:36 PM	BCl3 valve closed
2/21/2012	5:56:36 PM	PH3 valve closed
2/21/2012	5:56:36 PM	SiCl4 pre valve closed
2/21/2012	5:56:36 PM	SiCl4 post valve closed
2/21/2012	5:56:36 PM	Bypass valve closed
2/21/2012	5:56:36 PM	Bubbler valve closed
2/21/2012	5:56:36 PM	Main Vac valve opened
2/21/2012	5:56:36 PM	Helium MFC set to  0.000000
2/21/2012	5:56:36 PM	H2 MFC set to  0.000000
2/21/2012	5:56:36 PM	BCl3 MFC set to  0.000000
2/21/2012	5:56:36 PM	PH3 MFC set to  0.000000
2/21/2012	5:56:36 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:56:36 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:56:36 PM	Tube furnace set to 0
2/21/2012	5:57:06 PM	H2 valve closed
2/21/2012	5:57:06 PM	BCl3 valve closed
2/21/2012	5:57:06 PM	PH3 valve closed
2/21/2012	5:57:06 PM	SiCl4 pre valve closed
2/21/2012	5:57:06 PM	SiCl4 post valve closed
2/21/2012	5:57:06 PM	Bypass valve closed
2/21/2012	5:57:06 PM	Bubbler valve closed
2/21/2012	5:57:06 PM	Helium valve opened
2/21/2012	5:57:06 PM	Main Vac valve opened
2/21/2012	5:57:06 PM	Helium MFC set to  20.000000
2/21/2012	5:57:06 PM	H2 MFC set to  0.000000
2/21/2012	5:57:06 PM	BCl3 MFC set to  0.000000
2/21/2012	5:57:06 PM	PH3 MFC set to  0.000000
2/21/2012	5:57:06 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:57:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:57:06 PM	Tube furnace set to 0
2/21/2012	5:57:36 PM	Helium valve closed
2/21/2012	5:57:36 PM	H2 valve closed
2/21/2012	5:57:36 PM	BCl3 valve closed
2/21/2012	5:57:36 PM	PH3 valve closed
2/21/2012	5:57:36 PM	SiCl4 pre valve closed
2/21/2012	5:57:36 PM	SiCl4 post valve closed
2/21/2012	5:57:36 PM	Bypass valve closed
2/21/2012	5:57:36 PM	Bubbler valve closed
2/21/2012	5:57:36 PM	Main Vac valve opened
2/21/2012	5:57:37 PM	Helium MFC set to  0.000000
2/21/2012	5:57:37 PM	H2 MFC set to  0.000000
2/21/2012	5:57:37 PM	BCl3 MFC set to  0.000000
2/21/2012	5:57:37 PM	PH3 MFC set to  0.000000
2/21/2012	5:57:37 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:57:37 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:57:37 PM	Tube furnace set to 200
2/21/2012	5:58:07 PM	H2 valve closed
2/21/2012	5:58:07 PM	BCl3 valve closed
2/21/2012	5:58:07 PM	PH3 valve closed
2/21/2012	5:58:07 PM	SiCl4 pre valve closed
2/21/2012	5:58:07 PM	SiCl4 post valve closed
2/21/2012	5:58:07 PM	Bypass valve closed
2/21/2012	5:58:07 PM	Bubbler valve closed
2/21/2012	5:58:07 PM	Helium valve opened
2/21/2012	5:58:07 PM	Main Vac valve opened
2/21/2012	5:58:07 PM	Helium MFC set to  20.000000
2/21/2012	5:58:07 PM	H2 MFC set to  0.000000
2/21/2012	5:58:07 PM	BCl3 MFC set to  0.000000
2/21/2012	5:58:07 PM	PH3 MFC set to  0.000000
2/21/2012	5:58:07 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:58:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:58:07 PM	Tube furnace set to 200
2/21/2012	5:58:37 PM	Helium valve closed
2/21/2012	5:58:37 PM	H2 valve closed
2/21/2012	5:58:37 PM	BCl3 valve closed
2/21/2012	5:58:37 PM	PH3 valve closed
2/21/2012	5:58:37 PM	SiCl4 pre valve closed
2/21/2012	5:58:37 PM	SiCl4 post valve closed
2/21/2012	5:58:37 PM	Bypass valve closed
2/21/2012	5:58:37 PM	Bubbler valve closed
2/21/2012	5:58:37 PM	Main Vac valve opened
2/21/2012	5:58:37 PM	Helium MFC set to  0.000000
2/21/2012	5:58:37 PM	H2 MFC set to  0.000000
2/21/2012	5:58:37 PM	BCl3 MFC set to  0.000000
2/21/2012	5:58:37 PM	PH3 MFC set to  0.000000
2/21/2012	5:58:37 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:58:37 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:58:37 PM	Tube furnace set to 200
2/21/2012	5:59:07 PM	H2 valve closed
2/21/2012	5:59:07 PM	BCl3 valve closed
2/21/2012	5:59:07 PM	PH3 valve closed
2/21/2012	5:59:07 PM	SiCl4 pre valve closed
2/21/2012	5:59:07 PM	SiCl4 post valve closed
2/21/2012	5:59:07 PM	Bypass valve closed
2/21/2012	5:59:07 PM	Bubbler valve closed
2/21/2012	5:59:07 PM	Helium valve opened
2/21/2012	5:59:07 PM	Main Vac valve opened
2/21/2012	5:59:07 PM	Helium MFC set to  20.000000
2/21/2012	5:59:07 PM	H2 MFC set to  0.000000
2/21/2012	5:59:07 PM	BCl3 MFC set to  0.000000
2/21/2012	5:59:07 PM	PH3 MFC set to  0.000000
2/21/2012	5:59:07 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:59:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:59:07 PM	Tube furnace set to 200
2/21/2012	5:59:37 PM	Helium valve closed
2/21/2012	5:59:37 PM	H2 valve closed
2/21/2012	5:59:37 PM	BCl3 valve closed
2/21/2012	5:59:37 PM	PH3 valve closed
2/21/2012	5:59:37 PM	SiCl4 pre valve closed
2/21/2012	5:59:37 PM	SiCl4 post valve closed
2/21/2012	5:59:37 PM	Bypass valve closed
2/21/2012	5:59:37 PM	Bubbler valve closed
2/21/2012	5:59:37 PM	Main Vac valve opened
2/21/2012	5:59:37 PM	Helium MFC set to  0.000000
2/21/2012	5:59:37 PM	H2 MFC set to  0.000000
2/21/2012	5:59:37 PM	BCl3 MFC set to  0.000000
2/21/2012	5:59:37 PM	PH3 MFC set to  0.000000
2/21/2012	5:59:37 PM	SiCl4 MFC set to  0.000000
2/21/2012	5:59:37 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	5:59:37 PM	Tube furnace set to 200
2/21/2012	6:00:07 PM	H2 valve closed
2/21/2012	6:00:07 PM	BCl3 valve closed
2/21/2012	6:00:07 PM	PH3 valve closed
2/21/2012	6:00:08 PM	SiCl4 pre valve closed
2/21/2012	6:00:08 PM	SiCl4 post valve closed
2/21/2012	6:00:08 PM	Bypass valve closed
2/21/2012	6:00:08 PM	Bubbler valve closed
2/21/2012	6:00:08 PM	Helium valve opened
2/21/2012	6:00:08 PM	Main Vac valve opened
2/21/2012	6:00:08 PM	Helium MFC set to  20.000000
2/21/2012	6:00:08 PM	H2 MFC set to  0.000000
2/21/2012	6:00:08 PM	BCl3 MFC set to  0.000000
2/21/2012	6:00:08 PM	PH3 MFC set to  0.000000
2/21/2012	6:00:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:00:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:00:08 PM	Tube furnace set to 200
2/21/2012	6:00:38 PM	Helium valve closed
2/21/2012	6:00:38 PM	H2 valve closed
2/21/2012	6:00:38 PM	BCl3 valve closed
2/21/2012	6:00:38 PM	PH3 valve closed
2/21/2012	6:00:38 PM	SiCl4 pre valve closed
2/21/2012	6:00:38 PM	SiCl4 post valve closed
2/21/2012	6:00:38 PM	Bypass valve closed
2/21/2012	6:00:38 PM	Bubbler valve closed
2/21/2012	6:00:38 PM	Main Vac valve opened
2/21/2012	6:00:38 PM	Helium MFC set to  0.000000
2/21/2012	6:00:38 PM	H2 MFC set to  0.000000
2/21/2012	6:00:38 PM	BCl3 MFC set to  0.000000
2/21/2012	6:00:38 PM	PH3 MFC set to  0.000000
2/21/2012	6:00:38 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:00:38 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:00:38 PM	Tube furnace set to 200
2/21/2012	6:01:08 PM	H2 valve closed
2/21/2012	6:01:08 PM	BCl3 valve closed
2/21/2012	6:01:08 PM	PH3 valve closed
2/21/2012	6:01:08 PM	SiCl4 pre valve closed
2/21/2012	6:01:08 PM	SiCl4 post valve closed
2/21/2012	6:01:08 PM	Bypass valve closed
2/21/2012	6:01:08 PM	Bubbler valve closed
2/21/2012	6:01:08 PM	Helium valve opened
2/21/2012	6:01:08 PM	Main Vac valve opened
2/21/2012	6:01:08 PM	Helium MFC set to  20.000000
2/21/2012	6:01:08 PM	H2 MFC set to  0.000000
2/21/2012	6:01:08 PM	BCl3 MFC set to  0.000000
2/21/2012	6:01:08 PM	PH3 MFC set to  0.000000
2/21/2012	6:01:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:01:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:01:08 PM	Tube furnace set to 200
2/21/2012	6:01:38 PM	Helium valve closed
2/21/2012	6:01:38 PM	H2 valve closed
2/21/2012	6:01:38 PM	BCl3 valve closed
2/21/2012	6:01:38 PM	PH3 valve closed
2/21/2012	6:01:38 PM	SiCl4 pre valve closed
2/21/2012	6:01:38 PM	SiCl4 post valve closed
2/21/2012	6:01:38 PM	Bypass valve closed
2/21/2012	6:01:38 PM	Bubbler valve closed
2/21/2012	6:01:38 PM	Main Vac valve opened
2/21/2012	6:01:38 PM	Helium MFC set to  0.000000
2/21/2012	6:01:38 PM	H2 MFC set to  0.000000
2/21/2012	6:01:38 PM	BCl3 MFC set to  0.000000
2/21/2012	6:01:38 PM	PH3 MFC set to  0.000000
2/21/2012	6:01:38 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:01:38 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:01:38 PM	Tube furnace set to 200
2/21/2012	6:02:08 PM	H2 valve closed
2/21/2012	6:02:08 PM	BCl3 valve closed
2/21/2012	6:02:08 PM	PH3 valve closed
2/21/2012	6:02:08 PM	SiCl4 pre valve closed
2/21/2012	6:02:08 PM	SiCl4 post valve closed
2/21/2012	6:02:08 PM	Bypass valve closed
2/21/2012	6:02:08 PM	Bubbler valve closed
2/21/2012	6:02:08 PM	Helium valve opened
2/21/2012	6:02:08 PM	Main Vac valve opened
2/21/2012	6:02:08 PM	Helium MFC set to  20.000000
2/21/2012	6:02:08 PM	H2 MFC set to  0.000000
2/21/2012	6:02:08 PM	BCl3 MFC set to  0.000000
2/21/2012	6:02:08 PM	PH3 MFC set to  0.000000
2/21/2012	6:02:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:02:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:02:08 PM	Tube furnace set to 200
2/21/2012	6:02:39 PM	Helium valve closed
2/21/2012	6:02:39 PM	H2 valve closed
2/21/2012	6:02:39 PM	BCl3 valve closed
2/21/2012	6:02:39 PM	PH3 valve closed
2/21/2012	6:02:39 PM	SiCl4 pre valve closed
2/21/2012	6:02:39 PM	SiCl4 post valve closed
2/21/2012	6:02:39 PM	Bypass valve closed
2/21/2012	6:02:39 PM	Bubbler valve closed
2/21/2012	6:02:39 PM	Main Vac valve opened
2/21/2012	6:02:39 PM	Helium MFC set to  0.000000
2/21/2012	6:02:39 PM	H2 MFC set to  0.000000
2/21/2012	6:02:39 PM	BCl3 MFC set to  0.000000
2/21/2012	6:02:39 PM	PH3 MFC set to  0.000000
2/21/2012	6:02:39 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:02:39 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:02:39 PM	Tube furnace set to 200
2/21/2012	6:03:09 PM	H2 valve closed
2/21/2012	6:03:09 PM	BCl3 valve closed
2/21/2012	6:03:09 PM	PH3 valve closed
2/21/2012	6:03:09 PM	SiCl4 pre valve closed
2/21/2012	6:03:09 PM	SiCl4 post valve closed
2/21/2012	6:03:09 PM	Bypass valve closed
2/21/2012	6:03:09 PM	Bubbler valve closed
2/21/2012	6:03:09 PM	Helium valve opened
2/21/2012	6:03:09 PM	Main Vac valve opened
2/21/2012	6:03:09 PM	Helium MFC set to  20.000000
2/21/2012	6:03:09 PM	H2 MFC set to  0.000000
2/21/2012	6:03:09 PM	BCl3 MFC set to  0.000000
2/21/2012	6:03:09 PM	PH3 MFC set to  0.000000
2/21/2012	6:03:09 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:03:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:03:09 PM	Tube furnace set to 200
2/21/2012	6:03:39 PM	Helium valve closed
2/21/2012	6:03:39 PM	H2 valve closed
2/21/2012	6:03:39 PM	BCl3 valve closed
2/21/2012	6:03:39 PM	PH3 valve closed
2/21/2012	6:03:39 PM	SiCl4 pre valve closed
2/21/2012	6:03:39 PM	SiCl4 post valve closed
2/21/2012	6:03:39 PM	Bypass valve closed
2/21/2012	6:03:39 PM	Bubbler valve closed
2/21/2012	6:03:39 PM	Main Vac valve opened
2/21/2012	6:03:39 PM	Helium MFC set to  0.000000
2/21/2012	6:03:39 PM	H2 MFC set to  0.000000
2/21/2012	6:03:39 PM	BCl3 MFC set to  0.000000
2/21/2012	6:03:39 PM	PH3 MFC set to  0.000000
2/21/2012	6:03:39 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:03:39 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:03:39 PM	Tube furnace set to 0
2/21/2012	6:03:40 PM	Run finished at 6:03 PM
2/21/2012	6:10:57 PM	Main Vac valve closed
2/21/2012	6:11:09 PM	Main Vac valve opened
2/21/2012	6:12:16 PM	Recipe started at 6:12 PM
2/21/2012	6:12:16 PM	Helium valve closed
2/21/2012	6:12:16 PM	H2 valve closed
2/21/2012	6:12:16 PM	BCl3 valve closed
2/21/2012	6:12:16 PM	PH3 valve closed
2/21/2012	6:12:16 PM	SiCl4 pre valve closed
2/21/2012	6:12:16 PM	SiCl4 post valve closed
2/21/2012	6:12:16 PM	Main Vac valve closed
2/21/2012	6:12:16 PM	Bypass valve closed
2/21/2012	6:12:16 PM	Bubbler valve closed
2/21/2012	6:12:16 PM	Helium MFC set to  0.000000
2/21/2012	6:12:16 PM	H2 MFC set to  0.000000
2/21/2012	6:12:16 PM	BCl3 MFC set to  0.000000
2/21/2012	6:12:16 PM	PH3 MFC set to  0.000000
2/21/2012	6:12:16 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:12:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:12:16 PM	Tube furnace set to 0
2/21/2012	6:12:19 PM	Helium valve closed
2/21/2012	6:12:19 PM	BCl3 valve closed
2/21/2012	6:12:19 PM	PH3 valve closed
2/21/2012	6:12:19 PM	SiCl4 pre valve closed
2/21/2012	6:12:19 PM	SiCl4 post valve closed
2/21/2012	6:12:19 PM	Main Vac valve closed
2/21/2012	6:12:19 PM	Bypass valve closed
2/21/2012	6:12:19 PM	Bubbler valve closed
2/21/2012	6:12:19 PM	H2 valve opened
2/21/2012	6:12:19 PM	Helium MFC set to  0.000000
2/21/2012	6:12:19 PM	H2 MFC set to  500.000000
2/21/2012	6:12:19 PM	BCl3 MFC set to  0.000000
2/21/2012	6:12:19 PM	PH3 MFC set to  0.000000
2/21/2012	6:12:19 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:12:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:12:19 PM	Tube furnace set to 0
2/21/2012	6:13:23 PM	Helium valve closed
2/21/2012	6:13:23 PM	BCl3 valve closed
2/21/2012	6:13:23 PM	PH3 valve closed
2/21/2012	6:13:23 PM	SiCl4 pre valve closed
2/21/2012	6:13:23 PM	SiCl4 post valve closed
2/21/2012	6:13:23 PM	Main Vac valve closed
2/21/2012	6:13:23 PM	Bypass valve closed
2/21/2012	6:13:23 PM	H2 valve opened
2/21/2012	6:13:23 PM	Bubbler valve opened
2/21/2012	6:13:23 PM	Helium MFC set to  0.000000
2/21/2012	6:13:23 PM	H2 MFC set to  500.000000
2/21/2012	6:13:23 PM	BCl3 MFC set to  0.000000
2/21/2012	6:13:23 PM	PH3 MFC set to  0.000000
2/21/2012	6:13:23 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:13:23 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:13:23 PM	Tube furnace set to 0
2/21/2012	6:13:24 PM	Helium valve closed
2/21/2012	6:13:24 PM	BCl3 valve closed
2/21/2012	6:13:24 PM	PH3 valve closed
2/21/2012	6:13:24 PM	SiCl4 pre valve closed
2/21/2012	6:13:24 PM	SiCl4 post valve closed
2/21/2012	6:13:24 PM	Main Vac valve closed
2/21/2012	6:13:24 PM	Bypass valve closed
2/21/2012	6:13:24 PM	H2 valve opened
2/21/2012	6:13:24 PM	Bubbler valve opened
2/21/2012	6:13:24 PM	Helium MFC set to  0.000000
2/21/2012	6:13:24 PM	H2 MFC set to  500.000000
2/21/2012	6:13:24 PM	BCl3 MFC set to  0.000000
2/21/2012	6:13:24 PM	PH3 MFC set to  0.000000
2/21/2012	6:13:24 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:13:24 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:13:25 PM	Tube furnace set to 1000
2/21/2012	6:33:25 PM	Helium valve closed
2/21/2012	6:33:25 PM	PH3 valve closed
2/21/2012	6:33:25 PM	Main Vac valve closed
2/21/2012	6:33:25 PM	Bypass valve closed
2/21/2012	6:33:25 PM	H2 valve opened
2/21/2012	6:33:25 PM	BCl3 valve opened
2/21/2012	6:33:25 PM	SiCl4 pre valve opened
2/21/2012	6:33:25 PM	SiCl4 post valve opened
2/21/2012	6:33:25 PM	Bubbler valve opened
2/21/2012	6:33:25 PM	Helium MFC set to  0.000000
2/21/2012	6:33:25 PM	H2 MFC set to  450.000000
2/21/2012	6:33:25 PM	BCl3 MFC set to  1.500000
2/21/2012	6:33:25 PM	PH3 MFC set to  0.000000
2/21/2012	6:33:25 PM	SiCl4 MFC set to  50.000000
2/21/2012	6:33:25 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:33:25 PM	Tube furnace set to 1000
2/21/2012	6:45:25 PM	Helium valve closed
2/21/2012	6:45:25 PM	BCl3 valve closed
2/21/2012	6:45:25 PM	PH3 valve closed
2/21/2012	6:45:25 PM	SiCl4 pre valve closed
2/21/2012	6:45:25 PM	SiCl4 post valve closed
2/21/2012	6:45:25 PM	Main Vac valve closed
2/21/2012	6:45:25 PM	Bypass valve closed
2/21/2012	6:45:25 PM	H2 valve opened
2/21/2012	6:45:25 PM	Bubbler valve opened
2/21/2012	6:45:25 PM	Helium MFC set to  0.000000
2/21/2012	6:45:25 PM	H2 MFC set to  500.000000
2/21/2012	6:45:25 PM	BCl3 MFC set to  0.000000
2/21/2012	6:45:25 PM	PH3 MFC set to  0.000000
2/21/2012	6:45:25 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:45:25 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:45:25 PM	Tube furnace set to 950
2/21/2012	6:47:25 PM	Helium valve closed
2/21/2012	6:47:25 PM	BCl3 valve closed
2/21/2012	6:47:25 PM	PH3 valve closed
2/21/2012	6:47:25 PM	SiCl4 pre valve closed
2/21/2012	6:47:25 PM	SiCl4 post valve closed
2/21/2012	6:47:25 PM	Main Vac valve closed
2/21/2012	6:47:25 PM	Bypass valve closed
2/21/2012	6:47:25 PM	H2 valve opened
2/21/2012	6:47:25 PM	Bubbler valve opened
2/21/2012	6:47:25 PM	Helium MFC set to  0.000000
2/21/2012	6:47:25 PM	H2 MFC set to  500.000000
2/21/2012	6:47:25 PM	BCl3 MFC set to  0.000000
2/21/2012	6:47:25 PM	PH3 MFC set to  0.000000
2/21/2012	6:47:25 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:47:25 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:47:25 PM	Tube furnace set to 900
2/21/2012	6:49:25 PM	Helium valve closed
2/21/2012	6:49:25 PM	BCl3 valve closed
2/21/2012	6:49:25 PM	PH3 valve closed
2/21/2012	6:49:25 PM	SiCl4 pre valve closed
2/21/2012	6:49:25 PM	SiCl4 post valve closed
2/21/2012	6:49:25 PM	Main Vac valve closed
2/21/2012	6:49:25 PM	Bypass valve closed
2/21/2012	6:49:25 PM	H2 valve opened
2/21/2012	6:49:25 PM	Bubbler valve opened
2/21/2012	6:49:25 PM	Helium MFC set to  0.000000
2/21/2012	6:49:25 PM	H2 MFC set to  500.000000
2/21/2012	6:49:25 PM	BCl3 MFC set to  0.000000
2/21/2012	6:49:25 PM	PH3 MFC set to  0.000000
2/21/2012	6:49:25 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:49:25 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:49:25 PM	Tube furnace set to 850
2/21/2012	6:51:23 PM	H2 valve closed
2/21/2012	6:51:23 PM	BCl3 valve closed
2/21/2012	6:51:23 PM	PH3 valve closed
2/21/2012	6:51:23 PM	SiCl4 pre valve closed
2/21/2012	6:51:23 PM	SiCl4 post valve closed
2/21/2012	6:51:23 PM	Main Vac valve closed
2/21/2012	6:51:23 PM	Bypass valve closed
2/21/2012	6:51:23 PM	Helium valve opened
2/21/2012	6:51:23 PM	Bubbler valve opened
2/21/2012	6:51:23 PM	Helium MFC set to  500.000000
2/21/2012	6:51:23 PM	H2 MFC set to  0.000000
2/21/2012	6:51:23 PM	BCl3 MFC set to  0.000000
2/21/2012	6:51:23 PM	PH3 MFC set to  0.000000
2/21/2012	6:51:23 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:51:23 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:51:24 PM	Tube furnace set to 800
2/21/2012	6:52:22 PM	H2 valve closed
2/21/2012	6:52:22 PM	BCl3 valve closed
2/21/2012	6:52:22 PM	PH3 valve closed
2/21/2012	6:52:22 PM	SiCl4 pre valve closed
2/21/2012	6:52:22 PM	SiCl4 post valve closed
2/21/2012	6:52:22 PM	Main Vac valve closed
2/21/2012	6:52:22 PM	Bypass valve closed
2/21/2012	6:52:22 PM	Helium valve opened
2/21/2012	6:52:22 PM	Bubbler valve opened
2/21/2012	6:52:22 PM	Helium MFC set to  500.000000
2/21/2012	6:52:22 PM	H2 MFC set to  0.000000
2/21/2012	6:52:22 PM	BCl3 MFC set to  0.000000
2/21/2012	6:52:22 PM	PH3 MFC set to  0.000000
2/21/2012	6:52:22 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:52:22 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:52:22 PM	Tube furnace set to 750
2/21/2012	6:54:22 PM	H2 valve closed
2/21/2012	6:54:22 PM	BCl3 valve closed
2/21/2012	6:54:22 PM	PH3 valve closed
2/21/2012	6:54:22 PM	SiCl4 pre valve closed
2/21/2012	6:54:22 PM	SiCl4 post valve closed
2/21/2012	6:54:22 PM	Main Vac valve closed
2/21/2012	6:54:22 PM	Bypass valve closed
2/21/2012	6:54:22 PM	Helium valve opened
2/21/2012	6:54:22 PM	Bubbler valve opened
2/21/2012	6:54:22 PM	Helium MFC set to  500.000000
2/21/2012	6:54:22 PM	H2 MFC set to  0.000000
2/21/2012	6:54:22 PM	BCl3 MFC set to  0.000000
2/21/2012	6:54:22 PM	PH3 MFC set to  0.000000
2/21/2012	6:54:22 PM	SiCl4 MFC set to  0.000000
2/21/2012	6:54:22 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	6:54:22 PM	Tube furnace set to 0
2/21/2012	7:09:52 PM	Helium valve closed
2/21/2012	7:09:52 PM	H2 valve closed
2/21/2012	7:09:52 PM	BCl3 valve closed
2/21/2012	7:09:52 PM	PH3 valve closed
2/21/2012	7:09:52 PM	SiCl4 pre valve closed
2/21/2012	7:09:52 PM	SiCl4 post valve closed
2/21/2012	7:09:52 PM	Main Vac valve closed
2/21/2012	7:09:52 PM	Bypass valve closed
2/21/2012	7:09:52 PM	Bubbler valve closed
2/21/2012	7:09:52 PM	Helium MFC set to  0.000000
2/21/2012	7:09:52 PM	H2 MFC set to  0.000000
2/21/2012	7:09:52 PM	BCl3 MFC set to  0.000000
2/21/2012	7:09:52 PM	PH3 MFC set to  0.000000
2/21/2012	7:09:52 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:09:52 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:09:52 PM	Tube furnace set to 0
2/21/2012	7:09:53 PM	Run finished at 7:09 PM
2/21/2012	7:10:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	7:10:14 PM	Recipe started at 7:10 PM
2/21/2012	7:10:14 PM	Helium valve closed
2/21/2012	7:10:14 PM	H2 valve closed
2/21/2012	7:10:14 PM	BCl3 valve closed
2/21/2012	7:10:14 PM	PH3 valve closed
2/21/2012	7:10:14 PM	SiCl4 pre valve closed
2/21/2012	7:10:14 PM	SiCl4 post valve closed
2/21/2012	7:10:14 PM	Main Vac valve closed
2/21/2012	7:10:14 PM	Bypass valve closed
2/21/2012	7:10:14 PM	Bubbler valve closed
2/21/2012	7:10:14 PM	Helium MFC set to  0.000000
2/21/2012	7:10:14 PM	H2 MFC set to  0.000000
2/21/2012	7:10:14 PM	BCl3 MFC set to  0.000000
2/21/2012	7:10:14 PM	PH3 MFC set to  0.000000
2/21/2012	7:10:14 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:10:14 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:10:14 PM	Tube furnace set to 0
2/21/2012	7:10:17 PM	H2 valve closed
2/21/2012	7:10:17 PM	BCl3 valve closed
2/21/2012	7:10:17 PM	PH3 valve closed
2/21/2012	7:10:17 PM	SiCl4 pre valve closed
2/21/2012	7:10:17 PM	SiCl4 post valve closed
2/21/2012	7:10:17 PM	Main Vac valve closed
2/21/2012	7:10:17 PM	Bypass valve closed
2/21/2012	7:10:17 PM	Bubbler valve closed
2/21/2012	7:10:17 PM	Helium valve opened
2/21/2012	7:10:17 PM	Helium MFC set to  500.000000
2/21/2012	7:10:17 PM	H2 MFC set to  0.000000
2/21/2012	7:10:17 PM	BCl3 MFC set to  0.000000
2/21/2012	7:10:17 PM	PH3 MFC set to  0.000000
2/21/2012	7:10:17 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:10:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:10:18 PM	Tube furnace set to 0
2/21/2012	7:10:18 PM	Helium valve closed
2/21/2012	7:10:18 PM	H2 valve closed
2/21/2012	7:10:18 PM	BCl3 valve closed
2/21/2012	7:10:18 PM	PH3 valve closed
2/21/2012	7:10:18 PM	SiCl4 pre valve closed
2/21/2012	7:10:18 PM	SiCl4 post valve closed
2/21/2012	7:10:18 PM	Main Vac valve closed
2/21/2012	7:10:18 PM	Bypass valve closed
2/21/2012	7:10:18 PM	Bubbler valve closed
2/21/2012	7:10:18 PM	Helium MFC set to  0.000000
2/21/2012	7:10:18 PM	H2 MFC set to  0.000000
2/21/2012	7:10:18 PM	BCl3 MFC set to  0.000000
2/21/2012	7:10:18 PM	PH3 MFC set to  0.000000
2/21/2012	7:10:18 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:10:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:10:18 PM	Tube furnace set to 0
2/21/2012	7:10:19 PM	Run finished at 7:10 PM
2/21/2012	7:10:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	7:12:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	7:12:04 PM	Recipe started at 7:12 PM
2/21/2012	7:12:04 PM	Helium valve closed
2/21/2012	7:12:04 PM	H2 valve closed
2/21/2012	7:12:04 PM	BCl3 valve closed
2/21/2012	7:12:04 PM	PH3 valve closed
2/21/2012	7:12:04 PM	SiCl4 pre valve closed
2/21/2012	7:12:04 PM	SiCl4 post valve closed
2/21/2012	7:12:04 PM	Main Vac valve closed
2/21/2012	7:12:04 PM	Bubbler valve closed
2/21/2012	7:12:04 PM	Bypass valve opened
2/21/2012	7:12:04 PM	Helium MFC set to  0.000000
2/21/2012	7:12:04 PM	H2 MFC set to  0.000000
2/21/2012	7:12:04 PM	BCl3 MFC set to  0.000000
2/21/2012	7:12:04 PM	PH3 MFC set to  0.000000
2/21/2012	7:12:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:12:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:12:04 PM	Tube furnace set to 0
2/21/2012	7:13:00 PM	Helium valve closed
2/21/2012	7:13:00 PM	H2 valve closed
2/21/2012	7:13:00 PM	BCl3 valve closed
2/21/2012	7:13:00 PM	PH3 valve closed
2/21/2012	7:13:00 PM	SiCl4 pre valve closed
2/21/2012	7:13:00 PM	SiCl4 post valve closed
2/21/2012	7:13:00 PM	Main Vac valve closed
2/21/2012	7:13:00 PM	Bubbler valve closed
2/21/2012	7:13:00 PM	Bypass valve opened
2/21/2012	7:13:00 PM	Helium MFC set to  0.000000
2/21/2012	7:13:00 PM	H2 MFC set to  0.000000
2/21/2012	7:13:00 PM	BCl3 MFC set to  0.000000
2/21/2012	7:13:00 PM	PH3 MFC set to  0.000000
2/21/2012	7:13:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:13:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:13:00 PM	Tube furnace set to 0
2/21/2012	7:14:00 PM	Helium valve closed
2/21/2012	7:14:00 PM	H2 valve closed
2/21/2012	7:14:00 PM	BCl3 valve closed
2/21/2012	7:14:00 PM	PH3 valve closed
2/21/2012	7:14:00 PM	SiCl4 pre valve closed
2/21/2012	7:14:00 PM	SiCl4 post valve closed
2/21/2012	7:14:00 PM	Bypass valve closed
2/21/2012	7:14:00 PM	Bubbler valve closed
2/21/2012	7:14:00 PM	Main Vac valve opened
2/21/2012	7:14:00 PM	Helium MFC set to  0.000000
2/21/2012	7:14:00 PM	H2 MFC set to  0.000000
2/21/2012	7:14:00 PM	BCl3 MFC set to  0.000000
2/21/2012	7:14:00 PM	PH3 MFC set to  0.000000
2/21/2012	7:14:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:14:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:14:01 PM	Tube furnace set to 0
2/21/2012	7:14:02 PM	Run finished at 7:14 PM
2/21/2012	7:14:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	7:18:50 PM	Recipe started at 7:18 PM
2/21/2012	7:18:50 PM	Helium valve closed
2/21/2012	7:18:50 PM	H2 valve closed
2/21/2012	7:18:50 PM	BCl3 valve closed
2/21/2012	7:18:50 PM	PH3 valve closed
2/21/2012	7:18:50 PM	SiCl4 pre valve closed
2/21/2012	7:18:50 PM	SiCl4 post valve closed
2/21/2012	7:18:50 PM	Bypass valve closed
2/21/2012	7:18:50 PM	Bubbler valve closed
2/21/2012	7:18:50 PM	Main Vac valve opened
2/21/2012	7:18:50 PM	Helium MFC set to  0.000000
2/21/2012	7:18:50 PM	H2 MFC set to  0.000000
2/21/2012	7:18:50 PM	BCl3 MFC set to  0.000000
2/21/2012	7:18:50 PM	PH3 MFC set to  0.000000
2/21/2012	7:18:50 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:18:50 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:18:50 PM	Tube furnace set to 0
2/21/2012	7:18:56 PM	H2 valve closed
2/21/2012	7:18:56 PM	BCl3 valve closed
2/21/2012	7:18:56 PM	PH3 valve closed
2/21/2012	7:18:56 PM	SiCl4 pre valve closed
2/21/2012	7:18:56 PM	SiCl4 post valve closed
2/21/2012	7:18:56 PM	Bypass valve closed
2/21/2012	7:18:56 PM	Bubbler valve closed
2/21/2012	7:18:56 PM	Helium valve opened
2/21/2012	7:18:56 PM	Main Vac valve opened
2/21/2012	7:18:56 PM	Helium MFC set to  20.000000
2/21/2012	7:18:56 PM	H2 MFC set to  0.000000
2/21/2012	7:18:56 PM	BCl3 MFC set to  0.000000
2/21/2012	7:18:56 PM	PH3 MFC set to  0.000000
2/21/2012	7:18:56 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:18:56 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:18:56 PM	Tube furnace set to 0
2/21/2012	7:19:26 PM	Helium valve closed
2/21/2012	7:19:26 PM	H2 valve closed
2/21/2012	7:19:26 PM	BCl3 valve closed
2/21/2012	7:19:26 PM	PH3 valve closed
2/21/2012	7:19:26 PM	SiCl4 pre valve closed
2/21/2012	7:19:26 PM	SiCl4 post valve closed
2/21/2012	7:19:26 PM	Bypass valve closed
2/21/2012	7:19:26 PM	Bubbler valve closed
2/21/2012	7:19:26 PM	Main Vac valve opened
2/21/2012	7:19:26 PM	Helium MFC set to  0.000000
2/21/2012	7:19:26 PM	H2 MFC set to  0.000000
2/21/2012	7:19:26 PM	BCl3 MFC set to  0.000000
2/21/2012	7:19:26 PM	PH3 MFC set to  0.000000
2/21/2012	7:19:26 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:19:26 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:19:27 PM	Tube furnace set to 0
2/21/2012	7:19:57 PM	H2 valve closed
2/21/2012	7:19:57 PM	BCl3 valve closed
2/21/2012	7:19:57 PM	PH3 valve closed
2/21/2012	7:19:57 PM	SiCl4 pre valve closed
2/21/2012	7:19:57 PM	SiCl4 post valve closed
2/21/2012	7:19:57 PM	Bypass valve closed
2/21/2012	7:19:57 PM	Bubbler valve closed
2/21/2012	7:19:57 PM	Helium valve opened
2/21/2012	7:19:57 PM	Main Vac valve opened
2/21/2012	7:19:57 PM	Helium MFC set to  20.000000
2/21/2012	7:19:57 PM	H2 MFC set to  0.000000
2/21/2012	7:19:57 PM	BCl3 MFC set to  0.000000
2/21/2012	7:19:57 PM	PH3 MFC set to  0.000000
2/21/2012	7:19:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:19:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:19:57 PM	Tube furnace set to 0
2/21/2012	7:20:27 PM	Helium valve closed
2/21/2012	7:20:27 PM	H2 valve closed
2/21/2012	7:20:27 PM	BCl3 valve closed
2/21/2012	7:20:27 PM	PH3 valve closed
2/21/2012	7:20:27 PM	SiCl4 pre valve closed
2/21/2012	7:20:27 PM	SiCl4 post valve closed
2/21/2012	7:20:27 PM	Bypass valve closed
2/21/2012	7:20:27 PM	Bubbler valve closed
2/21/2012	7:20:27 PM	Main Vac valve opened
2/21/2012	7:20:27 PM	Helium MFC set to  0.000000
2/21/2012	7:20:27 PM	H2 MFC set to  0.000000
2/21/2012	7:20:27 PM	BCl3 MFC set to  0.000000
2/21/2012	7:20:27 PM	PH3 MFC set to  0.000000
2/21/2012	7:20:27 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:20:27 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:20:27 PM	Tube furnace set to 0
2/21/2012	7:20:57 PM	H2 valve closed
2/21/2012	7:20:57 PM	BCl3 valve closed
2/21/2012	7:20:57 PM	PH3 valve closed
2/21/2012	7:20:57 PM	SiCl4 pre valve closed
2/21/2012	7:20:57 PM	SiCl4 post valve closed
2/21/2012	7:20:57 PM	Bypass valve closed
2/21/2012	7:20:57 PM	Bubbler valve closed
2/21/2012	7:20:57 PM	Helium valve opened
2/21/2012	7:20:57 PM	Main Vac valve opened
2/21/2012	7:20:57 PM	Helium MFC set to  20.000000
2/21/2012	7:20:57 PM	H2 MFC set to  0.000000
2/21/2012	7:20:57 PM	BCl3 MFC set to  0.000000
2/21/2012	7:20:57 PM	PH3 MFC set to  0.000000
2/21/2012	7:20:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:20:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:20:57 PM	Tube furnace set to 0
2/21/2012	7:21:27 PM	Helium valve closed
2/21/2012	7:21:27 PM	H2 valve closed
2/21/2012	7:21:27 PM	BCl3 valve closed
2/21/2012	7:21:27 PM	PH3 valve closed
2/21/2012	7:21:27 PM	SiCl4 pre valve closed
2/21/2012	7:21:27 PM	SiCl4 post valve closed
2/21/2012	7:21:27 PM	Bypass valve closed
2/21/2012	7:21:27 PM	Bubbler valve closed
2/21/2012	7:21:27 PM	Main Vac valve opened
2/21/2012	7:21:27 PM	Helium MFC set to  0.000000
2/21/2012	7:21:27 PM	H2 MFC set to  0.000000
2/21/2012	7:21:27 PM	BCl3 MFC set to  0.000000
2/21/2012	7:21:27 PM	PH3 MFC set to  0.000000
2/21/2012	7:21:27 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:21:27 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:21:27 PM	Tube furnace set to 0
2/21/2012	7:21:57 PM	H2 valve closed
2/21/2012	7:21:57 PM	BCl3 valve closed
2/21/2012	7:21:57 PM	PH3 valve closed
2/21/2012	7:21:57 PM	SiCl4 pre valve closed
2/21/2012	7:21:57 PM	SiCl4 post valve closed
2/21/2012	7:21:57 PM	Bypass valve closed
2/21/2012	7:21:57 PM	Bubbler valve closed
2/21/2012	7:21:57 PM	Helium valve opened
2/21/2012	7:21:57 PM	Main Vac valve opened
2/21/2012	7:21:57 PM	Helium MFC set to  20.000000
2/21/2012	7:21:57 PM	H2 MFC set to  0.000000
2/21/2012	7:21:57 PM	BCl3 MFC set to  0.000000
2/21/2012	7:21:57 PM	PH3 MFC set to  0.000000
2/21/2012	7:21:57 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:21:57 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:21:58 PM	Tube furnace set to 0
2/21/2012	7:22:28 PM	Helium valve closed
2/21/2012	7:22:28 PM	H2 valve closed
2/21/2012	7:22:28 PM	BCl3 valve closed
2/21/2012	7:22:28 PM	PH3 valve closed
2/21/2012	7:22:28 PM	SiCl4 pre valve closed
2/21/2012	7:22:28 PM	SiCl4 post valve closed
2/21/2012	7:22:28 PM	Bypass valve closed
2/21/2012	7:22:28 PM	Bubbler valve closed
2/21/2012	7:22:28 PM	Main Vac valve opened
2/21/2012	7:22:28 PM	Helium MFC set to  0.000000
2/21/2012	7:22:28 PM	H2 MFC set to  0.000000
2/21/2012	7:22:28 PM	BCl3 MFC set to  0.000000
2/21/2012	7:22:28 PM	PH3 MFC set to  0.000000
2/21/2012	7:22:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:22:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:22:28 PM	Tube furnace set to 0
2/21/2012	7:22:58 PM	H2 valve closed
2/21/2012	7:22:58 PM	BCl3 valve closed
2/21/2012	7:22:58 PM	PH3 valve closed
2/21/2012	7:22:58 PM	SiCl4 pre valve closed
2/21/2012	7:22:58 PM	SiCl4 post valve closed
2/21/2012	7:22:58 PM	Bypass valve closed
2/21/2012	7:22:58 PM	Bubbler valve closed
2/21/2012	7:22:58 PM	Helium valve opened
2/21/2012	7:22:58 PM	Main Vac valve opened
2/21/2012	7:22:58 PM	Helium MFC set to  20.000000
2/21/2012	7:22:58 PM	H2 MFC set to  0.000000
2/21/2012	7:22:58 PM	BCl3 MFC set to  0.000000
2/21/2012	7:22:58 PM	PH3 MFC set to  0.000000
2/21/2012	7:22:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:22:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:22:58 PM	Tube furnace set to 0
2/21/2012	7:23:28 PM	Helium valve closed
2/21/2012	7:23:28 PM	H2 valve closed
2/21/2012	7:23:28 PM	BCl3 valve closed
2/21/2012	7:23:28 PM	PH3 valve closed
2/21/2012	7:23:28 PM	SiCl4 pre valve closed
2/21/2012	7:23:28 PM	SiCl4 post valve closed
2/21/2012	7:23:28 PM	Bypass valve closed
2/21/2012	7:23:28 PM	Bubbler valve closed
2/21/2012	7:23:28 PM	Main Vac valve opened
2/21/2012	7:23:28 PM	Helium MFC set to  0.000000
2/21/2012	7:23:28 PM	H2 MFC set to  0.000000
2/21/2012	7:23:28 PM	BCl3 MFC set to  0.000000
2/21/2012	7:23:28 PM	PH3 MFC set to  0.000000
2/21/2012	7:23:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:23:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:23:28 PM	Tube furnace set to 0
2/21/2012	7:23:58 PM	H2 valve closed
2/21/2012	7:23:58 PM	BCl3 valve closed
2/21/2012	7:23:58 PM	PH3 valve closed
2/21/2012	7:23:58 PM	SiCl4 pre valve closed
2/21/2012	7:23:58 PM	SiCl4 post valve closed
2/21/2012	7:23:58 PM	Bypass valve closed
2/21/2012	7:23:58 PM	Bubbler valve closed
2/21/2012	7:23:58 PM	Helium valve opened
2/21/2012	7:23:58 PM	Main Vac valve opened
2/21/2012	7:23:58 PM	Helium MFC set to  20.000000
2/21/2012	7:23:58 PM	H2 MFC set to  0.000000
2/21/2012	7:23:58 PM	BCl3 MFC set to  0.000000
2/21/2012	7:23:58 PM	PH3 MFC set to  0.000000
2/21/2012	7:23:58 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:23:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:23:58 PM	Tube furnace set to 0
2/21/2012	7:24:28 PM	Helium valve closed
2/21/2012	7:24:28 PM	H2 valve closed
2/21/2012	7:24:28 PM	BCl3 valve closed
2/21/2012	7:24:28 PM	PH3 valve closed
2/21/2012	7:24:28 PM	SiCl4 pre valve closed
2/21/2012	7:24:28 PM	SiCl4 post valve closed
2/21/2012	7:24:28 PM	Bypass valve closed
2/21/2012	7:24:28 PM	Bubbler valve closed
2/21/2012	7:24:28 PM	Main Vac valve opened
2/21/2012	7:24:28 PM	Helium MFC set to  0.000000
2/21/2012	7:24:28 PM	H2 MFC set to  0.000000
2/21/2012	7:24:28 PM	BCl3 MFC set to  0.000000
2/21/2012	7:24:28 PM	PH3 MFC set to  0.000000
2/21/2012	7:24:28 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:24:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:24:29 PM	Tube furnace set to 0
2/21/2012	7:24:59 PM	H2 valve closed
2/21/2012	7:24:59 PM	BCl3 valve closed
2/21/2012	7:24:59 PM	PH3 valve closed
2/21/2012	7:24:59 PM	SiCl4 pre valve closed
2/21/2012	7:24:59 PM	SiCl4 post valve closed
2/21/2012	7:24:59 PM	Bypass valve closed
2/21/2012	7:24:59 PM	Bubbler valve closed
2/21/2012	7:24:59 PM	Helium valve opened
2/21/2012	7:24:59 PM	Main Vac valve opened
2/21/2012	7:24:59 PM	Helium MFC set to  20.000000
2/21/2012	7:24:59 PM	H2 MFC set to  0.000000
2/21/2012	7:24:59 PM	BCl3 MFC set to  0.000000
2/21/2012	7:24:59 PM	PH3 MFC set to  0.000000
2/21/2012	7:24:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:24:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:24:59 PM	Tube furnace set to 0
2/21/2012	7:25:29 PM	Helium valve closed
2/21/2012	7:25:29 PM	H2 valve closed
2/21/2012	7:25:29 PM	BCl3 valve closed
2/21/2012	7:25:29 PM	PH3 valve closed
2/21/2012	7:25:29 PM	SiCl4 pre valve closed
2/21/2012	7:25:29 PM	SiCl4 post valve closed
2/21/2012	7:25:29 PM	Bypass valve closed
2/21/2012	7:25:29 PM	Bubbler valve closed
2/21/2012	7:25:29 PM	Main Vac valve opened
2/21/2012	7:25:29 PM	Helium MFC set to  0.000000
2/21/2012	7:25:29 PM	H2 MFC set to  0.000000
2/21/2012	7:25:29 PM	BCl3 MFC set to  0.000000
2/21/2012	7:25:29 PM	PH3 MFC set to  0.000000
2/21/2012	7:25:29 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:25:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:25:29 PM	Tube furnace set to 0
2/21/2012	7:25:59 PM	H2 valve closed
2/21/2012	7:25:59 PM	BCl3 valve closed
2/21/2012	7:25:59 PM	PH3 valve closed
2/21/2012	7:25:59 PM	SiCl4 pre valve closed
2/21/2012	7:25:59 PM	SiCl4 post valve closed
2/21/2012	7:25:59 PM	Bypass valve closed
2/21/2012	7:25:59 PM	Bubbler valve closed
2/21/2012	7:25:59 PM	Helium valve opened
2/21/2012	7:25:59 PM	Main Vac valve opened
2/21/2012	7:25:59 PM	Helium MFC set to  20.000000
2/21/2012	7:25:59 PM	H2 MFC set to  0.000000
2/21/2012	7:25:59 PM	BCl3 MFC set to  0.000000
2/21/2012	7:25:59 PM	PH3 MFC set to  0.000000
2/21/2012	7:25:59 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:25:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:25:59 PM	Tube furnace set to 0
2/21/2012	7:26:29 PM	Helium valve closed
2/21/2012	7:26:29 PM	H2 valve closed
2/21/2012	7:26:29 PM	BCl3 valve closed
2/21/2012	7:26:29 PM	PH3 valve closed
2/21/2012	7:26:29 PM	SiCl4 pre valve closed
2/21/2012	7:26:29 PM	SiCl4 post valve closed
2/21/2012	7:26:29 PM	Bypass valve closed
2/21/2012	7:26:29 PM	Bubbler valve closed
2/21/2012	7:26:29 PM	Main Vac valve opened
2/21/2012	7:26:29 PM	Helium MFC set to  0.000000
2/21/2012	7:26:29 PM	H2 MFC set to  0.000000
2/21/2012	7:26:29 PM	BCl3 MFC set to  0.000000
2/21/2012	7:26:29 PM	PH3 MFC set to  0.000000
2/21/2012	7:26:29 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:26:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:26:29 PM	Tube furnace set to 0
2/21/2012	7:26:59 PM	H2 valve closed
2/21/2012	7:26:59 PM	BCl3 valve closed
2/21/2012	7:26:59 PM	PH3 valve closed
2/21/2012	7:26:59 PM	SiCl4 pre valve closed
2/21/2012	7:26:59 PM	SiCl4 post valve closed
2/21/2012	7:26:59 PM	Bypass valve closed
2/21/2012	7:26:59 PM	Bubbler valve closed
2/21/2012	7:26:59 PM	Helium valve opened
2/21/2012	7:26:59 PM	Main Vac valve opened
2/21/2012	7:26:59 PM	Helium MFC set to  20.000000
2/21/2012	7:26:59 PM	H2 MFC set to  0.000000
2/21/2012	7:26:59 PM	BCl3 MFC set to  0.000000
2/21/2012	7:27:00 PM	PH3 MFC set to  0.000000
2/21/2012	7:27:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:27:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:27:00 PM	Tube furnace set to 0
2/21/2012	7:27:30 PM	Helium valve closed
2/21/2012	7:27:30 PM	H2 valve closed
2/21/2012	7:27:30 PM	BCl3 valve closed
2/21/2012	7:27:30 PM	PH3 valve closed
2/21/2012	7:27:30 PM	SiCl4 pre valve closed
2/21/2012	7:27:30 PM	SiCl4 post valve closed
2/21/2012	7:27:30 PM	Bypass valve closed
2/21/2012	7:27:30 PM	Bubbler valve closed
2/21/2012	7:27:30 PM	Main Vac valve opened
2/21/2012	7:27:30 PM	Helium MFC set to  0.000000
2/21/2012	7:27:30 PM	H2 MFC set to  0.000000
2/21/2012	7:27:30 PM	BCl3 MFC set to  0.000000
2/21/2012	7:27:30 PM	PH3 MFC set to  0.000000
2/21/2012	7:27:30 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:27:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:27:30 PM	Tube furnace set to 200
2/21/2012	7:28:00 PM	H2 valve closed
2/21/2012	7:28:00 PM	BCl3 valve closed
2/21/2012	7:28:00 PM	PH3 valve closed
2/21/2012	7:28:00 PM	SiCl4 pre valve closed
2/21/2012	7:28:00 PM	SiCl4 post valve closed
2/21/2012	7:28:00 PM	Bypass valve closed
2/21/2012	7:28:00 PM	Bubbler valve closed
2/21/2012	7:28:00 PM	Helium valve opened
2/21/2012	7:28:00 PM	Main Vac valve opened
2/21/2012	7:28:00 PM	Helium MFC set to  20.000000
2/21/2012	7:28:00 PM	H2 MFC set to  0.000000
2/21/2012	7:28:00 PM	BCl3 MFC set to  0.000000
2/21/2012	7:28:00 PM	PH3 MFC set to  0.000000
2/21/2012	7:28:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:28:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:28:00 PM	Tube furnace set to 200
2/21/2012	7:28:30 PM	Helium valve closed
2/21/2012	7:28:30 PM	H2 valve closed
2/21/2012	7:28:30 PM	BCl3 valve closed
2/21/2012	7:28:30 PM	PH3 valve closed
2/21/2012	7:28:30 PM	SiCl4 pre valve closed
2/21/2012	7:28:30 PM	SiCl4 post valve closed
2/21/2012	7:28:30 PM	Bypass valve closed
2/21/2012	7:28:30 PM	Bubbler valve closed
2/21/2012	7:28:30 PM	Main Vac valve opened
2/21/2012	7:28:30 PM	Helium MFC set to  0.000000
2/21/2012	7:28:30 PM	H2 MFC set to  0.000000
2/21/2012	7:28:30 PM	BCl3 MFC set to  0.000000
2/21/2012	7:28:30 PM	PH3 MFC set to  0.000000
2/21/2012	7:28:30 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:28:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:28:30 PM	Tube furnace set to 200
2/21/2012	7:29:00 PM	H2 valve closed
2/21/2012	7:29:00 PM	BCl3 valve closed
2/21/2012	7:29:00 PM	PH3 valve closed
2/21/2012	7:29:00 PM	SiCl4 pre valve closed
2/21/2012	7:29:00 PM	SiCl4 post valve closed
2/21/2012	7:29:00 PM	Bypass valve closed
2/21/2012	7:29:00 PM	Bubbler valve closed
2/21/2012	7:29:00 PM	Helium valve opened
2/21/2012	7:29:00 PM	Main Vac valve opened
2/21/2012	7:29:00 PM	Helium MFC set to  20.000000
2/21/2012	7:29:00 PM	H2 MFC set to  0.000000
2/21/2012	7:29:00 PM	BCl3 MFC set to  0.000000
2/21/2012	7:29:00 PM	PH3 MFC set to  0.000000
2/21/2012	7:29:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:29:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:29:01 PM	Tube furnace set to 200
2/21/2012	7:29:31 PM	Helium valve closed
2/21/2012	7:29:31 PM	H2 valve closed
2/21/2012	7:29:31 PM	BCl3 valve closed
2/21/2012	7:29:31 PM	PH3 valve closed
2/21/2012	7:29:31 PM	SiCl4 pre valve closed
2/21/2012	7:29:31 PM	SiCl4 post valve closed
2/21/2012	7:29:31 PM	Bypass valve closed
2/21/2012	7:29:31 PM	Bubbler valve closed
2/21/2012	7:29:31 PM	Main Vac valve opened
2/21/2012	7:29:31 PM	Helium MFC set to  0.000000
2/21/2012	7:29:31 PM	H2 MFC set to  0.000000
2/21/2012	7:29:31 PM	BCl3 MFC set to  0.000000
2/21/2012	7:29:31 PM	PH3 MFC set to  0.000000
2/21/2012	7:29:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:29:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:29:31 PM	Tube furnace set to 200
2/21/2012	7:30:01 PM	H2 valve closed
2/21/2012	7:30:01 PM	BCl3 valve closed
2/21/2012	7:30:01 PM	PH3 valve closed
2/21/2012	7:30:01 PM	SiCl4 pre valve closed
2/21/2012	7:30:01 PM	SiCl4 post valve closed
2/21/2012	7:30:01 PM	Bypass valve closed
2/21/2012	7:30:01 PM	Bubbler valve closed
2/21/2012	7:30:01 PM	Helium valve opened
2/21/2012	7:30:01 PM	Main Vac valve opened
2/21/2012	7:30:01 PM	Helium MFC set to  20.000000
2/21/2012	7:30:01 PM	H2 MFC set to  0.000000
2/21/2012	7:30:01 PM	BCl3 MFC set to  0.000000
2/21/2012	7:30:01 PM	PH3 MFC set to  0.000000
2/21/2012	7:30:01 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:30:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:30:01 PM	Tube furnace set to 200
2/21/2012	7:30:31 PM	Helium valve closed
2/21/2012	7:30:31 PM	H2 valve closed
2/21/2012	7:30:31 PM	BCl3 valve closed
2/21/2012	7:30:31 PM	PH3 valve closed
2/21/2012	7:30:31 PM	SiCl4 pre valve closed
2/21/2012	7:30:31 PM	SiCl4 post valve closed
2/21/2012	7:30:31 PM	Bypass valve closed
2/21/2012	7:30:31 PM	Bubbler valve closed
2/21/2012	7:30:31 PM	Main Vac valve opened
2/21/2012	7:30:31 PM	Helium MFC set to  0.000000
2/21/2012	7:30:31 PM	H2 MFC set to  0.000000
2/21/2012	7:30:31 PM	BCl3 MFC set to  0.000000
2/21/2012	7:30:31 PM	PH3 MFC set to  0.000000
2/21/2012	7:30:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:30:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:30:31 PM	Tube furnace set to 200
2/21/2012	7:31:01 PM	H2 valve closed
2/21/2012	7:31:01 PM	BCl3 valve closed
2/21/2012	7:31:01 PM	PH3 valve closed
2/21/2012	7:31:01 PM	SiCl4 pre valve closed
2/21/2012	7:31:01 PM	SiCl4 post valve closed
2/21/2012	7:31:01 PM	Bypass valve closed
2/21/2012	7:31:01 PM	Bubbler valve closed
2/21/2012	7:31:01 PM	Helium valve opened
2/21/2012	7:31:01 PM	Main Vac valve opened
2/21/2012	7:31:01 PM	Helium MFC set to  20.000000
2/21/2012	7:31:01 PM	H2 MFC set to  0.000000
2/21/2012	7:31:01 PM	BCl3 MFC set to  0.000000
2/21/2012	7:31:01 PM	PH3 MFC set to  0.000000
2/21/2012	7:31:01 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:31:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:31:01 PM	Tube furnace set to 200
2/21/2012	7:31:31 PM	Helium valve closed
2/21/2012	7:31:31 PM	H2 valve closed
2/21/2012	7:31:31 PM	BCl3 valve closed
2/21/2012	7:31:31 PM	PH3 valve closed
2/21/2012	7:31:31 PM	SiCl4 pre valve closed
2/21/2012	7:31:31 PM	SiCl4 post valve closed
2/21/2012	7:31:31 PM	Bypass valve closed
2/21/2012	7:31:31 PM	Bubbler valve closed
2/21/2012	7:31:31 PM	Main Vac valve opened
2/21/2012	7:31:31 PM	Helium MFC set to  0.000000
2/21/2012	7:31:31 PM	H2 MFC set to  0.000000
2/21/2012	7:31:31 PM	BCl3 MFC set to  0.000000
2/21/2012	7:31:31 PM	PH3 MFC set to  0.000000
2/21/2012	7:31:31 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:31:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:31:32 PM	Tube furnace set to 200
2/21/2012	7:32:02 PM	H2 valve closed
2/21/2012	7:32:02 PM	BCl3 valve closed
2/21/2012	7:32:02 PM	PH3 valve closed
2/21/2012	7:32:02 PM	SiCl4 pre valve closed
2/21/2012	7:32:02 PM	SiCl4 post valve closed
2/21/2012	7:32:02 PM	Bypass valve closed
2/21/2012	7:32:02 PM	Bubbler valve closed
2/21/2012	7:32:02 PM	Helium valve opened
2/21/2012	7:32:02 PM	Main Vac valve opened
2/21/2012	7:32:02 PM	Helium MFC set to  20.000000
2/21/2012	7:32:02 PM	H2 MFC set to  0.000000
2/21/2012	7:32:02 PM	BCl3 MFC set to  0.000000
2/21/2012	7:32:02 PM	PH3 MFC set to  0.000000
2/21/2012	7:32:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:32:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:32:02 PM	Tube furnace set to 200
2/21/2012	7:32:32 PM	Helium valve closed
2/21/2012	7:32:32 PM	H2 valve closed
2/21/2012	7:32:32 PM	BCl3 valve closed
2/21/2012	7:32:32 PM	PH3 valve closed
2/21/2012	7:32:32 PM	SiCl4 pre valve closed
2/21/2012	7:32:32 PM	SiCl4 post valve closed
2/21/2012	7:32:32 PM	Bypass valve closed
2/21/2012	7:32:32 PM	Bubbler valve closed
2/21/2012	7:32:32 PM	Main Vac valve opened
2/21/2012	7:32:32 PM	Helium MFC set to  0.000000
2/21/2012	7:32:32 PM	H2 MFC set to  0.000000
2/21/2012	7:32:32 PM	BCl3 MFC set to  0.000000
2/21/2012	7:32:32 PM	PH3 MFC set to  0.000000
2/21/2012	7:32:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:32:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:32:32 PM	Tube furnace set to 200
2/21/2012	7:33:02 PM	H2 valve closed
2/21/2012	7:33:02 PM	BCl3 valve closed
2/21/2012	7:33:02 PM	PH3 valve closed
2/21/2012	7:33:02 PM	SiCl4 pre valve closed
2/21/2012	7:33:02 PM	SiCl4 post valve closed
2/21/2012	7:33:02 PM	Bypass valve closed
2/21/2012	7:33:02 PM	Bubbler valve closed
2/21/2012	7:33:02 PM	Helium valve opened
2/21/2012	7:33:02 PM	Main Vac valve opened
2/21/2012	7:33:02 PM	Helium MFC set to  20.000000
2/21/2012	7:33:02 PM	H2 MFC set to  0.000000
2/21/2012	7:33:02 PM	BCl3 MFC set to  0.000000
2/21/2012	7:33:02 PM	PH3 MFC set to  0.000000
2/21/2012	7:33:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:33:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:33:02 PM	Tube furnace set to 200
2/21/2012	7:33:32 PM	Helium valve closed
2/21/2012	7:33:32 PM	H2 valve closed
2/21/2012	7:33:32 PM	BCl3 valve closed
2/21/2012	7:33:32 PM	PH3 valve closed
2/21/2012	7:33:32 PM	SiCl4 pre valve closed
2/21/2012	7:33:32 PM	SiCl4 post valve closed
2/21/2012	7:33:32 PM	Bypass valve closed
2/21/2012	7:33:32 PM	Bubbler valve closed
2/21/2012	7:33:32 PM	Main Vac valve opened
2/21/2012	7:33:32 PM	Helium MFC set to  0.000000
2/21/2012	7:33:32 PM	H2 MFC set to  0.000000
2/21/2012	7:33:32 PM	BCl3 MFC set to  0.000000
2/21/2012	7:33:32 PM	PH3 MFC set to  0.000000
2/21/2012	7:33:32 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:33:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:33:32 PM	Tube furnace set to 0
2/21/2012	7:33:33 PM	Run finished at 7:33 PM
2/21/2012	7:46:30 PM	Main Vac valve closed
2/21/2012	7:46:39 PM	Main Vac valve opened
2/21/2012	7:47:12 PM	Recipe started at 7:47 PM
2/21/2012	7:47:12 PM	Helium valve closed
2/21/2012	7:47:12 PM	H2 valve closed
2/21/2012	7:47:12 PM	BCl3 valve closed
2/21/2012	7:47:12 PM	PH3 valve closed
2/21/2012	7:47:12 PM	SiCl4 pre valve closed
2/21/2012	7:47:12 PM	SiCl4 post valve closed
2/21/2012	7:47:12 PM	Main Vac valve closed
2/21/2012	7:47:12 PM	Bypass valve closed
2/21/2012	7:47:12 PM	Bubbler valve closed
2/21/2012	7:47:12 PM	Helium MFC set to  0.000000
2/21/2012	7:47:12 PM	H2 MFC set to  0.000000
2/21/2012	7:47:12 PM	BCl3 MFC set to  0.000000
2/21/2012	7:47:12 PM	PH3 MFC set to  0.000000
2/21/2012	7:47:12 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:47:12 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:47:12 PM	Tube furnace set to 0
2/21/2012	7:47:15 PM	Helium valve closed
2/21/2012	7:47:15 PM	BCl3 valve closed
2/21/2012	7:47:15 PM	PH3 valve closed
2/21/2012	7:47:15 PM	SiCl4 pre valve closed
2/21/2012	7:47:15 PM	SiCl4 post valve closed
2/21/2012	7:47:15 PM	Main Vac valve closed
2/21/2012	7:47:15 PM	Bypass valve closed
2/21/2012	7:47:15 PM	Bubbler valve closed
2/21/2012	7:47:15 PM	H2 valve opened
2/21/2012	7:47:15 PM	Helium MFC set to  0.000000
2/21/2012	7:47:15 PM	H2 MFC set to  500.000000
2/21/2012	7:47:15 PM	BCl3 MFC set to  0.000000
2/21/2012	7:47:15 PM	PH3 MFC set to  0.000000
2/21/2012	7:47:15 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:47:15 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:47:15 PM	Tube furnace set to 0
2/21/2012	7:48:18 PM	Helium valve closed
2/21/2012	7:48:18 PM	BCl3 valve closed
2/21/2012	7:48:18 PM	PH3 valve closed
2/21/2012	7:48:18 PM	SiCl4 pre valve closed
2/21/2012	7:48:18 PM	SiCl4 post valve closed
2/21/2012	7:48:18 PM	Main Vac valve closed
2/21/2012	7:48:18 PM	Bypass valve closed
2/21/2012	7:48:18 PM	H2 valve opened
2/21/2012	7:48:18 PM	Bubbler valve opened
2/21/2012	7:48:18 PM	Helium MFC set to  0.000000
2/21/2012	7:48:18 PM	H2 MFC set to  500.000000
2/21/2012	7:48:18 PM	BCl3 MFC set to  0.000000
2/21/2012	7:48:18 PM	PH3 MFC set to  0.000000
2/21/2012	7:48:18 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:48:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:48:18 PM	Tube furnace set to 0
2/21/2012	7:48:19 PM	Helium valve closed
2/21/2012	7:48:19 PM	BCl3 valve closed
2/21/2012	7:48:19 PM	PH3 valve closed
2/21/2012	7:48:19 PM	SiCl4 pre valve closed
2/21/2012	7:48:19 PM	SiCl4 post valve closed
2/21/2012	7:48:19 PM	Main Vac valve closed
2/21/2012	7:48:19 PM	Bypass valve closed
2/21/2012	7:48:19 PM	H2 valve opened
2/21/2012	7:48:19 PM	Bubbler valve opened
2/21/2012	7:48:19 PM	Helium MFC set to  0.000000
2/21/2012	7:48:19 PM	H2 MFC set to  500.000000
2/21/2012	7:48:19 PM	BCl3 MFC set to  0.000000
2/21/2012	7:48:19 PM	PH3 MFC set to  0.000000
2/21/2012	7:48:19 PM	SiCl4 MFC set to  0.000000
2/21/2012	7:48:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	7:48:19 PM	Tube furnace set to 1000
2/21/2012	8:08:19 PM	Helium valve closed
2/21/2012	8:08:19 PM	PH3 valve closed
2/21/2012	8:08:19 PM	Main Vac valve closed
2/21/2012	8:08:19 PM	Bypass valve closed
2/21/2012	8:08:19 PM	H2 valve opened
2/21/2012	8:08:19 PM	BCl3 valve opened
2/21/2012	8:08:19 PM	SiCl4 pre valve opened
2/21/2012	8:08:19 PM	SiCl4 post valve opened
2/21/2012	8:08:19 PM	Bubbler valve opened
2/21/2012	8:08:19 PM	Helium MFC set to  0.000000
2/21/2012	8:08:19 PM	H2 MFC set to  450.000000
2/21/2012	8:08:19 PM	BCl3 MFC set to  1.500000
2/21/2012	8:08:19 PM	PH3 MFC set to  0.000000
2/21/2012	8:08:19 PM	SiCl4 MFC set to  50.000000
2/21/2012	8:08:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:08:19 PM	Tube furnace set to 1000
2/21/2012	8:20:19 PM	Helium valve closed
2/21/2012	8:20:19 PM	BCl3 valve closed
2/21/2012	8:20:19 PM	PH3 valve closed
2/21/2012	8:20:19 PM	SiCl4 pre valve closed
2/21/2012	8:20:19 PM	SiCl4 post valve closed
2/21/2012	8:20:19 PM	Main Vac valve closed
2/21/2012	8:20:19 PM	Bypass valve closed
2/21/2012	8:20:19 PM	H2 valve opened
2/21/2012	8:20:19 PM	Bubbler valve opened
2/21/2012	8:20:19 PM	Helium MFC set to  0.000000
2/21/2012	8:20:19 PM	H2 MFC set to  500.000000
2/21/2012	8:20:19 PM	BCl3 MFC set to  0.000000
2/21/2012	8:20:19 PM	PH3 MFC set to  0.000000
2/21/2012	8:20:19 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:20:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:20:19 PM	Tube furnace set to 950
2/21/2012	8:22:19 PM	Helium valve closed
2/21/2012	8:22:19 PM	BCl3 valve closed
2/21/2012	8:22:19 PM	PH3 valve closed
2/21/2012	8:22:19 PM	SiCl4 pre valve closed
2/21/2012	8:22:19 PM	SiCl4 post valve closed
2/21/2012	8:22:19 PM	Main Vac valve closed
2/21/2012	8:22:19 PM	Bypass valve closed
2/21/2012	8:22:19 PM	H2 valve opened
2/21/2012	8:22:19 PM	Bubbler valve opened
2/21/2012	8:22:19 PM	Helium MFC set to  0.000000
2/21/2012	8:22:19 PM	H2 MFC set to  500.000000
2/21/2012	8:22:19 PM	BCl3 MFC set to  0.000000
2/21/2012	8:22:19 PM	PH3 MFC set to  0.000000
2/21/2012	8:22:19 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:22:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:22:19 PM	Tube furnace set to 900
2/21/2012	8:24:20 PM	Helium valve closed
2/21/2012	8:24:20 PM	BCl3 valve closed
2/21/2012	8:24:20 PM	PH3 valve closed
2/21/2012	8:24:20 PM	SiCl4 pre valve closed
2/21/2012	8:24:20 PM	SiCl4 post valve closed
2/21/2012	8:24:20 PM	Main Vac valve closed
2/21/2012	8:24:20 PM	Bypass valve closed
2/21/2012	8:24:20 PM	H2 valve opened
2/21/2012	8:24:20 PM	Bubbler valve opened
2/21/2012	8:24:20 PM	Helium MFC set to  0.000000
2/21/2012	8:24:20 PM	H2 MFC set to  500.000000
2/21/2012	8:24:20 PM	BCl3 MFC set to  0.000000
2/21/2012	8:24:20 PM	PH3 MFC set to  0.000000
2/21/2012	8:24:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:24:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:24:20 PM	Tube furnace set to 850
2/21/2012	8:26:20 PM	H2 valve closed
2/21/2012	8:26:20 PM	BCl3 valve closed
2/21/2012	8:26:20 PM	PH3 valve closed
2/21/2012	8:26:20 PM	SiCl4 pre valve closed
2/21/2012	8:26:20 PM	SiCl4 post valve closed
2/21/2012	8:26:20 PM	Main Vac valve closed
2/21/2012	8:26:20 PM	Bypass valve closed
2/21/2012	8:26:20 PM	Helium valve opened
2/21/2012	8:26:20 PM	Bubbler valve opened
2/21/2012	8:26:20 PM	Helium MFC set to  500.000000
2/21/2012	8:26:20 PM	H2 MFC set to  0.000000
2/21/2012	8:26:20 PM	BCl3 MFC set to  0.000000
2/21/2012	8:26:20 PM	PH3 MFC set to  0.000000
2/21/2012	8:26:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:26:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:26:20 PM	Tube furnace set to 800
2/21/2012	8:28:20 PM	H2 valve closed
2/21/2012	8:28:20 PM	BCl3 valve closed
2/21/2012	8:28:20 PM	PH3 valve closed
2/21/2012	8:28:20 PM	SiCl4 pre valve closed
2/21/2012	8:28:20 PM	SiCl4 post valve closed
2/21/2012	8:28:20 PM	Main Vac valve closed
2/21/2012	8:28:20 PM	Bypass valve closed
2/21/2012	8:28:20 PM	Helium valve opened
2/21/2012	8:28:20 PM	Bubbler valve opened
2/21/2012	8:28:20 PM	Helium MFC set to  500.000000
2/21/2012	8:28:20 PM	H2 MFC set to  0.000000
2/21/2012	8:28:20 PM	BCl3 MFC set to  0.000000
2/21/2012	8:28:20 PM	PH3 MFC set to  0.000000
2/21/2012	8:28:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:28:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:28:20 PM	Tube furnace set to 750
2/21/2012	8:30:20 PM	H2 valve closed
2/21/2012	8:30:20 PM	BCl3 valve closed
2/21/2012	8:30:20 PM	PH3 valve closed
2/21/2012	8:30:20 PM	SiCl4 pre valve closed
2/21/2012	8:30:20 PM	SiCl4 post valve closed
2/21/2012	8:30:20 PM	Main Vac valve closed
2/21/2012	8:30:20 PM	Bypass valve closed
2/21/2012	8:30:20 PM	Helium valve opened
2/21/2012	8:30:20 PM	Bubbler valve opened
2/21/2012	8:30:20 PM	Helium MFC set to  500.000000
2/21/2012	8:30:20 PM	H2 MFC set to  0.000000
2/21/2012	8:30:20 PM	BCl3 MFC set to  0.000000
2/21/2012	8:30:20 PM	PH3 MFC set to  0.000000
2/21/2012	8:30:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:30:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:30:20 PM	Tube furnace set to 0
2/21/2012	8:50:20 PM	Helium valve closed
2/21/2012	8:50:20 PM	H2 valve closed
2/21/2012	8:50:20 PM	BCl3 valve closed
2/21/2012	8:50:20 PM	PH3 valve closed
2/21/2012	8:50:20 PM	SiCl4 pre valve closed
2/21/2012	8:50:20 PM	SiCl4 post valve closed
2/21/2012	8:50:20 PM	Main Vac valve closed
2/21/2012	8:50:20 PM	Bypass valve closed
2/21/2012	8:50:20 PM	Bubbler valve closed
2/21/2012	8:50:20 PM	Helium MFC set to  0.000000
2/21/2012	8:50:20 PM	H2 MFC set to  0.000000
2/21/2012	8:50:20 PM	BCl3 MFC set to  0.000000
2/21/2012	8:50:20 PM	PH3 MFC set to  0.000000
2/21/2012	8:50:20 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:50:20 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:50:21 PM	Tube furnace set to 0
2/21/2012	8:50:22 PM	Helium valve closed
2/21/2012	8:50:22 PM	H2 valve closed
2/21/2012	8:50:22 PM	BCl3 valve closed
2/21/2012	8:50:22 PM	PH3 valve closed
2/21/2012	8:50:22 PM	SiCl4 pre valve closed
2/21/2012	8:50:22 PM	SiCl4 post valve closed
2/21/2012	8:50:22 PM	Main Vac valve closed
2/21/2012	8:50:22 PM	Bubbler valve closed
2/21/2012	8:50:22 PM	Bypass valve opened
2/21/2012	8:50:22 PM	Helium MFC set to  0.000000
2/21/2012	8:50:22 PM	H2 MFC set to  0.000000
2/21/2012	8:50:22 PM	BCl3 MFC set to  0.000000
2/21/2012	8:50:22 PM	PH3 MFC set to  0.000000
2/21/2012	8:50:22 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:50:22 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:50:22 PM	Tube furnace set to 0
2/21/2012	8:51:07 PM	Helium valve closed
2/21/2012	8:51:07 PM	H2 valve closed
2/21/2012	8:51:07 PM	BCl3 valve closed
2/21/2012	8:51:07 PM	PH3 valve closed
2/21/2012	8:51:07 PM	SiCl4 pre valve closed
2/21/2012	8:51:07 PM	SiCl4 post valve closed
2/21/2012	8:51:08 PM	Main Vac valve closed
2/21/2012	8:51:08 PM	Bubbler valve closed
2/21/2012	8:51:08 PM	Bypass valve opened
2/21/2012	8:51:08 PM	Helium MFC set to  0.000000
2/21/2012	8:51:08 PM	H2 MFC set to  0.000000
2/21/2012	8:51:08 PM	BCl3 MFC set to  0.000000
2/21/2012	8:51:08 PM	PH3 MFC set to  0.000000
2/21/2012	8:51:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:51:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:51:08 PM	Tube furnace set to 0
2/21/2012	8:52:08 PM	Helium valve closed
2/21/2012	8:52:08 PM	H2 valve closed
2/21/2012	8:52:08 PM	BCl3 valve closed
2/21/2012	8:52:08 PM	PH3 valve closed
2/21/2012	8:52:08 PM	SiCl4 pre valve closed
2/21/2012	8:52:08 PM	SiCl4 post valve closed
2/21/2012	8:52:08 PM	Bypass valve closed
2/21/2012	8:52:08 PM	Bubbler valve closed
2/21/2012	8:52:08 PM	Main Vac valve opened
2/21/2012	8:52:08 PM	Helium MFC set to  0.000000
2/21/2012	8:52:08 PM	H2 MFC set to  0.000000
2/21/2012	8:52:08 PM	BCl3 MFC set to  0.000000
2/21/2012	8:52:08 PM	PH3 MFC set to  0.000000
2/21/2012	8:52:08 PM	SiCl4 MFC set to  0.000000
2/21/2012	8:52:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	8:52:08 PM	Tube furnace set to 0
2/21/2012	8:52:09 PM	Run finished at 8:52 PM
2/21/2012	10:16:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	10:16:59 PM	Recipe started at 10:16 PM
2/21/2012	10:16:59 PM	Helium valve closed
2/21/2012	10:16:59 PM	H2 valve closed
2/21/2012	10:16:59 PM	BCl3 valve closed
2/21/2012	10:16:59 PM	PH3 valve closed
2/21/2012	10:16:59 PM	SiCl4 pre valve closed
2/21/2012	10:16:59 PM	SiCl4 post valve closed
2/21/2012	10:16:59 PM	Main Vac valve closed
2/21/2012	10:16:59 PM	Bypass valve closed
2/21/2012	10:16:59 PM	Bubbler valve closed
2/21/2012	10:16:59 PM	Helium MFC set to  0.000000
2/21/2012	10:17:00 PM	H2 MFC set to  0.000000
2/21/2012	10:17:00 PM	BCl3 MFC set to  0.000000
2/21/2012	10:17:00 PM	PH3 MFC set to  0.000000
2/21/2012	10:17:00 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:17:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:17:00 PM	Tube furnace set to 0
2/21/2012	10:17:03 PM	H2 valve closed
2/21/2012	10:17:03 PM	BCl3 valve closed
2/21/2012	10:17:03 PM	PH3 valve closed
2/21/2012	10:17:03 PM	SiCl4 pre valve closed
2/21/2012	10:17:03 PM	SiCl4 post valve closed
2/21/2012	10:17:03 PM	Main Vac valve closed
2/21/2012	10:17:03 PM	Bypass valve closed
2/21/2012	10:17:03 PM	Bubbler valve closed
2/21/2012	10:17:03 PM	Helium valve opened
2/21/2012	10:17:03 PM	Helium MFC set to  500.000000
2/21/2012	10:17:03 PM	H2 MFC set to  0.000000
2/21/2012	10:17:03 PM	BCl3 MFC set to  0.000000
2/21/2012	10:17:03 PM	PH3 MFC set to  0.000000
2/21/2012	10:17:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:17:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:17:03 PM	Tube furnace set to 0
2/21/2012	10:18:04 PM	Helium valve closed
2/21/2012	10:18:04 PM	H2 valve closed
2/21/2012	10:18:04 PM	BCl3 valve closed
2/21/2012	10:18:04 PM	PH3 valve closed
2/21/2012	10:18:04 PM	SiCl4 pre valve closed
2/21/2012	10:18:04 PM	SiCl4 post valve closed
2/21/2012	10:18:04 PM	Main Vac valve closed
2/21/2012	10:18:04 PM	Bypass valve closed
2/21/2012	10:18:04 PM	Bubbler valve closed
2/21/2012	10:18:04 PM	Helium MFC set to  0.000000
2/21/2012	10:18:04 PM	H2 MFC set to  0.000000
2/21/2012	10:18:04 PM	BCl3 MFC set to  0.000000
2/21/2012	10:18:04 PM	PH3 MFC set to  0.000000
2/21/2012	10:18:04 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:18:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:18:04 PM	Tube furnace set to 0
2/21/2012	10:18:05 PM	Run finished at 10:18 PM
2/21/2012	10:18:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2012	10:20:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2012	10:20:02 PM	Recipe started at 10:20 PM
2/21/2012	10:20:03 PM	Helium valve closed
2/21/2012	10:20:03 PM	H2 valve closed
2/21/2012	10:20:03 PM	BCl3 valve closed
2/21/2012	10:20:03 PM	PH3 valve closed
2/21/2012	10:20:03 PM	SiCl4 pre valve closed
2/21/2012	10:20:03 PM	SiCl4 post valve closed
2/21/2012	10:20:03 PM	Main Vac valve closed
2/21/2012	10:20:03 PM	Bubbler valve closed
2/21/2012	10:20:03 PM	Bypass valve opened
2/21/2012	10:20:03 PM	Helium MFC set to  0.000000
2/21/2012	10:20:03 PM	H2 MFC set to  0.000000
2/21/2012	10:20:03 PM	BCl3 MFC set to  0.000000
2/21/2012	10:20:03 PM	PH3 MFC set to  0.000000
2/21/2012	10:20:03 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:20:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:20:03 PM	Tube furnace set to 0
2/21/2012	10:21:01 PM	Helium valve closed
2/21/2012	10:21:01 PM	H2 valve closed
2/21/2012	10:21:01 PM	BCl3 valve closed
2/21/2012	10:21:01 PM	PH3 valve closed
2/21/2012	10:21:01 PM	SiCl4 pre valve closed
2/21/2012	10:21:01 PM	SiCl4 post valve closed
2/21/2012	10:21:01 PM	Main Vac valve closed
2/21/2012	10:21:01 PM	Bubbler valve closed
2/21/2012	10:21:01 PM	Bypass valve opened
2/21/2012	10:21:01 PM	Helium MFC set to  0.000000
2/21/2012	10:21:01 PM	H2 MFC set to  0.000000
2/21/2012	10:21:01 PM	BCl3 MFC set to  0.000000
2/21/2012	10:21:01 PM	PH3 MFC set to  0.000000
2/21/2012	10:21:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:21:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:21:02 PM	Tube furnace set to 0
2/21/2012	10:22:02 PM	Helium valve closed
2/21/2012	10:22:02 PM	H2 valve closed
2/21/2012	10:22:02 PM	BCl3 valve closed
2/21/2012	10:22:02 PM	PH3 valve closed
2/21/2012	10:22:02 PM	SiCl4 pre valve closed
2/21/2012	10:22:02 PM	SiCl4 post valve closed
2/21/2012	10:22:02 PM	Bypass valve closed
2/21/2012	10:22:02 PM	Bubbler valve closed
2/21/2012	10:22:02 PM	Main Vac valve opened
2/21/2012	10:22:02 PM	Helium MFC set to  0.000000
2/21/2012	10:22:02 PM	H2 MFC set to  0.000000
2/21/2012	10:22:02 PM	BCl3 MFC set to  0.000000
2/21/2012	10:22:02 PM	PH3 MFC set to  0.000000
2/21/2012	10:22:02 PM	SiCl4 MFC set to  0.000000
2/21/2012	10:22:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2012	10:22:02 PM	Tube furnace set to 0
2/21/2012	10:22:03 PM	Run finished at 10:22 PM
2/21/2012	10:22:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
